EP0387481A2
Expired / Lapsed
EP
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Position measuring device
Assignee: Dr Johannes Heidenhain GmbH
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Filing: 1990-01-08
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Granted: —
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Expires: 2010-01-08
Abstract
Abstract In a single-grating measuring device (M), the measuring division consists of a phase grating (2). Two coherent part-beams (A and B) are directed by an illuminating device (1) onto the phase grating (2) where they are combined, diffracted and interfere with one another after having passed through the grating. The interfering part beams are phase shifted with respect to one another in accordance with the characteristics of the phase grating (2) and are converted into mutually phase-shifted measurement signals by a detector device (U3). <IMAGE>
Inventors
- 👤 Dieter Dipl.-Ing. Michel (Fh)
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 21:58
CPC Classifications
G; G01; G01D; G01D5/00; G01D5/26; G01D5/32; G01D5/34; G01D5/36; G01D5/38
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