EP0381109A2
Expired / Lapsed
EP
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Moisture barrier for organic dielectrics
Assignee: Siemens AG
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Filing: 1990-01-29
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Granted: —
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Expires: 2010-01-29
Abstract
Abstract Translated from German Hermetisch abdeckende und gut haftende Feuchtesperren für organische Dielektrika in integrierten Schaltungen, die auch eine einfache Strukturierung der Dielektrika erlauben, bestehen aus einer dünnen Schicht aus amorphem, wasserstoffhaltigem Kohlenstoff. Hermetically covering and well-adhering moisture barriers for organic dielectrics in integrated circuits, which also allow simple structuring of the dielectrics, consist of a thin layer of amorphous, hydrogen-containing carbon.
Inventors
- 👤 Siegfried Dr. Birkle
- 👤 Johann Dr. Kammermaier
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-31 10:54
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/01; H10W74/40
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