EP0372902A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Apparatus for removing small particles from a substrate
Assignee: Messer LLC
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Filing: 1989-12-05
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Granted: —
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Expires: 2009-12-05
Abstract
Abstract Apparatus for removing small particles from a substrate includes superimposed plates 12 and 14. A connector 4 receives a hose 6 along which fluid CO₂ is able to flow from a source thereof (not shown). The connector 4 communicates with a first chamber defined by a groove 26 in the inner surface of the plate 14 and a complementary groove 28 (not shown in Figure 4) in the inner surface of the plate 12. Fine droplets of liquid CO₂ form in the first chamber. A thin fluid distribution member 34 is located between the plates 12 and 14. It defines a plurality of first channels 42 which place the first chamber in communication with a second chamber defined by a groove 30 in the second plate 14. The fine droplets of liquid CO₂ coalesce in the second chamber. The fluid then flows through a second channel 52 (see Figure 2) to an outlet port 32 defined between the forward edges of the plates 12 and 14. The channel 52 is formed such that the droplets of liquid CO₂ solidify during their passage therethrough. A stream of a mixture of gaseous and solid CO₂ leaves the port 32 and may be directed at a substrate to be cleaned.
Inventors
- 👤 Lawrence T. Layden
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-03 21:27
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; B; B05; B05B; B05B1/00; B05B1/02; B05B1/04; B05B1/044; B24; B24C; B24C1/00; B24C1/003; C; C01; C01B; C01B32/00; C01B32/50; C01B32/55
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
291 words
Apparatus for removing small particles from a substrate comprising: (a) a source of fluid carbon dioxide under pressure and having an enthalpy of below about 135 BTU per pound based on an enthalpy of zero at 150 psia for a saturated liquid, so that a solid fraction will form upon the expansion of the fluid carbon dioxide to the ambient pressure of the substrate; (b) a nozzle having a first opening for receiving the fluid carbon dioxide from the source and a second opening for emitting a mixture of solid and gaseous carbon dioxide toward the substrate, said nozzle further comprising, (1) a pair of plates adapted to be superimposed over each other collectively defining a first chamber communication with the first opening and a second chamber spaced apart from the first chamber; (2) a member interposed between the superimposed plates and including an aperture aligned with the first opening for providing a pathway for the flow of said fluid into the first chamber wherein in use the fluid is able to form a first mixture of gaseous carbon dioxide and fine droplets of liquid carbon dioxide, and at least two projections extending from the first chamber to the second chamber and together with the superimposed plates forming at least one first channel providing flow communication between the first and second chambers, wherein in use the first mixture is able to be converted in the second chamber to a second mixture containing gaseous carbon dioxide and larger liquid droplets of carbon dioxide; and (3) a second channel extending from the second chamber to the second opening enabling the second mixture to expand into said mixture of solid and gaseous carbon dioxide and exit out of the second opening toward the substrate.
Claim 2
Dependent Claim
291 words
Apparatus for removing small particles from a substrate comprising: (a) a source of fluid carbon dioxide under pressure and having an enthalpy of below about 135 BTU per pound based on an enthalpy of zero at 150 psia for a saturated liquid, so that a solid fraction will form upon the expansion of the fluid carbon dioxide to the ambient pressure of the substrate; (b) a nozzle having a first opening for receiving the fluid carbon dioxide from the source and a second opening for emitting a mixture of solid and gaseous carbon dioxide toward the substrate, said nozzle further comprising, (1) a pair of plates adapted to be superimposed over each other collectively defining a first chamber communication with the first opening and a second chamber spaced apart from the first chamber; (2) a member interposed between the superimposed plates and including an aperture aligned with the first opening for providing a pathway for the flow of said fluid into the first chamber wherein in use the fluid is able to form a first mixture of gaseous carbon dioxide and fine droplets of liquid carbon dioxide, and at least two projections extending from the first chamber to the second chamber and together with the superimposed plates forming at least one first channel providing flow communication between the first and second chambers, wherein in use the first mixture is able to be converted in the second chamber to a second mixture containing gaseous carbon dioxide and larger liquid droplets of carbon dioxide; and (3) a second channel extending from the second chamber to the second opening enabling the second mixture to expand into said mixture of solid and gaseous carbon dioxide and exit out of the second opening toward the substrate.
