Patent US383103A successfully refreshed from Google Patents.
EP0337618A1
Expired / Lapsed
EP
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Ceramic coatings from the pyrolysis in ammonia of mixtures of silicate esters and other metal oxide precursors
Assignee: Dow Silicones Corp
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Filing: 1989-03-21
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Granted: —
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Expires: 2009-03-21
Abstract
Abstract Hydrolyzed or partially hydrolyzed mixtures of silicate esters and metal oxide precursors, are pyrolyzed at relatively low temperature in the presence of ammonia to form ceramic coatings on substrates such as electronic devices. The metal oxide precursors are soluble compounds, for example, alkoxides of aluminum, titanium or zirconium. The coatings produced are useful for the protection of electronic devices. One or more coatings containing amorphous silicon, silicon carbon, silicon nitrogen or silicon carbon nitrogen can be applied over the nitrided ceramic SiO₂/metal oxide coating for still further protection of electronic devices.
Inventors
- 👤 Loren Andrew Haluska
- 👤 Keith Winton Michael
- 👤 Leo Tarhay
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-05 22:48
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/40; H10W74/43; C; C04; C04B; C04B41/00; C04B41/45; C04B41/4505; C04B41/455; C04B41/4554; C04B41/52; C23; C23C; C23C18/00; C23C18/02; C23C18/12; C23C18/1204; C23C18/125; C23C18/1295; H10P; H10P14/00; H10P14/60; C04B2111/00; C04B2111/00474; C04B2111/00844; H10P14/63; H10P14/6326; H10P14/6342
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
109 words
A process for forming on a substrate a ceramic coating which process comprises: (A) applying to the substrate a flowable solution of a composition comprising a hydrolyzed or partially hydrolyzed mixture of a silicate ester and a metal oxide precursor selected from the group consisting of acyloxy and alkoxy compounds of aluminum, titanium and zirconium wherein the proportion by weight of metal oxide precursor as metal oxide is about 0.1 to about 30 percent; (B) drying the solution to deposit a preceramic coating on the substrate; and (C) heating the coated substrate in a substantially ammonia atmosphere to a temperature sufficient to produce a ceramic coating on the substrate.
Claim 2
Dependent Claim
109 words
A process for forming on a substrate a ceramic coating which process comprises: (A) applying to the substrate a flowable solution of a composition comprising a hydrolyzed or partially hydrolyzed mixture of a silicate ester and a metal oxide precursor selected from the group consisting of acyloxy and alkoxy compounds of aluminum, titanium and zirconium wherein the proportion by weight of metal oxide precursor as metal oxide is about 0.1 to about 30 percent; (B) drying the solution to deposit a preceramic coating on the substrate; and (C) heating the coated substrate in a substantially ammonia atmosphere to a temperature sufficient to produce a ceramic coating on the substrate.
Claim 3
Dependent Claim
14 words
A process as claimed in claim 1 wherein the substrate is an electronic device.
Claim 4
Dependent Claim
83 words
A process as claimed in claim 2 further comprising: (D) applying to the ceramic coating a passivating coating selected from the group consisting of (i) a silicon coating, (ii) a silicon carbon coating, (iii) a silicon-nitrogen coating and (iv) a silicon-carbon-nitrogen coating, wherein the passivating coating is applied by a means selected from the group consisting of (a) chemical vapor deposition, (b) plasma enhanced chemical vapor deposition, and (c) application of a preceramic polymer coating and subsequent ceramification of the preceramic polymer coating.
Claim 5
Dependent Claim
68 words
A process as claimed in claim 3 further comprising: (E) applying to the passivating coating a barrier coating selected from the group consisting of (i) a silicon coating, (ii) a silicon carbon coating, (iii) a silicon-nitrogen coating and (iv) a silicon-carbon-nitrogen coating, wherein the barrier coating is applied by a means selected from the group consisting of (a) chemical vapor deposition and (b) plasma enhanced chemical vapor deposition.
Claim 6
Dependent Claim
21 words
A process as claimed in claim 3 wherein the passivating coating is applied by means of metal assisted chemical vapor deposition.
Claim 7
Dependent Claim
21 words
A process as claimed in claim 4 wherein the barrier coating is applied by means of metal assisted chemical vapor deposition.
Claim 8
Dependent Claim
9 words
A substrate coated by the process of claim 1.
Claim 9
Dependent Claim
10 words
An electronic device coated by the process of claim 2.
Claim 10
Dependent Claim
10 words
An electronic device coated by the process of claim 3.
Claim 11
Dependent Claim
10 words
An electronic device coated by the process of claim 4.
References Cited (Backward Citations)
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