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EP0339844A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Multi layer structure and process for making same

Assignee: Spectrum Control Inc
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Filing: 1989-04-17
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Granted: —
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Expires: 2009-04-17
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Abstract

Abstract A high speed process for forming a multi layered thin film structure in a vacuum wherein each film is less than about four microns thick and the total layers can reach upwards to 4,000 or more. The polymeric layers are formed of a cross linked component selected from the group consisting of polyacrylates and mixtures of polyacrylates and monocrylates with the component having a preferable molecular weight of between 200 to 300 and a vapor pressure preferably in excess of 1 X 10⁻² Torr.

Inventors

  • 👤 David G. Shaw
  • 👤 Donald S. Strycker
  • 👤 Angelo Yializis
  • 👤 Mooyoung Ham

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-03 22:40
CPC Classifications
B; B05; B05D; B05D7/00; B05D7/50; B05D7/56; B05D1/00; B05D1/60; B05D3/00; B05D3/06; B05D3/068; B05D7/24; H; H01; H01G; H01G13/00; H01G4/00; H01G4/002; H01G4/018; H01G4/06; H01G4/14; H01G4/145

Claims Analysis

Total Claims: 21
Claim 1
Independent Claim 258 words
A high-speed process for forming a multi layered article comprising a plurality of substantially delamination free, pin hole free and void free layers, according to the following steps: (a) providing a vacuum chamber containing: i) a movable support, ii) at least one vapor outlet of a dielectric vaporizer mounted adjacent to an upstream portion of said support, iii) at least one curing means mounted adjacent to a downstream portion of said support, and, iv) means for maintaining said support at a temperature below that of said vaporizer; (b) evacuating gas from said chamber until the pressure within said chamber is less than about 1 X 10⁻⁴ Torr; (c) selecting a curable component having an average of about two or more olefinic groups per molecule, an average molecular weight between 150 and 1,000 and a vapor pressure in the range of 1 X 10⁻⁶ to 1 X 10⁻¹ Torr at standard temperature and pressure; (d) metering a quantity of said curable component into an inlet portion of said vaporizer; (e) vaporizing said component within said vaporizer; (f) moving said support relative to said vapor outlet and said curing means at a rate of between about 1 cm/sec and 1,000 cm/sec; (g) condensing a film of vaporized component dispensed from said vapor outlet onto the surface of said support, said film having a thickness of 4 microns or less; (h) activating said curing means whereby a substantially cross linked polymer film is formed on said support; and, (i) repeating steps (c) through (h) whereby a multi layer article is formed.
Claim 2
Dependent Claim 258 words
A high-speed process for forming a multi layered article comprising a plurality of substantially delamination free, pin hole free and void free layers, according to the following steps: (a) providing a vacuum chamber containing: i) a movable support, ii) at least one vapor outlet of a dielectric vaporizer mounted adjacent to an upstream portion of said support, iii) at least one curing means mounted adjacent to a downstream portion of said support, and, iv) means for maintaining said support at a temperature below that of said vaporizer; (b) evacuating gas from said chamber until the pressure within said chamber is less than about 1 X 10⁻⁴ Torr; (c) selecting a curable component having an average of about two or more olefinic groups per molecule, an average molecular weight between 150 and 1,000 and a vapor pressure in the range of 1 X 10⁻⁶ to 1 X 10⁻¹ Torr at standard temperature and pressure; (d) metering a quantity of said curable component into an inlet portion of said vaporizer; (e) vaporizing said component within said vaporizer; (f) moving said support relative to said vapor outlet and said curing means at a rate of between about 1 cm/sec and 1,000 cm/sec; (g) condensing a film of vaporized component dispensed from said vapor outlet onto the surface of said support, said film having a thickness of 4 microns or less; (h) activating said curing means whereby a substantially cross linked polymer film is formed on said support; and, (i) repeating steps (c) through (h) whereby a multi layer article is formed.
Claim 3
Dependent Claim 264 words
