Patent US5892564A successfully refreshed from Google Patents.
EP0351092A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Method for the formation of monomolecular adsorption films or built-up films of monomolecular layers using silane compounds having an acetylene or diacetylene bond
Assignee: Panasonic Holdings Corp
•
Filing: 1989-06-27
•
Granted: —
•
Expires: 2009-06-27
Abstract
Abstract This invention relates to a method for the formation of monomolecular adsorption films of a silane compound having a diacetylene bond. The silane compound is chemically adsorbed on a substrate through =SiO- bonds and the resultant film is significantly reduced in number of defects such as pinholes. When the monomolecular film is irradiated with actinic light, the diacetylene bonds are converted into a conjugated diacetylene polymer. Similarly, a built-up film of a desired number of monomolecular layers of a silane compound having an acetylene bond formed on a substrate by chemical adsorption and a corresponding number of monomolecular layers of an aliphatic acid or alcohol having an acetylene bond and alternately deposited on the first-mentioned layer is also provided. These films have wide utility in electronic fields.
Inventors
- 👤 Hideharu Tamura
- 👤 Kazufumi Ogawa
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-04 19:26
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; B; B05; B05D; B05D1/00; B05D1/18; B05D1/185; B82; B82Y; B82Y10/00; B82Y30/00; B82Y40/00; G; G02; G02F; G02F1/00; G02F1/35; G02F1/355; G02F1/361; G02F1/3615; G02F1/3617; H01; H01B; H01B1/00; H01B1/06; H01B1/12; H01B1/124; H01B1/125; H10D; H10D64/00; H10D64/01; H10D64/011; H10D64/0111; H10P14/63; H10P14/6326; H10P14/6342; H10P14/65; H10P14/6516; H10P14/6536
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
130 words
A method for the formation of a monomolecular adsorption film which comprises: providing a substrate having, on the surface, a layer capable of reaction with a silane compound having a diacetylene bond in the molecule; and subjecting the silane compound to chemical adsorption with the layer to form a monomolecular adsorption film of the silane compound on the substrate through the layer wherein the chemical adsorption is carried out either at a temperature not higher than 20°C whereby the molecules in the adsorption film are oriented in a vertical direction with respect to the substrate or at a temperature between the glass transition temperature and the melting point of the silane compound whereby the molecules in the adsorption film are oriented in an oblique direction with respect to the substrate.
Claim 2
Independent Claim
130 words
A method for the formation of a monomolecular adsorption film which comprises: providing a substrate having, on the surface, a layer capable of reaction with a silane compound having a diacetylene bond in the molecule; and subjecting the silane compound to chemical adsorption with the layer to form a monomolecular adsorption film of the silane compound on the substrate through the layer wherein the chemical adsorption is carried out either at a temperature not higher than 20°C whereby the molecules in the adsorption film are oriented in a vertical direction with respect to the substrate or at a temperature between the glass transition temperature and the melting point of the silane compound whereby the molecules in the adsorption film are oriented in an oblique direction with respect to the substrate.
Claim 3
Dependent Claim
20 words
A method according to Claim 1, wherein said substrate is made of silicon and said layer is an SiO₂ layer.
Claim 4
Dependent Claim
87 words
A method according to Claim 1, wherein the chemical adsorption is carried out at a temperature not higher than 20°C, and the adsorption film is heated in a desired pattern to a temperature sufficient to cause the molecules of the silane compound in the heated portions to be oriented obliquely and irradiating the heated film with an energy beam capable of conversion of the diacetylene bonds into a conjugated diacetylene polymer, so that a conjugated diacetylene polymer is selectively formed in the film according to the pattern.
Claim 5
Dependent Claim
58 words
A method according to Claim 1, wherein the chemical adsorption is effected at a temperature between the glass transition temperature and the melting point, and the adsorption film is irradiated with an energy beam capable of conversion of the diacetylene bonds into a conjugated diacetylene polymer, so that a conjugated diacetylene polymer is formed entirely in the film.
