EP0337304A1
Expired / Lapsed
EP
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Use of monophenylarsines or diphenylarsines for the preparation of epitaxial layers in the gas phase
Assignee: Preussag Pure Metals GmbH
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Filing: 1989-04-07
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Granted: —
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Expires: 2009-04-07
Abstract
Abstract Translated from German Metallorganische Verbindungen in Form der Phenylarsine zur Verwendung im elektronischen Bereich als Stoffe für die MO-VPE oder MO-CVD oder MOMBE Verfahren sowie zur Ionenimplantation oder zur in-situ doping von Polysilizium. Organometallic compounds in the form of phenylarsines for use in the electronic field as substances for the MO-VPE or MO-CVD or MOMBE processes as well as for ion implantation or for in-situ doping of polysilicon.
Inventors
- 👤 Hartmut Dr. Hofmann
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-04 09:16
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C07; C07F; C07F9/00; C07F9/66; C07F9/70; C07F9/74; C30B29/00; C30B29/10; C30B29/40
Claims Analysis
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References Cited (Backward Citations)
DE251571C
Cited
US4721683A
Cited
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