A high-speed process for forming a multi layered article comprising a plurality of substantially delamination free, pin hole free and void free layers, according to the following steps: (a) providing a vacuum chamber containing: i) a movable support, ii) at least one vapor outlet of a vaporizer mounted adjacent to an upstream portion of said support, iii) at least one curing means mounted adjacent to a downstream portion of said support, and, iv) means for maintaining said support at a temperature below that of said vaporizer; (b) evacuating gas from said chamber until the pressure within said chamber is less than about 1 X 10⁻⁴ Torr; (c) selecting a curable component having an average of about two or more olefinic groups per molecule, an average molecular weight between 150 and 1,000 and a vapor pressure in the range of 1 X 10⁻⁶ to 1 X 10⁻¹ Torr at standard temperature and pressure; (d) metering a quantity of said curable component into an inlet portion of said vaporizer; (e) vaporizing said component within said vaporizer; (f) moving said support relative to said vapor outlet and said curing means at a rate of between about 1 cm/sec and 1,000 cm/sec; (g) condensing a film of vaporized component dispensed from said vapor outlet onto the surface of said support, said film having a thickness of 4 microns or less; (h) repeating steps (c) through (g) whereby a plurality of films of said component are deposited; and, (i) activating said curing means whereby said films are cured to form a substantially cross linked polymer film on said support.
Claim 4
Dependent Claim 264 words
A high-speed process for forming a multi layered article comprising a plurality of substantially delamination free, pin hole free and void free layers, according to the following steps: (a) providing a vacuum chamber containing: i) a movable support, ii) at least one vapor outlet of a vaporizer mounted adjacent to an upstream portion of said support, iii) at least one curing means mounted adjacent to a downstream portion of said support, and, iv) means for maintaining said support at a temperature below that of said vaporizer; (b) evacuating gas from said chamber until the pressure within said chamber is less than about 1 X 10⁻⁴ Torr; (c) selecting a curable component having an average of about two or more olefinic groups per molecule, an average molecular weight between 150 and 1,000 and a vapor pressure in the range of 1 X 10⁻⁶ to 1 X 10⁻¹ Torr at standard temperature and pressure; (d) metering a quantity of said curable component into an inlet portion of said vaporizer; (e) vaporizing said component within said vaporizer; (f) moving said support relative to said vapor outlet and said curing means at a rate of between about 1 cm/sec and 1,000 cm/sec; (g) condensing a film of vaporized component dispensed from said vapor outlet onto the surface of said support, said film having a thickness of 4 microns or less; (h) repeating steps (c) through (g) whereby a plurality of films of said component are deposited; and, (i) activating said curing means whereby said films are cured to form a substantially cross linked polymer film on said support.
Claim 5
Dependent Claim 293 words
A high-speed process for forming a multi layered article comprising a plurality of substantially delamination free, pin hole free and void free layers, according to the following steps: (a) providing a vacuum chamber containing: i) a movable support, ii) at least one vapor outlet of a vaporizer mounted adjacent to an upstream portion of said support, iii) at least one curing means mounted adjacent to a downstream portion of said support, iv) means for maintaining said support at a temperature below that of said vaporizer; and v) means for depositing an inorganic material; (b) evacuating gas from said chamber until the pressure within said chamber is less than about 1 X 10⁻⁴ Torr; (c) selecting a curable component having an average of about two or more olefinic groups per molecule, an average molecular weight between 150 and 1,000 and a vapor pressure in the range of 1 X 10⁻⁶ to 1 X 10⁻¹ Torr at standard temperature and pressure; (d) metering a quantity of said curable component into an inlet portion of said vaporizer; (e) vaporizing said component within said vaporizer; (f) moving said support relative to said vapor outlet and said curing means at a rate of between about 1 cm/sec and 1,000 cm/sec; (g) condensing a film of vaporized component dispensed from said vapor outlet onto the surface of said support, said film having a thickness of 4 microns or less; (h) activating said curing means whereby a substantially cross linked polymer film is formed on said support; and (i) repeating steps (c) through (h) and, (j) depositing a layer of inorganic material on one or more substantially cured polymer films whereby a multi layered article comprising a plurality of polymer layers and at least one inorganic material layer is formed.
Claim 6
Dependent Claim 293 words
A high-speed process for forming a multi layered article comprising a plurality of substantially delamination free, pin hole free and void free layers, according to the following steps: (a) providing a vacuum chamber containing: i) a movable support, ii) at least one vapor outlet of a vaporizer mounted adjacent to an upstream portion of said support, iii) at least one curing means mounted adjacent to a downstream portion of said support, iv) means for maintaining said support at a temperature below that of said vaporizer; and v) means for depositing an inorganic material; (b) evacuating gas from said chamber until the pressure within said chamber is less than about 1 X 10⁻⁴ Torr; (c) selecting a curable component having an average of about two or more olefinic groups per molecule, an average molecular weight between 150 and 1,000 and a vapor pressure in the range of 1 X 10⁻⁶ to 1 X 10⁻¹ Torr at