EP0353996A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
A flow sensor
Assignee: Sharp Corp
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Filing: 1989-08-01
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Granted: —
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Expires: 2009-08-01
Abstract
Abstract A flow sensor comprising a heating unit (12) and a fluid temperature detecting unit (15), the heating unit (12) including a heating element (10) and the fluid temperature detecting unit (15) including a fluid temperature detecting element (13). At least ozie of these elements (10,13) is formed on a substrate made of zirconia.
Inventors
- 👤 Junichi Tanaka
- 👤 Akihito Jinda
- 👤 Nobuyuki Tanaka
- 👤 Yasuhiko Inami
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-08 18:53
CPC Classifications
G; G01; G01F; G01F1/00; G01F1/68; G01F1/684; G01F1/688; G01F1/69; G01F1/692; G01F1/696; G01F1/698; G01F1/699
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
56 words
A flow sensor comprising a heating unit (12) and a fluid temperature detecting unit (15), said heating unit (12) including a heating element (10), and said fluid temperature detecting unit (15) including a fluid temperature detecting element (13), characterised in that at least one of said elements is formed on a substrate (11,14) made of zirconia.
Claim 2
Dependent Claim
56 words
A flow sensor comprising a heating unit (12) and a fluid temperature detecting unit (15), said heating unit (12) including a heating element (10), and said fluid temperature detecting unit (15) including a fluid temperature detecting element (13), characterised in that at least one of said elements is formed on a substrate (11,14) made of zirconia.
Claim 3
Dependent Claim
29 words
A flow sensor according to claim 1, wherein said heating unit (12) further includes a heating temperature detecting element (22) for detecting the temperature of said heating element (10).
Claim 4
Dependent Claim
36 words
A flow sensor according to claim 1, wherein said heating element (10) and said fluid temperature detecting element (13) are respectively formed on two separate substrates, at least one of said substrates being made of zirconia.
Claim 5
Dependent Claim
17 words
A flow sensor according to claim 1, wherein said zirconia is pure zirconia or a zirconia ceramic.
Claim 6
Dependent Claim
32 words
A flow sensor according to claim 4, wherein said zirconia ceramic is stabilised zirconia that is produced by the addition of a stabilizer of Y₂O₃, CaO, or MgO, to said pure zirconia.
Claim 7
Dependent Claim
31 words
A flow sensor according to claim 4, wherein said zirconia ceramic is partially-stabilized zirconia that is produced by the addition of a smaller amount of said stabilizer to said pure zirconia.
References Cited (Backward Citations)
No citation records indexed.
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