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EP0393524A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Method of making a sintered body of aluminium nitride

Assignee: JFE Steel Corp
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Filing: 1990-04-12
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Granted: —
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Expires: 2010-04-12
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Abstract

Abstract A method of making an aluminium nitride sintered body having more than 95% of relative density, more than 160W/m-K of thermal conductivity, less than 0.5µm, in Ra, of surface roughness, more than 10¹²Ω-cm of volume resistivity, and uniform color and homogeneous appearance. A sintering aid including 0.05-5 parts by weight, in terms of oxide, of oxides of rare earth metals and 0.01-5 parts by weight of one or more elements selected from the group consisting of metallic lithium, metallic beryllium, metallic magnesium, boron, silicon, sulfur, phosphor, arsenic and metallic zinc, is added to 100 parts by weight of powders of aluminium nitride. The mixture is subjected to forming and is sintered in a non-oxidizing atmosphere at a temperature of 1400-2000°C.

Inventors

  • 👤 Tadashi C/O Research Laboratories Of Nakano
  • 👤 Makoto C/O Research Laboratories Of Yokoi
  • 👤 Masato C/O Research Laboratories Of Kumagai
  • 👤 Tosihiko C/O Research Laboratories Of Funahashi
  • 👤 Takao C/O Research Laboratories Of Kanemaru
  • 👤 Tetsuya C/O Research Laboratories Of Mega
  • 👤 Takashi C/O Research Laboratories Of Yamamura

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-09 16:20
CPC Classifications
C; C04; C04B; C04B35/00; C04B35/515; C04B35/58; C04B35/581

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 108 words
A method of making a sintered body of aluminium nitride comprising the steps of: adding to 100 parts by weight of powders of aluminium nitride a sintering aid comprising; (A) 0.05-5 parts by weight, in terms of oxide, of one or more compounds selected from the group consisting of yttria, oxide of scandium and oxide of lanthanoids; and, (B) 0.01-5 parts by weight of one or more elements selected from the group consisting of metallic lithium, metallic beryllium, metallic magnesium, boron, silicon, sulfur, phosphor, arsenic and metallic zinc; forming the thus obtained mixture; and, sintering the thus formed product in a non-oxidizing atmosphere at a temperature of 1400-2000°C.
Claim 2
Independent Claim 108 words
A method of making a sintered body of aluminium nitride comprising the steps of: adding to 100 parts by weight of powders of aluminium nitride a sintering aid comprising; (A) 0.05-5 parts by weight, in terms of oxide, of one or more compounds selected from the group consisting of yttria, oxide of scandium and oxide of lanthanoids; and, (B) 0.01-5 parts by weight of one or more elements selected from the group consisting of metallic lithium, metallic beryllium, metallic magnesium, boron, silicon, sulfur, phosphor, arsenic and metallic zinc; forming the thus obtained mixture; and, sintering the thus formed product in a non-oxidizing atmosphere at a temperature of 1400-2000°C.
Claim 3
Independent Claim 137 words
A method of making a sintered body of aluminium nitride comprising the steps of: adding to 100 parts by weight of powders of aluminium nitride a sintering aid comprising; (A) 0.05-5 parts by weight, in terms of oxide, of one or more compounds selected from the group consisting of yttria, oxide of scandium and oxide of lanthanoids; (B) 0.01-5 parts by weight of one or more elements selected from the group consisting of metallic lithium, metallic beryllium, metallic magnesium, boron, silicon, sulfur, phosphor, arsenic and metallic zinc; and, (C) 0.01-5 parts by weight of one or more compounds selected from the group consisting of metal borides, metal nitrides, metal phosphides, metal sulfides, metal silicides and metal hydrides; forming the thus obtained mixture; and, sintering the thus formed product in a non-oxidizing atmosphere at a temperature of 1400-2000°C.
Claim 4
Independent Claim 137 words
A method of making a sintered body of aluminium nitride comprising the steps of: adding to 100 parts by weight of powders of aluminium nitride a sintering aid comprising; (A) 0.05-5 parts by weight, in terms of oxide, of one or more compounds selected from the group consisting of yttria, oxide of scandium and oxide of lanthanoids; (B) 0.01-5 parts by weight of one or more elements selected from the group consisting of metallic lithium, metallic beryllium, metallic magnesium, boron, silicon, sulfur, phosphor, arsenic and metallic zinc; and, (C) 0.01-5 parts by weight of one or more compounds selected from the group consisting of metal borides, metal nitrides, metal phosphides, metal sulfides, metal silicides and metal hydrides; forming the thus obtained mixture; and, sintering the thus formed product in a non-oxidizing atmosphere at a temperature of 1400-2000°C.
Claim 5
Independent Claim 144 words
A method of making a sintered body of aluminium nitride comprising the steps of: adding to 100 parts by weight of powders of aluminium nitride a sintering aid comprising; (A) 0.05-5 parts by weight, in terms of oxide, of one or more compounds selected from the group consisting of yttria, oxide of scandium and oxide of lanthanoids; (D) 0.01-2 parts by weight, in terms of carbon, of one or more species selected from the group consisting of carbon and those compounds which generate carbon by thermal decomposition when heated at a temperature below 2000°C; and, (C) 0.01-5 parts by weight of one or more compounds selected from the group consisting of metal borides, metal nitrides, metal phosphides, metal sulfides, metal silicides and metal hydrides; forming the thus obtained mixture; and, sintering the thus formed product in a non-oxidizing atmosphere at a temperature of 1400-2000°C.
Claim 6
Independent Claim 144 words
A method of making a sintered body of aluminium nitride comprising the steps of: adding to 100 parts by weight of powders of aluminium nitride a sintering aid comprising; (A) 0.05-5 parts by weight, in terms of oxide, of one or more compounds selected from the group consisting of yttria, oxide of scandium and oxide of lanthanoids; (D) 0.01-2 parts by weight, in terms of carbon, of one or more species selected from the group consisting of carbon and those compounds which generate carbon by thermal decomposition when heated at a temperature below 2000°C; and, (C) 0.01-5 parts by weight of one or more compounds selected from the group consisting of metal borides, metal nitrides, metal phosphides, metal sulfides, metal silicides and metal hydrides; forming the thus obtained mixture; and, sintering the thus formed product in a non-oxidizing atmosphere at a temperature of 1400-2000°C.

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