EP0381111A2
Expired / Lapsed
EP
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Electroactive-passivation film
Assignee: Siemens AG
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Filing: 1990-01-29
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Granted: —
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Expires: 2010-01-29
Abstract
Abstract Electroactive passivation films for semiconductor components which have the properties required for this application to a high degree are composed of a thin layer of amorphous, hydrogen-containing carbon.
Inventors
- 👤 Siegfried Dr. Birkle
- 👤 Johann Dr. Kammermaier
- 👤 Gerhard Dr. Schmidt
- 👤 Albrecht Prof. Dr. Winnacker
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-02 23:42
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/40; H10W74/01; Y; Y10; Y10S; Y10S438/00; Y10S438/958
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