EP0361932A2
Expired / Lapsed
EP
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Scanning tunnel-current-detecting device and method
Assignee: Canon Inc
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Filing: 1989-09-28
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Granted: —
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Expires: 2009-09-28
Abstract
Abstract A scanning tunnel-current-detecting device comprising at least two probe electrodes supported by a supporting member (116), a means for placing a sample (108) in proximity to the probe electrodes (109,111), a means for applying voltage between the probe electrodes (109,111) and the sample (108), at least one of the probe electrodes being provided with a mechanism for measuring and compensating variation of the distance between the supporting member (116) and the sample (108), is provided.
Inventors
- 👤 Yoshihiro Yanagisawa
- 👤 Kunihiro Sakai
- 👤 Hisaaki Kawade
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-08 16:52
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/10; G01Q60/16; G01Q30/00; G01Q30/04; G01Q30/06; G01Q70/00; G01Q70/02; G01Q70/04; G01Q70/06; G11; G11B; G11B9/00; G11B9/12; G11B9/14; G11B9/1418; G11B9/1427; G11B9/1436; G11B9/1445; G01Q80/00; Y; Y10; Y10S; Y10S977/00; Y10S977/70; Y10S977/832; Y10S977/837; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/861; Y10S977/873; Y10S977/874
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
67 words
A scanning tunnel current-detecting device comprising at least two probe electrodes supported by a supporting member, a means for placing a sample in proximity to the probe electrodes, a means for applying voltage between the probe electrodes and the sample, at least one of the probe electrodes being provided with a mechanism for measuring and compensating variation of the distance between the supporting member and the sample.
Claim 2
Dependent Claim
67 words
A scanning tunnel current-detecting device comprising at least two probe electrodes supported by a supporting member, a means for placing a sample in proximity to the probe electrodes, a means for applying voltage between the probe electrodes and the sample, at least one of the probe electrodes being provided with a mechanism for measuring and compensating variation of the distance between the supporting member and the sample.
Claim 3
Dependent Claim
41 words
The scanning tunnel-current-detecting device of Claim 1 wherein variation of the distance between the supporting member for the probe electrodes and the sample is detected by the change of tunnel current flowing between at least one probe electrode and the sample.
Claim 4
Dependent Claim
66 words
A scanning tunnelling microscope comprising at least two probe electrodes supported by a supporting member, a means for placing a sample in proximity to the probe electrodes, a means for applying voltage between the probe electrodes and the sample, at least one of the probe electrodes being provided with a mechanism for measuring and compensating variation of the distance between the supporting member and the sample.
Claim 5
Dependent Claim
66 words
A scanning tunnelling microscope comprising at least two probe electrodes supported by a supporting member, a means for placing a sample in proximity to the probe electrodes, a means for applying voltage between the probe electrodes and the sample, at least one of the probe electrodes being provided with a mechanism for measuring and compensating variation of the distance between the supporting member and the sample.
Claim 6
Dependent Claim
41 words
The scanning tunnelling microscope of Claim 3 wherein variation of the distance between the supporting member for the probe electrodes and the sample is detected by the change of tunnel current flowing between at least one probe electrode and the sample.
Claim 7
Independent Claim
77 words
A method for detecting a tunnel current comprising employing at least two probe electrodes supported by a supporting member, and steps of bringing a sample in confrontation with and in proximity to the probe electrodes such that tunnel current flows, measuring the tunnel current based on the information on the sample surface by the other probe electrode, and measuring and compensating variation of the distance between the supporting member and the sample by the other probe electrode.
Claim 8
Independent Claim
77 words
A method for detecting a tunnel current comprising employing at least two probe electrodes supported by a supporting member, and steps of bringing a sample in confrontation with and in proximity to the probe electrodes such that tunnel current flows, measuring the tunnel current based on the information on the sample surface by the other probe electrode, and measuring and compensating variation of the distance between the supporting member and the sample by the other probe electrode.
Claim 9
Dependent Claim
39 words
The method of Claim 5, wherein variation of the distance between a supporting member for the probe electrodes and the sample is detected by the change of tunnel current flowing between at least one probe electrode and the sample.
Claim 10
Dependent Claim
68 words
A recording/reproducing device comprising at least two probe electrodes supported by a supporting member, a means for placing a recording medium in proximity to the probe electrodes, a means for applying voltage between the probe electrodes and the recording medium, at least one of the probe electrodes being provided with a mechanism for measuring and compensating variation of the distance between the supporting member and the recording medium.
Claim 11
Dependent Claim
68 words
A recording/reproducing device comprising at least two probe electrodes supported by a supporting member, a means for placing a recording medium in proximity to the probe electrodes, a means for applying voltage between the probe electrodes and the recording medium, at least one of the probe electrodes being provided with a mechanism for measuring and compensating variation of the distance between the supporting member and the recording medium.
Claim 12
Dependent Claim
42 words
The recording/reproducing device of Claim 7, wherein variation of the distance between the supporting member for the probe electrodes and the recording medium is detected by the change of tunnel current flowing between at least one probe electrode and the recording medium.
Claim 13
Dependent Claim
86 words
A scanning tunnel-current-detecting device of the kind which has a probe which must be kept a predetermined distance from a sample being detected for an accurate reading to be obtained is characterised in that there is an arrangement for actively moving the probe and sample relatively to one another, in response to external forces tending to change the relative position of the probe and sample, in order to compensate for such change and thus maintain the position of the probe relative to the sample substantially constant.
Claim 14
Dependent Claim
86 words
A scanning tunnel-current-detecting device of the kind which has a probe which must be kept a predetermined distance from a sample being detected for an accurate reading to be obtained is characterised in that there is an arrangement for actively moving the probe and sample relatively to one another, in response to external forces tending to change the relative position of the probe and sample, in order to compensate for such change and thus maintain the position of the probe relative to the sample substantially constant.
References Cited (Backward Citations)
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