EP0391035A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Dense fluid photochemical process for substrate treatment
Assignee: Raytheon Co
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Filing: 1990-02-08
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Granted: —
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Expires: 2010-02-08
Abstract
Abstract A process for removing undesired material from a chosen substrate by exposing the substrate simultaneously to ultraviolet radiation and a selected dense fluid, wherein the radiation produces a photochemical reaction that removes the undesired material from the substrate and the dense fluid enhances the removal of the undesired material. In an alternative embodiment, a reactive agent may additionally be used. The process may be used to remove contaminants from a substrate, etch a substrate surface, or destroy toxic organic material in industrial wastes.
Inventors
- 👤 David P. Jackson
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-01 06:58
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0404; B; B08; B08B; B08B3/00; B08B3/04; B08B3/10; B08B3/12; B08B7/00; B08B7/0021; B08B7/0035; B08B7/0057; C; C23; C23G; C23G5/00; H05; H05K; H05K3/00; H05K3/22; H05K3/26; Y; Y10; Y10S; Y10S210/00; Y10S210/902; Y10S210/908
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
80 words
A process for removing undesired material from a chosen substrate comprising the steps of: a) placing said substrate containing said undesired material in a cleaning vessel; b) contacting said substrate containing said undesired material with a chosen dense fluid; c) exposing said substrate and said dense fluid to radiation of a predetermined wavelength to produce a photochemical reaction that removes said undesired material from said substrate wherein said dense fluid enhances the removal of said undesired material from said substrate.
Claim 2
Dependent Claim
80 words
A process for removing undesired material from a chosen substrate comprising the steps of: a) placing said substrate containing said undesired material in a cleaning vessel; b) contacting said substrate containing said undesired material with a chosen dense fluid; c) exposing said substrate and said dense fluid to radiation of a predetermined wavelength to produce a photochemical reaction that removes said undesired material from said substrate wherein said dense fluid enhances the removal of said undesired material from said substrate.
Claim 3
Dependent Claim
22 words
A process as set forth in Claim 1 wherein said radiation comprises ultraviolet radiation within the range of 184 to 300 nanometers.
Claim 4
Dependent Claim
16 words
A process as set forth in Claim 1 wherein said dense fluid comprises a chosen liquid.
Claim 5
Dependent Claim
42 words
A process as set forth in Claim 1 wherein said dense fluid comprises a chosen gas at a pressure equal to or above the critical pressure of said gas and at a temperature above or below the critical temperature of said gas.
Claim 6
Dependent Claim
27 words
A process as set forth in Claim 4 wherein said dense fluid is selected from the group consisting of carbon dioxide, nitrous oxide, krypton, xenon, and oxygen.
Claim 7
Dependent Claim
37 words
A process as set forth in Claim 1 wherein step "b" further comprises contacting said substrate with a chosen reactive agent capable of reacting with said undesired material to thereby enhance the removal of said undesired material.
Claim 8
Dependent Claim
30 words
A process as set forth in Claim 6 wherein said chosen reactive agent is selected from the group consisting of an oxygen-containing compound, a halogen-containing compound, and a hydrogen-containing compound.
Claim 9
Dependent Claim
19 words
A process as set forth in Claim 7 wherein said chosen reactive agent comprises ozone in a supercritical state.
Claim 10
Dependent Claim
29 words
A process as set forth in Claim 1 wherein said undesired material is selected from the group consisting of an organic material, an inorganic material, and an ionic material.
Claim 11
Dependent Claim
34 words
A process as set forth in Claim 1 further comprising after step "c" removing said dense fluid containing said undesired material from said cleaning vessel and adding clean dense fluid to said cleaning vessel.
Claim 12
Dependent Claim
27 words
A process as set forth in Claim 1 wherein said substrate comprises a solid substance contaminated on the surface thereof with a contaminant comprising said undesired material.
Claim 13
Dependent Claim
26 words
A process as set forth in Claim 1 wherein said substrate comprises a liquid and said undesired material comprises contaminants dissolved or suspended in said liquid.
References Cited (Backward Citations)
No citation records indexed.
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