EP0372408A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Radiation-sensitive composition
Assignee: BASF SE
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Filing: 1989-12-01
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Granted: —
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Expires: 2009-12-01
Abstract
Abstract The invention relates to a radiation-sensitive mixture essentially comprising (a) a binder or binder mixture which is insoluble in water, but soluble in aqueous-alkaline solutions, (b) a compound which forms a strong acid on irradiation, and (c) one or more organic compounds which inhibit the solubility of (a) in aqueous-alkaline solutions, the organic compound (c) being a monoketal of a beta -dicarbonyl compound. This radiation-sensitive mixture is suitable for the production of photoresists.
Inventors
- 👤 Son Dr. Nguyen Kim
- 👤 Gerhard Dr. Hoffmann
- 👤 Reinhold Dr. Schwalm
- 👤 Horst Binder
- 👤 Rudolf Dr. Schuhmacher
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-01 00:25
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/0045
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