EP0373360A2
Expired / Lapsed
EP
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Method and structure for providing improved insulation in VLSI and ULSI circuits
Assignee: International Business Machines Corp
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Filing: 1989-11-08
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Granted: —
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Expires: 2009-11-08
Abstract
Abstract An improved VLSI or ULSI structure and a method of forming the same are provided. The structure starts with a base member having a plurality of supports formed thereon and extending upwardly therefrom. A selectively removable material is deposited on the base member and around the supports. An insulating cap is formed over the supports and the removable material. Access openings are provided through the cover (or base) and the removable material is removed through the access openings. Thereafter a partial vacuum is formed in the space evacuated by the removable material, and the access openings sealed to provide a dielectric medium around the supports and between the base and cap member having a dielectric constant of less than 2.0.
Inventors
- 👤 Stanley Roberts
- 👤 Carter Welling Kaanta
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 05:19
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/495; H10W20/01; H10W20/031; H10W20/063; H10W20/0633; H10W20/069; H10W20/0693; H10W20/071; H10W20/072; H10W20/45; H10W20/46
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
149 words
A method of providing an electrically insulating medium between a pair of superposed members comprising the steps of; providing a base member, preferably silicon dioxide; forming a plurality of support means extending upwardly from said base member; depositing a selectively removable material, preferably poly-para-xylylene or is spun on glass on said base member around said support means; providing a cap member overlying said support means and said removable material; forming access opening means in at least one of said cap or said base members communicating with said removable material; removing said removable material through said access opening means without appreciably removing any of the base member or the cap member or the support means to thereby define a space between said base member and said cap member and around said support means; thereby providing a space between said members and around said support means of a low dielectric constant.
Claim 2
Independent Claim
149 words
A method of providing an electrically insulating medium between a pair of superposed members comprising the steps of; providing a base member, preferably silicon dioxide; forming a plurality of support means extending upwardly from said base member; depositing a selectively removable material, preferably poly-para-xylylene or is spun on glass on said base member around said support means; providing a cap member overlying said support means and said removable material; forming access opening means in at least one of said cap or said base members communicating with said removable material; removing said removable material through said access opening means without appreciably removing any of the base member or the cap member or the support means to thereby define a space between said base member and said cap member and around said support means; thereby providing a space between said members and around said support means of a low dielectric constant.
Claim 3
Dependent Claim
22 words
The method as defined in claim 1 wherein said support means includes a plurality of metal lines formed on an insulating substrate.
Claim 4
Dependent Claim
18 words
The method as defined in claim 2 wherein said cap member is an insulating material, preferably silicon dioxide.
Claim 5
Dependent Claim
22 words
The method as defined in claim 3 wherein said cap member is deposited directly onto said metal lines and said removable material.
Claim 6
Dependent Claim
51 words
The method as defined in claim 3 wherein said support means include a plurality of stanchions, preferably formed by deposition and selective etching of insulating materials, each stanchions including a metal portion and an insulator portion; and wherein said cap member is deposited onto said insulator portion and said removable material.
Claim 7
Independent Claim
30 words
The method as defined in any one of the preceding claims 3 to 5 further providing via openings through said insulating cap member, and filling said openings with a metal.
Claim 8
Independent Claim
29 words
The method as defined in any one of the preceding claims 3 to 6 wherein said access openings are sealed by depositing an insulating material in said access openings.
Claim 9
Dependent Claim
27 words
The method as defined in claim 7 wherein a vacuum is created in said space during the step of depositing the insulating material in said access openings.
Claim 10
Dependent Claim
76 words
A VLSI or ULSI structure comprising, a dielectric base member (10), a plurality of spaced metal conducting lines (12) formed on said base members and extending upwardly therefrom; a dielectric cap member (16) superposed on said base member and supported at least in part by said metal lines, said cap member, said base member and said metal lines defining a plurality of spaces therebetween, each of said spaces having a dielectric constant of less than 2.0.
Claim 11
Dependent Claim
76 words
A VLSI or ULSI structure comprising, a dielectric base member (10), a plurality of spaced metal conducting lines (12) formed on said base members and extending upwardly therefrom; a dielectric cap member (16) superposed on said base member and supported at least in part by said metal lines, said cap member, said base member and said metal lines defining a plurality of spaces therebetween, each of said spaces having a dielectric constant of less than 2.0.
Claim 12
Dependent Claim
18 words
The structure as defined in claim 9 wherein said cap member is supported directly on said metal lines.
Claim 13
Dependent Claim
32 words
The structure as defined in claim 9 or 10 wherein a plurality of insulating stanchions (40) are formed on said metal lines, and said cap member is supported on said insulating stanchions.
Claim 14
Dependent Claim
30 words
The structure as defined in any one of the preceding claims 9 to 11 further characterized by metal vias (44) extending through said cap member and contacting said metal lines.
Claim 15
Dependent Claim
35 words
The structure as defined in any one of the preceding claims 9 to 12 further characterized by access openings (20, 22, 46) in said cap member, said access openings being sealed with an insulating material.
References Cited (Backward Citations)
No citation records indexed.
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