EP0341315A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Method of stabilizing laser wavelength and laser device with stabilized wavelength
Assignee: Mitsubishi Electric Corp
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Filing: 1988-10-28
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Granted: —
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Expires: 2008-10-28
Abstract
Abstract Part of laser beams whose wavelength is selected by two pieces of etalons in the laser oscillator are polarized, and one etalon is controlled based on the result of analysis of the polarized laser beams to stabilize the wavelength of the laser beams. Other parts of the laser beams are used to measure a change in the laser output, and the change is analyzed to control another etalon in order to suppress the reduction in the laser output.
Inventors
- 👤 Hajime Mitsubishi Denki Kabushiki Nakatani
- 👤 Yoshibumi Mitsubishi Denki Kabushiki Minowa
- 👤 Hiromi Mitsubishi Denki Kabushiki Kaneko
- 👤 Hitoshi; Mitsubishi Denki Kabushiki Wakata
- 👤 Kenyu; Mitsubishi Denki Kabushiki Haruta
- 👤 Haruhiko; Mitsubishi Denki Kabushiki Nagai
- 👤 Kenichi Mitsubishi Denki Kabushiki Yasuda
- 👤 Hiroyuki; Mitsubishi Denki Engineering Mukumoto
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 17:19
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/10; H01S3/13; H01S3/136; H01S3/137; H01S3/14; H01S3/22; H01S3/223; H01S3/225
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
114 words
(1) A method of stabilizing laser wavelength compris- i n g: a process of taking out a part of laser beam emitted from a laser oscillator, whose oscillation wavelength is variable, to obtain spectroscopy by a wavelength monitor system, thereby to determine said oscillation wavelength, by using a first Fabry-Perot etalon and a second Fabry-Perot etalon; a process of controlling said first Fabry-Perot etalon to stabilize the wavelength of said laser oscillator by said oscillation wavelength; and a process of taking out a part of said laser beam and of measuring the laser output by the power monitor system to control said second Fabry-Perot etalon, thereby to stabilize the output of said laser oscillator.
Claim 2
Dependent Claim
110 words
(6) A laser device with stabilized wavelength comprising: an laser oscillator, whose wavelength is variable, having a Fabry-Perot etalon for fine tuning and a Fabry-Perot etalon for rough tuning for selecting the laser oscillation wavelength in a light resonator; a wavelength monitor system for monitoring the wavelength of the laser beam-taken out from said laser oscillator; a servo system for controlling said Fabry-Perot etalon for fine tuning on the basis of the signal from said wavelength monitor system; a power monitor system for measuring the output of said laser beam to analyze the change of the laser output; and a servo system for controlling said Fabry-Perot etalon for rough tuning.
Claim 3
Dependent Claim
115 words
(1) A method of stabilizing laser wavelength comprising: a process of taking out a part of laser beam emitted from a laser oscillator, whose oscillation wavelength is variable, to obtain spectroscopy by a wavelength monitor system, thereby to determine said oscillation wavelength, by using a first Fabry-Perot etalon and a second Fabry-Perot etalon; a process of controlling said first Fabry-Perot etalon to stabilize the wavelength of said laser oscillator by said oscillation wavelength; and a process of taking out a part of said laser beam and of measuring the. laser output by the power monitor system to control said second Fabry-Perot etalon, thereby to stabilize the output of said laser oscillator to an object value.
Claim 4
Dependent Claim
164 words
(2) A method of stabilizing laser wavelength comprising: a process of taking out a part of laser beam emitted from a laser oscillator, whose oscillation wavelength is variable, to obtain spectroscopy by a wavelength monitor system, thereby to determine said oscillation wavelength, by using a first Fabry-Perot etalon and a second Fabry-Perot etalon; a process of controlling said first Fabry-Perot etalon to stabilize the wavelength of said laser oscillator by said oscillation wavelength, a process of detecting the output power of said laser beam to calculate the difference between itself and an objective power; and a process of controlling said second Fabry-Perot etalon so that the difference between said output power and said object power is minimized when the difference between said output power and said objective power of said laser beam exceeds the variation permissive value of the laser output after a duration of noncontrol time by said second Fabry-Perot etalon, which is set for a specified time after the laser oscillation start.
