EP0336537A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Device for detecting positional relationship between two objects
Assignee: Canon Inc
•
Filing: 1989-02-16
•
Granted: —
•
Expires: 2009-02-16
Abstract
Abstract A device for detecting positional relationship between first and second objects direction is disclosed. The includes a light source for emitting light in a direction to the first or second object, a first detecting portion the position of incidence of a first light deflected by the first and second objects wherein the position of incidence of the first light upon the first detecting portion is changeable with a change in the positional relationship between the first and second objects in the predetermined direction. Second detecting portion detects the position of incidence of a second light deflected by at least one of the first and second objects, wherein the state of the position of incidence of the second light resulting from a change in the positional relationship between the first and second objects, in the predetermined direction differs from that of the first light. On the basis of the detection by the first and second detecting portions, the positional relationship between the first and second objects is detected without being affected by an inclination.
Inventors
- 👤 Kenji Saitoh
- 👤 Masakazu Matsugu
- 👤 Shigeyuki Suda
- 👤 Yukichi Niwa
- 👤 Ryo Kuroda
- 👤 Noriyuki Nose
- 👤 Minoru Yoshii
- 👤 Naoto Abe
- 👤 Mitsutoshi Ohwada
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-31 06:03
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7003; G03F9/7023; G03F9/7049
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
264 words
A device for detecting positional relationship between first and second objects in a predetermined direction, said device comprising: light source means for emitting light in a direction to the first or second object; first detecting means having a first light receiving surface, for detecting the position of incidence of a first light, upon said first light receiving surface, having been emitted from said light source means and having been deflected by the first and second objects toward said first light receiving surface, wherein the position of incidence of the first light upon said first light receiving surface is changeable with a change in the positional relationship between the first and second objects in said predetermined direction; second detecting means having a second light receiving surface, for detecting the position of incidence of a second light, upon said second light receiving surface, having been emitted from said light source means and having been deflected by at least one of the first and second objects to said second light receiving surface, wherein the state of the position of incidence of the second light resulting from a change in the positional relationship between the first and second objects, in said predetermined direction differs from that of the first light; and means for detecting the positional relationship between the first and second objects in said predetermined direction, on the basis of the detection by said first and second detecting means, whereby the positional relationship between the first and second objects is detected without being affected by a change in an inclination component between the first and second objects.
Claim 2
Independent Claim
264 words
A device for detecting positional relationship between first and second objects in a predetermined direction, said device comprising: light source means for emitting light in a direction to the first or second object; first detecting means having a first light receiving surface, for detecting the position of incidence of a first light, upon said first light receiving surface, having been emitted from said light source means and having been deflected by the first and second objects toward said first light receiving surface, wherein the position of incidence of the first light upon said first light receiving surface is changeable with a change in the positional relationship between the first and second objects in said predetermined direction; second detecting means having a second light receiving surface, for detecting the position of incidence of a second light, upon said second light receiving surface, having been emitted from said light source means and having been deflected by at least one of the first and second objects to said second light receiving surface, wherein the state of the position of incidence of the second light resulting from a change in the positional relationship between the first and second objects, in said predetermined direction differs from that of the first light; and means for detecting the positional relationship between the first and second objects in said predetermined direction, on the basis of the detection by said first and second detecting means, whereby the positional relationship between the first and second objects is detected without being affected by a change in an inclination component between the first and second objects.
Claim 3
Dependent Claim
41 words
A device according to Claim 1, wherein said positional relationship detecting means detects the positional relationship between the first and second objects in a direction perpendicular to a direction in which the first and second objects are spaced from each other.
Claim 4
Dependent Claim
34 words
A device according to Claim 1, wherein the position of incidence of the second light is unchangeable with a change in the positional relationship between the first and second objects in said predetermined direction.
Claim 5
Dependent Claim
35 words
A device according to Claim 3, wherein the first and second objects are provided with diffraction gratings by which the first light is diffracted and wherein the second light is reflected by the second object.
Claim 6
Dependent Claim
66 words
A device according to Claim 1, wherein the positional of incidence of the second light is changeable with a change in the positional relationship between the first and second objects in said predetermined direction and wherein the position of incidence of the second light changes by an amount corresponding to a multiple of the amount of change in the position of incidence of the first light.
Claim 7
Dependent Claim
63 words
A device according to Claim 1, wherein the position of incidence of the second light is changeable with a change in the positional relationship between the first and second objects in said predetermined direction and wherein the position of incidence of the second light changes in a direction opposite to a direction of change in the position of incidence of the first light.
