EP0369554A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Apparatus for automatically scrubbing a surface
Assignee: HP Inc
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Filing: 1988-03-11
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Granted: —
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Expires: 2008-03-11
Abstract
Abstract The apparatus disclosed removes oxide from the contact pads of the wafer under test. The apparatus has a test probe membrane (1-13) attached to a traveling device (1-3). The traveling device (1-3) attaches to a base (1-5) through one or more constant length pivoting devices (1-7) and one or more variable length springs (1-9). When a wafer pushes against the test probe membrane (1-13), the traveling device (1-3) moves upwards. The constant length pivotal device (1-7) and the variable length springs (1-9) control the sideways motion of the traveling device (1-3). When the traveling device (1-3) lifts from its resting position, it moves sideways and thereby allows the test probe membrane (1-13) to scrub the contact pads of the wafer under test.
Inventors
- 👤 Richard E. Huff
- 👤 Miklos K. Perlaki
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-10 01:02
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R1/07342; G01R1/0735; G01R31/00; G01R31/28; G01R31/2851; G01R31/2886; G01R3/00
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
140 words
A membrane probe for use with a device under test (DUT), the apparatus comprising: a first means, comprising a fixed length flexure pivot assembly (1-7); a second means, comprising a plurality of variable length flexure pivot assemblies (1-9); a flexible membrane (1-13), formed to be stretched; a translation stages (1-3) formed with an upper surface that is coupled to the second means and formed with a lower surface including a penetrating, insulating lower ring portion (1-23) defining an aperture through said stage, the aperture being formed for mounting the membrane when stretched, the membrane thus mounted being intended to contact and scrub a contact pad on the device under test, causing removal of an oxide from the pad; and a carrier (1-11), coupled to the translation stage by the first means and by at least one of the second means.
Claim 2
Dependent Claim
140 words
A membrane probe for use with a device under test (DUT), the apparatus comprising: a first means, comprising a fixed length flexure pivot assembly (1-7); a second means, comprising a plurality of variable length flexure pivot assemblies (1-9); a flexible membrane (1-13), formed to be stretched; a translation stages (1-3) formed with an upper surface that is coupled to the second means and formed with a lower surface including a penetrating, insulating lower ring portion (1-23) defining an aperture through said stage, the aperture being formed for mounting the membrane when stretched, the membrane thus mounted being intended to contact and scrub a contact pad on the device under test, causing removal of an oxide from the pad; and a carrier (1-11), coupled to the translation stage by the first means and by at least one of the second means.
Claim 3
Dependent Claim
16 words
A membrane probe according to claim 1, wherein the translation stage (1-3) has a hexagonal geometry.
Claim 4
Dependent Claim
46 words
A membrane probe according to claims 1 or 2 wherein the fixed length flexure pivot assembly (1-7) further comprises: a leaf spring; a first pair of compression blocks mounted on the carrier (1-11); and a second pair of compression blocks mounted on the translation stage (1-3).
Claim 5
Dependent Claim
57 words
A membrane probe according to any preceding claim wherein the variable length pivot assembly (1-9) further comprises: a leaf spring (1-31); a first pair of compression blocks (4-41) mounted on the carrier (1-11); a second pair of compression blocks (4-35, 4-39) mounted on the translation stage (1-3); and an expansion spring (1-25) formed on the translation stage.
Claim 6
Dependent Claim
56 words
A membrane probe according to claim 4, wherein the expansion spring (1-25) further comprises: a pair of "H" shaped lateral slots (1-27); and a narrow transverse slot (1-25); each of the lateral slots and the transverse slot being positioned to substantially surround the second pair of compression blocks (4-35, 4-39) mounted on the translation stage (1-3).
Claim 7
Dependent Claim
106 words
A membrane probe according to any preceding claim wherein the membrane (1-13) further comprises: a plurality of signal conducting signal traces having signal trace terminals, the signal traces being formed on an upper side of the membrane to be facing toward the translation stage (1-3); a plurality of contact bumps (1-21) formed on a lower side of the membrane to be facing away from the translation stage, positioned toward a central portion of the membrane within the insulating lower ring (1-23) of the translation stage, and electrically coupled through the membrane to the signal traces and the terminals residing on the upper side of the membrane.
Claim 8
Dependent Claim
47 words
A membrane probe according to claim 6, wherein the carrier (1-11) further comprises: a protective layer (1-17) placed over the membrane, formed to have a plurality of slots penetrating the protective layer to allow access to the signal trace terminals on the upper side of the membrane.
Claim 9
Dependent Claim
147 words
A membrane probe for use with a device under test (DUT), the apparatus comprising: a plurality of flexing means, including at least one spring having a fixed length (1-7) and at least one spring having a variable length (1-9); a plurality of electrical conducting means (1-21), for communicating electrical signals between a device under test and a flexible planar membrane (1-13), said membrane being formed for being stretched and configured for carrying the electrical conducting means; translation means (1-3) formed with an upper surface disposed for being coupled to at least one of the flexing means and formed with a lower surface formed to define an aperture therethrough, the aperture being formed for securing thereover the flexible planar membrane when stretched and being disposed for being coupled to the flexible planar membrane; and peripheral support means (1-11), formed for suspending the translation means and the flexing means.
Claim 10
Dependent Claim
147 words
A membrane probe for use with a device under test (DUT), the apparatus comprising: a plurality of flexing means, including at least one spring having a fixed length (1-7) and at least one spring having a variable length (1-9); a plurality of electrical conducting means (1-21), for communicating electrical signals between a device under test and a flexible planar membrane (1-13), said membrane being formed for being stretched and configured for carrying the electrical conducting means; translation means (1-3) formed with an upper surface disposed for being coupled to at least one of the flexing means and formed with a lower surface formed to define an aperture therethrough, the aperture being formed for securing thereover the flexible planar membrane when stretched and being disposed for being coupled to the flexible planar membrane; and peripheral support means (1-11), formed for suspending the translation means and the flexing means.
References Cited (Backward Citations)
No citation records indexed.
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