Claim 3
Dependent Claim
24 words
An apparatus according to Claim 1 wherein the second chamber comprises substantially parallel superimposed transverse grooves extending along a substantial width of the plates.
Claim 4
Dependent Claim
31 words
An apparatus according to Claim 2 wherein the first chamber comprises a transverse groove on one plate and a flat surface portion of the other plate superimposed over said transverse groove.
Claim 5
Dependent Claim
24 words
An apparatus according to Claim 2 wherein the first chamber comprises substantially parallel superimposed transverse grooves extending along a substantial width of the plates.
Claim 6
Independent Claim
27 words
An apparatus according to any one of the preceding claims wherein the length of the second chamber is about equal to the width of the second opening.
Claim 7
Independent Claim
31 words
An apparatus according to any one of the preceding claims, wherein the sum of the widths of the first channels is at least 10% of the width of the second opening.
Claim 8
Dependent Claim
29 words
An apparatus according to Claim 6 wherein the sum of the widths of the first channels is from about 10 to 20% of the width of the second opening.
Claim 9
Independent Claim
16 words
An apparatus according to any one of the preceding claims having a plurality of first channels.
Claim 10
Independent Claim
29 words
An apparatus according to any one of the preceding claims wherein the second opening comprises divergently tapered walls having an angle of divergence of up to 15 o .
Claim 11
Dependent Claim
19 words
An apparatus according to Claim 9, wherein the angle of divergence is about 4 o to 8 o .
Claim 12
Independent Claim
23 words
An apparatus according to any one of the preceding claims wherein the thickness of the said member is at least about 0.001 inch.
Claim 13
Dependent Claim
21 words
An apparatus according to Claim 11 wherein the thickness of the said member is from about 0.001 inch to 0.020 inch.
Claim 14
Independent Claim
27 words
An apparatus according to any one of the preceding claims, additionally including means for maintaining the pressure in the second chamber from about 80 to 160 psia.
Claim 15
Independent Claim
21 words
An apparatus according to any one of the preceding claims, wherein comprising means for maintaining said plates in said superimposed position.
Claim 16
Dependent Claim
143 words
A nozzle for forming a stream of a mixture of solid and fluid carbon dioxide, comprising a pair of co-operating plates, a fluid distribution member disposed between the plates, an inlet port for fluid carbon dioxide, an outlet port for the said stream, a first chamber defined between the inner surfaces of the plates and in flow communication with the inlet port, a second chamber spaced from the first chamber and defined between the inner surfaces of the plates at least one first channel in the fluid distribution member placing the second chamber in flow communication with the first chamber, and a second channel placing the outlet port in flow communication with the first chamber, whereby in use droplets of liquid carbon dioxide are able to form in the first chamber, to coalesce in the second chamber and solidify in the second channel.
Claim 17
Dependent Claim
143 words
A nozzle for forming a stream of a mixture of solid and fluid carbon dioxide, comprising a pair of co-operating plates, a fluid distribution member disposed between the plates, an inlet port for fluid carbon dioxide, an outlet port for the said stream, a first chamber defined between the inner surfaces of the plates and in flow communication with the inlet port, a second chamber spaced from the first chamber and defined between the inner surfaces of the plates at least one first channel in the fluid distribution member placing the second chamber in flow communication with the first chamber, and a second channel placing the outlet port in flow communication with the first chamber, whereby in use droplets of liquid carbon dioxide are able to form in the first chamber, to coalesce in the second chamber and solidify in the second channel.
References Cited (Backward Citations)
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