Claim 5
Dependent Claim
99 words
(1) A method of stabilizing laser wavelength comprising: a process of taking out a part of laser beam emitted from a laser oscillator, whose oscillation wavelength is variable, to obtain spectroscopy by a wavelength monitor system, thereby to determine said oscillation wavelength, by using a first Fabry-Perot etalon and a second Fabry-Perot etalon; a process of controlling said first Fabry-Perot etalon to stabilize the wavelength of said laser oscillator by said oscillation wavelength; and a process of measuring applied voltage to the laser medium and of controlling said second Fabry-Perot etalon to stabilize the output of said laser oscillator.
Claim 6
Dependent Claim
120 words
(2) A laser device with stabilized wavelength comprising: an oscillator whose wavelength is variable, having a Fabry-Perot etalon for fine tuning and a Fabry-Perot etalon for rough tuning for selecting the laser oscillation wavelength in the light resonator; a wavelength monitor system for monitoring the wavelength of the laser beam taken out from said laser oscillator; a servo system for controlling said Fabry-Perot etalon for fine tuning on the basis of the signal from said wavelength monitor system; a control system for measuring the applied voltage to the laser medium to analyze the change of applied voltage; and a second servo system for controlling said Fabry-Perot etalon for rough tuning on the basis of the signal from said control system.
Claim 7
Dependent Claim
107 words
(1) A method of stabilizing laser wavelength comprising: a process of monitoring the laser beam emitted from the laser oscillator, whose oscillation wavelength is variable to determine the oscillation wavelength by using the first Fabry-Perot etalon and the second Fabry-Pero t etalon; a process of controlling said first Fabry-Perot etalon by said oscillation wavelength to stabilize the wavelength of said laser oscillator; a process of measuring the output of said laser beam by the power monitor system to control the applied voltage to the laser medium so that the laser output is constant; and a process of measuring said applied voltage to control said second Fabry-Perot etalon.
Claim 8
Dependent Claim
111 words
(2) A method of stabilizing laser wavelength comprizing: a process of monitoring the laser beam emitted from the laser oscillator, whose oscillation wavelength is variable, by the wavelength monitor system to determine the oscillation wavelength, by using the first Fabry-Perot etalon and the second Fabry-Perot etalon; a process of controlling said first Fabry-Perot etalon by said oscillation wavelength to stabilize the wavelength of said laser oscillator; a process of detecting the applied voltage to the laser medium of said laser oscillator to calculate the different voltage between the applied voltage and the object applied voltage; and a process of controlling said second Fabry-Perot etalon so that said different voltage is minimized.
Claim 9
Dependent Claim
157 words
(1) A method of stabilizing laser wavelength a process of taking out a part of laser beam emitted from a laser oscillator whose oscillation wavelength is variable to obtain spectroscopy by a wavelength monitor system, thereby to determine said oscillation wavelength, by using a first Fabry-Perot etalon and a second Fabry-Perot etalon; a process of controlling said first Fabry-Perot etalon to stabilize the wavelength of said laser oscillator by said oscillation wavelength; a process of measuring applied voltage to the laser medium and of controlling said second Fabry-Perot etalon to stabilize the output of said laser oscillator; a process of taking out a part of said laser beam and of measuring the laser output by the power monitor system, and of executing the control of applied voltage to the laser medium and the control of said second Fabry-Perot etalon with time sharing so that the laser output is constant to stabilize the output of said laser oscillator.
Claim 10
Dependent Claim
145 words
(2) A laser device with stabilized wavelength characterized by being provided with: a laser oscillator whose wavelength is variable, having a fine tuning Fabry-Perot etalon and a rough Fabry-Perot etalon for selecting laser oscillation wavelength in the light resonator; a wavelength monitor system for monitoring the wavelength of the laser beam taken out of said laser oscillator; a first servo system for controlling said first Fabry-Perot etalon on the basis of the signal from said wavelength monitor system; a power monitor system for monitoring the output of said laser beam; a time sharing control means for executing the control of applied voltage to the laser medium of said laser oscillator and the output of control signal of said second Fabry-Perot etalon with time sharing; and a second servo system for controlling said second Fabry-Perot etalon by the control signal from said time sharing control means.
References Cited (Backward Citations)
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