EP0364151A2
Expired / Lapsed
EP
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Automated diagnostic system
Assignee: Texas Instruments Inc
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Filing: 1989-10-04
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Granted: —
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Expires: 2009-10-04
Abstract
Abstract Artificial intelligence diagnostic expert system software is used to interrogate and monitor etcher machine state by directly accessing vital hardware/process sensors. Sensor values and 'recipe' variables are analyzed to determine cause of failures and recommend repair strategies, realtime monitoring and analysis of these values allows the expert system to predict failures prior to occurance and show cause of impending failure.
Inventors
- 👤 Roe E. English
- 👤 Jerry A. Crone
- 👤 Michael A. Kilgore
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-01 14:58
CPC Classifications
G; G05; G05B; G05B23/00; G05B23/02; G05B23/0205; G05B23/0218; G05B23/0243; G05B23/0245; G05B23/0248; G05B13/00; G05B13/02; G05B13/0265; G06; G06F; G06F11/00; G06F11/22; G06F11/2257; G05B2219/00; G05B2219/30; G05B2219/33; G05B2219/33303; Y; Y10; Y10S; Y10S706/00; Y10S706/902; Y10S706/911; Y10S706/912
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
154 words
An automated diagnostic system, comprising: a machine for performing processing on a workpiece; an interface coupled to said machine for sensing the state of a plurality of process variables, and for controlling a plurality of process variables; a master controller coupled to said interface for setting values for the pluralityy of process variables to be controlled, and for reading the state of the plurality of process variables to be sensed, wherein said master controller signals an error and suspends operation of said machine when a sensed process variable moves out of a preselected range; a diagnostics controller coupled to said master controller for, when operation of said machine has been suspended by said master controller, sensing the state of process variables to be sensed, querying an operator regarding other states of said machine, and applying the sensed states and results of operator inquiries to an expert system to determine tha cause of the error.
Claim 2
Dependent Claim
154 words
An automated diagnostic system, comprising: a machine for performing processing on a workpiece; an interface coupled to said machine for sensing the state of a plurality of process variables, and for controlling a plurality of process variables; a master controller coupled to said interface for setting values for the pluralityy of process variables to be controlled, and for reading the state of the plurality of process variables to be sensed, wherein said master controller signals an error and suspends operation of said machine when a sensed process variable moves out of a preselected range; a diagnostics controller coupled to said master controller for, when operation of said machine has been suspended by said master controller, sensing the state of process variables to be sensed, querying an operator regarding other states of said machine, and applying the sensed states and results of operator inquiries to an expert system to determine tha cause of the error.
Claim 3
Dependent Claim
23 words
The automated diagnostic system of Claim 1, wherein the expert system utilized by said diagnostics controller performs a search of a decision tree.
Claim 4
Dependent Claim
26 words
The automated diagnostic system of Claim 1, wherein the expert system utilized by said diagnostics controller contains a set of rules and a set of facts.
Claim 5
Independent Claim
79 words
A method for diagnosing the cause of an error condition in a machine, comprising the steps of: (a) halting operation of the machine; (b) querying an operator to determine a current status for machine and process variables; (c) sensing states of process variables within the machine without operator intervention; (d) applying the results of steps (b) and (c) to an expert system; and (e) repeating steps (b), (c), and (d) until the cause of the error condition is diagnosed.
Claim 6
Independent Claim
79 words
A method for diagnosing the cause of an error condition in a machine, comprising the steps of: (a) halting operation of the machine; (b) querying an operator to determine a current status for machine and process variables; (c) sensing states of process variables within the machine without operator intervention; (d) applying the results of steps (b) and (c) to an expert system; and (e) repeating steps (b), (c), and (d) until the cause of the error condition is diagnosed.
Claim 7
Dependent Claim
20 words
The method of Claim 4, wherein the expert system utilized in step (d) performs a search of a decision tree.
Claim 8
Dependent Claim
23 words
The method of Claim 4, wherein the expert system utilized in step (d) contains a set of rules and a set of facts.
Claim 9
Independent Claim
140 words
A system for diagnosing the cause of an error condition in a machine, comprising: a diagnostics controller coupled to the machine, wherein said diagnostics controller can determine the state of process variables within the machine; an interactive input/output device, coupled to said diagnostics controller, for communication with an operator, wherein enquiries are displayed to the operator and answers are received from the operator; and a knowledge base coupled to said diagnostics controller, said knowledge base containing information regarding causes and effects of error conditions within the machine; wherein said diagnostics controller, when an error condition occurs within the machine, queries the operator through the input/output device, senses the state of process variables within the machine independently of the operator, and and applies the information so received and sensed to the knowledge base to determine the cause of an error condition.
Claim 10
Independent Claim
140 words
A system for diagnosing the cause of an error condition in a machine, comprising: a diagnostics controller coupled to the machine, wherein said diagnostics controller can determine the state of process variables within the machine; an interactive input/output device, coupled to said diagnostics controller, for communication with an operator, wherein enquiries are displayed to the operator and answers are received from the operator; and a knowledge base coupled to said diagnostics controller, said knowledge base containing information regarding causes and effects of error conditions within the machine; wherein said diagnostics controller, when an error condition occurs within the machine, queries the operator through the input/output device, senses the state of process variables within the machine independently of the operator, and and applies the information so received and sensed to the knowledge base to determine the cause of an error condition.
Claim 11
Dependent Claim
16 words
The system of Claim 7, wherein said knowledge base comprises a set of rules and facts.
Claim 12
Dependent Claim
19 words
The system of Claim 7, wherein said knowledge base comprises a decision tree of error condition causes and effects.
Claim 13
Dependent Claim
20 words
The system of Claim 7, wherein said diagnostics controller comprises an expert software system operating on a general purpose computer.
Claim 14
Dependent Claim
27 words
The system of Claim 10, wherein said expert software system operates on a general purpose computer also used to control operation of the machine during normal operation.
Claim 15
Dependent Claim
33 words
The system of Claim 7, further comprising a long term storage device coupled to said diagnostics controller for storing sequences of steps taken by said diagnostics controller during diagnosis of an error condition.
References Cited (Backward Citations)
No citation records indexed.
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