Patent US1383005A successfully refreshed from Google Patents.
EP0342444A2
Expired / Lapsed
EP
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Cyclical organic-metal compounds
Assignee: Merck Patent GmbH
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Filing: 1989-05-05
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Granted: —
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Expires: 2009-05-05
Abstract
Abstract Translated from German Die Erfindung betrifft cyclische metallorganische Verbindungen, die intramolekular stabilisiert sind sowie deren Verwendung zur Herstellung dünner Filme und epitaktischer Schichten durch Gasphasenabscheidung. The invention relates to cyclic organometallic compounds which are intramolecularly stabilized and their use for the production of thin films and epitaxial layers by vapor deposition.
Inventors
- 👤 Dietrich Dr. Erdmann
- 👤 Ludwig Dr. Pohl
- 👤 Martin Dr. Hostalek
- 👤 Matthias Lokai
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-30 18:55
CPC Classifications
C; C07; C07F; C07F5/00; C07F5/06; C30; C30B; C30B25/00; C30B25/02; C07F5/061; C07F5/062; C07F9/00; C07F9/02; C07F9/547; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C30B29/00; C30B29/10; C30B29/40
Claims Analysis
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