EP0379828B1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Radio frequency induction/multipole plasma processing tool
Assignee: International Business Machines Corp
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Filing: 1989-12-19
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Granted: 1995-09-27
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Expires: 2009-12-19
Abstract
No abstract record available.
Inventors
- 👤 Dennis Keith Coultas
- 👤 John Howard Keller
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-02 18:35
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/321; H01J37/32431; H01J37/32623; H01J37/3266; H01J37/32688
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
248 words
A plasma dry processing apparatus comprising: a) a chamber (10) for plasma processing having an external wall, said chamber containing at least one work piece (11) having a surface to be processed in a plasma; and b) induction means (22) comprising an induction coil for providing a radio frequency induction field within said chamber for generating a plasma within said chamber; said induction coil being located at an end of said chamber spaced substantially from said work piece; and c) confining means (21) for providing a surface magnetic field for confining said plasma within said chamber; said confing means comprising multiple magnetic dipoles (21) with their fields directed inwardly towards the interior of said chamber with alternating north and south poles in a magnetic confinement cylindrical arrangement with their fields directed at right angles towards the vertical axis of said chamber, said surface magnetic field being substantially confined to the space adjacent to said external wall with said surface magnetic field extending from the exterior of said chamber to provide magnetic field cusps (20) proximate to the periphery of the interior of said external wall; characterized in that said work piece is located at one end of said chamber and that said induction coil is an involute, spiral induction coil located at the other end on the exterior of said chamber; whereby electrons are repelled to the interior of said chamber from motion towards the walls thereof to produce greater uniformity of the plasma near said work piece.
Claim 2
Dependent Claim
22 words
Apparatus according to claim 1 further including radio frequency energization means (30) for providing a R.F. generated bias to said work piece.
Claim 3
Dependent Claim
54 words
Apparatus according to claim 1 or 2 wherein said chamber (10) is lined with a liner material (16) substantially inert to a plasma or substantially noncontaminating to said work piece, and said induction means is located on the exterior of said liner material on said opposite end of said chamber from said work piece.
Claim 4
Dependent Claim
95 words
Apparatus according to claim 1 or 2 wherein means are provided for uniformly admitting a gas to said chamber comprising: a) manifold means (14) located about the periphery of said chamber at the opposite end of said chamber from said work piece; and b) orifice means (15) located between the surface of said chamber and said manifold means (14) for admitting said gas from said manifold into said chamber; whereby said gas is admitted to said chamber from said manifold with a substantially uniform pressure so that said plasma will be uniform within said chamber.
Claim 5
Dependent Claim
20 words
Apparatus according to claim 2 including means (32) for providing a surface magnetic field positioned adjacent to said induction means.
Claim 6
Dependent Claim
27 words
Apparatus according to claim 1 including reactance means (50) connected in series with said induction means, whereby one can produce and adjust a radio frequency generated bias.
Claim 7
Dependent Claim
41 words
Apparatus according to claim 1 where said involute spiral coil (22) includes a larger cross section between the end windings thereof; whereby more uniform plasma is produced adjacent to said larger cross section windings than a winding of uniform cross section.
References Cited (Backward Citations)
No citation records indexed.
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