Claim 6
Dependent Claim
32 words
A method according to Claim 1, wherein said silane compound is of the formula, CH₃(CH₂) m C≡C-C≡(CH₂) n -SiCl₃ wherein m and n are, respectively, an integer of from 0 to 25.
Claim 7
Dependent Claim
39 words
A method according to Claim 1, wherein the chemical adsorption is effected by immersing the substrate in a solution of said silane compound in a solvent at a concentration of from 2 x 10⁻³ to 5 x 10⁻² mols/liter.
Claim 8
Independent Claim
135 words
A method for forming a built-up film of monomolecular layers which comprises: providing a substrate having, on the surface, a layer capable of reaction with a silane compound having an acetylene bond in the molecule; subjecting a silane compound having an acetylene bond in the molecule to chemical adsorption with the layer to form a monomolecular adsorption film of the silane compound on the substrate through the layer; and subjecting an aliphatic acid having an acetylene bond in the molecule to oxidation coupling with the adsorption film thereby forming a monomolecular layer of the acid through diacetylene bonds with the silane compound or subjecting an alcohol having an acetylene bond in the molecule to diindiol oxidation with the adsorption film thereby forming a monomolecular layer of the alcohol through diacetylene bonds with the silane compound.
Claim 9
Independent Claim
135 words
A method for forming a built-up film of monomolecular layers which comprises: providing a substrate having, on the surface, a layer capable of reaction with a silane compound having an acetylene bond in the molecule; subjecting a silane compound having an acetylene bond in the molecule to chemical adsorption with the layer to form a monomolecular adsorption film of the silane compound on the substrate through the layer; and subjecting an aliphatic acid having an acetylene bond in the molecule to oxidation coupling with the adsorption film thereby forming a monomolecular layer of the acid through diacetylene bonds with the silane compound or subjecting an alcohol having an acetylene bond in the molecule to diindiol oxidation with the adsorption film thereby forming a monomolecular layer of the alcohol through diacetylene bonds with the silane compound.
Claim 10
Dependent Claim
18 words
A method according to Claim 7, wherein said substrate is silicon and said layer is an SiO₂ layer.
Claim 11
Dependent Claim
27 words
A method according to Claim 7, wherein said silane compound is of the formula, HC≡C-(CH₂) o -SiCl₃ wherein o is an integer of from 1 to 25.
Claim 12
Dependent Claim
47 words
A method according to Claim 7, wherein said aliphatic acid is of the formula, HC≡C-(CH₂) p -COOH, wherein p is an integer of from 1 to 25 or said alcohol is of the formula, HC≡C-(CH₂) q -OH, wherein q is an integer of from 1 to 25.
Claim 13
Dependent Claim
17 words
A method according to Claim 10, wherein p or q is an integer of 8 or over.
Claim 14
Dependent Claim
33 words
A method according to Claim 7, wherein said aliphatic acid is deposited by an oxidation coupling method wherein said substrate is immersed in a solution of said acid in the coexistence of oxygen.
Claim 15
Dependent Claim
28 words
A method according to Claim 7, further comprising irradiating the diacetylene bonds with an energy beam capable of conversion of the diacetylene bonds into a conjugated diacetylene polymer.
Claim 16
Dependent Claim
49 words
A method according to Claim 7, further comprising subjecting a silane compound having an acetylene bond to chemical adsorption with the carboxyl groups or the hydroxyl groups of the deposited film to form a monomolecular adsorption film of said silane compound on the top of the aliphatic acid film.
Claim 17
Dependent Claim
31 words
A method according to Claim 14, further comprising irradiating the diacetylene bonds in the films with an energy beam capable of conversion of the diacetylene bonds into a conjugated diacetylene polymer.
Claim 18
Dependent Claim
68 words
A method according to Claim 7, wherein the chemical adsorption and the oxidation coupling or diindiol procedures are repeated to form a desired number of the respective films alternately deposited one on top of another and the resultant diacetylene bonds are polymerized either whenever the diacetylene bonds are formed in the built-up film or at one time after the formation of a desired number of the respective films.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
Maintenance schedule is calculated for granted US utility patents.