standard temperature and pressure; (d) metering a quantity of said curable component into an inlet portion of said vaporizer; (e) vaporizing said component within said vaporizer; (f) moving said support relative to said vapor outlet and said curing means at a rate of between about 1 cm/sec and 1,000 cm/sec; (g) condensing a film of vaporized component dispensed from said vapor outlet onto the surface of said support, said film having a thickness of 4 microns or less; (h) activating said curing means whereby a substantially cross linked polymer film is formed on said support; and (i) repeating steps (c) through (h) and, (j) depositing a layer of inorganic material on one or more substantially cured polymer films whereby a multi layered article comprising a plurality of polymer layers and at least one inorganic material layer is formed.
Claim 7
Dependent Claim 20 words
A process in accordance with claim 3 wherein a plurality of inorganic material layers are interleaved between said polymer layers.
Claim 8
Dependent Claim 165 words
A process in accordance with claims 1, 2 or 3 and further including providing a plurality of vapor outlets of vaporizers in said air tight chamber; selecting curable components from the group consisting of polyacrylates and mixtures of monoacrylates and polyacrylates, said components having an average molecular weight of less than 1,000, and a vapor pressure in the range of 1 x 10⁻⁶ to 1 x 10⁻¹ Torr at standard temperature and pressure; metering a quantity of said curable components into the inlet portions of at least two of said vaporizers; vaporizing the components in each vaporizer; moving said support relative to said vapor outlets and said curing means at a speed of between about 1 cm/sec. and 1,000 cm/sec. condensing one or more films of vaporized curable components dispensed from said vapor outlets on to the surface of said support, each film having a thickness of 4 microns or less; activating said curing means whereby substantially cross linked films are formed on said support.
Claim 9
Dependent Claim 17 words
A process in accordance with claim 1, 2 or 3 wherein said curable component is a diacrylate.
Claim 10
Dependent Claim 23 words
A process in accordance with claims 1, 2 or 3 in which said movable support comprises a rotatable drum, disk or continuous belt.
Claim 11
Dependent Claim 20 words
A process in accordance with claims 1, 2 or 3 in which said curing is by means of electron beam.
Claim 12
Dependent Claim 16 words
A multi layered article made in accordance with the process of claims 1, 2 or 3.
Claim 13
Dependent Claim 24 words
A multi layered article made in accordance with the process of claim 3 wherein said product comprises at least 1,000 layers of cured component.
Claim 14
Dependent Claim 80 words
A multi layer article comprising a plurality of substantially delamination free, pin hole free and void free polymeric layers, each polymeric layer being 4 microns or less thick and comprising a substantially cross linked component selected from the group consisting of polyacrylates and mixtures of monoacrylates and polyacrylates, said component having an average molecular weight of less than 1,000 and a vapor pressure in the range of 1 x 10⁻⁶ to 1 x 10⁻¹ Torr at standard temperature and pressures.
Claim 15
Dependent Claim 80 words
A multi layer article comprising a plurality of substantially delamination free, pin hole free and void free polymeric layers, each polymeric layer being 4 microns or less thick and comprising a substantially cross linked component selected from the group consisting of polyacrylates and mixtures of monoacrylates and polyacrylates, said component having an average molecular weight of less than 1,000 and a vapor pressure in the range of 1 x 10⁻⁶ to 1 x 10⁻¹ Torr at standard temperature and pressures.
Claim 16
Dependent Claim 15 words
A multi layer article in accordance with claim 11 in which the article is self-supporting.
Claim 17
Dependent Claim 24 words
A multi layer article in accordance with claim 11 or 12 wherein the thickness along the length of one or more layers is varied.
Claim 18
Dependent Claim 28 words
A process in accordance with claim 1, 2 or 3 in which said component is selected from the group consisting of polyacrylate and mixtures of monoacrylates and polyacrylates.
Claim 19
Dependent Claim 57 words
A process in accordance with claims 1, 2 or 3 wherein said polyacrylate has the formula: wherein: R¹ is an aliphatic, alicyclic or mixed aliphatic-­alicyclic radical derived from a compound of the formula R¹(OH) m ; R² is a hydrogen, methyl, ethyl, propyl, butyl or pentyl; n is from 2 to 4; m is 2 or more.
Claim 20
Dependent Claim 37 words
A process in accordance with claims 1, 2 or 3 wherein said polyacrylate comprises a diacrylate of the formula: wherein: r and s are each 7 or 8 and the sum of r and s is 15.
Claim 21
Dependent Claim 40 words
A process in accordance with claims 1, 2 or 3 wherein said polyacrylate is selected from the group comprising: (i) 1,6-hexane diol diacrylate; (ii) alkoxylated cyclohexane dimethanol diacrylates; wherein the alkoxy group contains 1 to 4 carbon atoms and (iii)

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