EP0346055A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Method for causing plasma reaction under atmospheric pressure
Assignee: Japan Science and Technology Agency
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Filing: 1989-06-06
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Granted: —
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Expires: 2009-06-06
Abstract
Abstract The invention provides a method of treating the surface of a substrate with reactive plasma which comprises exciting a reagent gas in a reaction vessel having a pair of opposing electrodes to produce glow discharge plasma at atmospheric pressure and causing or permitting the plasma to contact the surface of said substrate. The atmospheric pressure plasma reaction method of the invention can be used for forming a thin film on the surface of a substrate and/or reforming the surface under atmospheric pressure. The invention also provides an apparatus comprising a reaction vessel (1) containing an upper (2) and a lower electrode (3); the upper electrode may comprise a plurality of vertical fine wires and a solid dielectric (4) may be provided on either or both of the electrodes. A perforated pipe (8) may be provided to assist in uniform distribution of gas near a substrate (5) to be plasma treated. By using the apparatus having above-mentioned construction, highly stable and uniformly dispersed glow discharge plasma can be obtained at atmospheric pressure without the occurrence of arc discharge, even if the substrate consists of a conductive material, such as a metal or alloy.
Inventors
- 👤 Sachiko Okazaki
- 👤 Masuhiro Kogoma
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 07:09
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45563; C23C16/4558; C23C16/22; C23C16/30; C23C16/34; C23C16/345; C23C16/50; C23C16/505; C23C16/509; C23C16/5096; H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32018
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
49 words
A method of treating the surface of a substrate with reactive plasma which comprises exciting a reagent gas in a reaction vessel having a pair of opposing electrodes to produce glow discharge plasma at atmospheric pressure and causing or permitting the plasma to contact the surface of said substrate.
Claim 2
Independent Claim
49 words
A method of treating the surface of a substrate with reactive plasma which comprises exciting a reagent gas in a reaction vessel having a pair of opposing electrodes to produce glow discharge plasma at atmospheric pressure and causing or permitting the plasma to contact the surface of said substrate.
Claim 3
Independent Claim
19 words
A method as claimed in claim (1), wherein: a thin film is formed on the surface of said substrate.
Claim 4
Independent Claim
16 words
A method as claimed in claim (1), wherein: the surface of said substrate is chemically changed.
Claim 5
Independent Claim
62 words
A method as claimed in claim (1), for forming a thin film on a substrate which comprises introducing a monomer gas in admixture with an inert gas into a reaction vessel having an upper electrode comprising a plurality of vertical fine wires to convert the gas into plasma at atmospheric pressure, thereby forming a thin film on the surface of the substrate.
Claim 6
Independent Claim
29 words
A method as claimed in claim (4), wherein a solid dielectric is provided on the upper surface of a lower electrode on which said substrate is to be set.
Claim 7
Independent Claim
69 words
A method as claimed in claim (1), which comprises introducing a mixture of a rare gas and a reagent gas into a reaction vessel having a pair of dielectric-covered electrodes formed by providing a solid dielectric on the surface of each of an upper electrode and a lower electrode, and exciting the gas to form plasma at atmospheric pressure, thereby treating the surface of a substrate on said vessel.
Claim 8
Independent Claim
54 words
A method as claimed in claim (1), which comprises introducing a reagent gas into a reaction vessel having a single dielectric-covered electrode comprising an upper electrode, the surface of which is covered with a solid dielectric, and plasma-exciting said reagent gas at atmospheric pressure, thereby treating the surface of a substrate in said vessel.
Claim 9
Dependent Claim
15 words
A polyalkylene or polyfluoroalkylene polymerized film formed through glow discharge plasma reaction at atmospheric pressure.
Claim 10
Dependent Claim
15 words
A polyalkylene or polyfluoroalkylene polymerized film formed through glow discharge plasma reaction at atmospheric pressure.
Claim 11
Dependent Claim
17 words
A carbon-fluorine reformed film formed by surface reforming by a glow discharge plasma reaction at atmospheric pressure.
Claim 12
Dependent Claim
17 words
A carbon-fluorine reformed film formed by surface reforming by a glow discharge plasma reaction at atmospheric pressure.
Claim 13
Dependent Claim
14 words
A SiN x film formed by a glow discharge plasma reaction at atmospheric pressure.
Claim 14
Dependent Claim
14 words
A SiN x film formed by a glow discharge plasma reaction at atmospheric pressure.
Claim 15
Dependent Claim
14 words
An amorphous carbon film formed by a glow discharge plasma reaction at atmospheric pressure.
Claim 16
Dependent Claim
14 words
An amorphous carbon film formed by a glow discharge plasma reaction at atmospheric pressure.
Claim 17
Dependent Claim
14 words
An amorphous silicon film formed by a glow discharge plasma reaction at atmospheric pressure.
Claim 18
Dependent Claim
14 words
An amorphous silicon film formed by a glow discharge plasma reaction at atmospheric pressure.
Claim 19
Independent Claim
38 words
An apparatus for treating the surface of a substrate with a reactive plasma at atmospheric pressure which comprises a reaction vessel provided with an upper and a lower electrode, the upper electrode being formed from fine vertical wires.
Claim 20
Independent Claim
38 words
An apparatus for treating the surface of a substrate with a reactive plasma at atmospheric pressure which comprises a reaction vessel provided with an upper and a lower electrode, the upper electrode being formed from fine vertical wires.
Claim 21
Independent Claim
49 words
An apparatus for treating the surface of a substrate with a reactive plasma at atmospheric pressure which comprises a reaction vessel provided with an upper and a lower electrode and a perforated pipe for uniformly dispersing a gas near the surface of a substrate placed in the reaction vessel.
Claim 22
Independent Claim
49 words
An apparatus for treating the surface of a substrate with a reactive plasma at atmospheric pressure which comprises a reaction vessel provided with an upper and a lower electrode and a perforated pipe for uniformly dispersing a gas near the surface of a substrate placed in the reaction vessel.
Claim 23
Dependent Claim
24 words
An apparatus as claimed in claim 13 or claim 14, wherein a solid dielectric is arranged on the upper surface of the lower electrode.
Claim 24
Dependent Claim
20 words
An apparatus as claimed in claim 13 or claim 14, wherein the upper and lower electrodes are covered with dielectric.
References Cited (Backward Citations)
No citation records indexed.
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