Claim 8
Dependent Claim
283 words
A device according to Claim 6, further comprising: third detecting means having a third light receiving surface, for detecting the position of incidence of a third light, upon said third light receiving surface, having been emitted from said light source and having been deflected by the first and second objects to said third light receiving surface, wherein the position of incidence of the third light is changeable with a change in the positional relationship between the first and second objects in said predetermined direction; fourth detecting means having a fourth light receiving surface, for detecting the position of incidence of a fourth light upon said fourth light receiving surface, having been emitted from said light source means and having been deflected by the first and second objects to said fourth light receiving surface, wherein the position of incidence of the fourth light being changeable with a change in the positional relationship between the first and second objects in said predetermined direction and wherein the position of incidence of the forth light changes in a direction opposite to a direction of change in the position of incidence of the third light; wherein when the first and second objects are in a positional relationship the first light and the second light are incident on the same position, wherein when the first and second objects are in a second positional relationship different from the first positional relationship the third and fourth lights are incident on the same position, and wherein said positional relationship detecting means detects the amount and direction of a relative positional deviation between the first and second objects on the basis of the detection by said first, second, third and fourth detecting means.
Claim 9
Dependent Claim
21 words
A device according to Claim 1, wherein said positional relationship detecting means detects the spacing between the first and second objects.
Claim 10
Dependent Claim
222 words
A mark arrangement usable for detecting positional relationship between a first and second objects, comprising: a first mark provided on the first object, having a function for diffracting in a first direction a first light incident thereupon; a second mark provided on the second object, having a function for diffracting in a second direction the first light having been diffracted in the first direction by said first mark, wherein the position of incidence upon a predetermined plane of the first light having been diffracted by the second mark is changeable with a change in the relative position of said first and second marks; and a third mark provided on the first object, having a function for diffracting in a third direction a second light incident thereupon, wherein the second light diffracted by said third mark is directed by way of the second object in a fourth direction and wherein the state of the position of incidence upon a predetermined plane of the second light, diffracted by said third mark, resulting from a change in the relative position of said first and second marks, differs from that in the first light; wherein the positional relationship between the first and second objects can be detected without being affected by any inclination therebetween, by detecting the position of incidence of the first and second lights.
Claim 11
Dependent Claim
222 words
A mark arrangement usable for detecting positional relationship between a first and second objects, comprising: a first mark provided on the first object, having a function for diffracting in a first direction a first light incident thereupon; a second mark provided on the second object, having a function for diffracting in a second direction the first light having been diffracted in the first direction by said first mark, wherein the position of incidence upon a predetermined plane of the first light having been diffracted by the second mark is changeable with a change in the relative position of said first and second marks; and a third mark provided on the first object, having a function for diffracting in a third direction a second light incident thereupon, wherein the second light diffracted by said third mark is directed by way of the second object in a fourth direction and wherein the state of the position of incidence upon a predetermined plane of the second light, diffracted by said third mark, resulting from a change in the relative position of said first and second marks, differs from that in the first light; wherein the positional relationship between the first and second objects can be detected without being affected by any inclination therebetween, by detecting the position of incidence of the first and second lights.
Claim 12
Dependent Claim
19 words
A mark arrangement according to Claim 9, wherein said first and third marks are formed in the same region.
Claim 13
Dependent Claim
32 words
A mark arrangement according to Claim 9, wherein each of the first and third marks are divided into sections and wherein the sections of said first and third marks are arrayed alternately.
Claim 14
Independent Claim
255 words
A device for detecting the position of an object in a predetermined direction, said device comprising: light source means for emitting light to the object; first detecting means having a first light receiving surface, for detecting the position of incidence of a first light upon said first light receiving surface, having been emitted from said light source means and having been deflected by the object to said first light receiving surface, the position of incidence of the first light being changeable with a change in the position of the object in said predetermined direction and a change in inclination of the object; second detecting means having a second light receiving surface, for detecting the position of incidence of a second light upon said second light receiving surface, having been emitted from said light source means and having been deflected by the object to said second light receiving surface, the state of the position of incidence of the second light resulting from a change in inclination of the object being the same as that of the first light and the position of incidence of the second light resulting from a change in the position of the object in said predetermined direction being different from at of the first light; and means for detecting the position of the object in said predetermined direction on the basis of the detection by said first and second detecting means, whereby the position of the object can be detected without being affected by a change in the inclination of the object.
Claim 15
Independent Claim
255 words
A device for detecting the position of an object in a predetermined direction, said device comprising: light source means for emitting light to the object; first detecting means having a first light receiving surface, for detecting the position of incidence of a first light upon said first light receiving surface, having been emitted from said light source means and having been deflected by the object to said first light receiving surface, the position of incidence of the first light being changeable with a change in the position of the object in said predetermined direction and a change in inclination of the object; second detecting means having a second light receiving surface, for detecting the position of incidence of a second light upon said second light receiving surface, having been emitted from said light source means and having been deflected by the object to said second light receiving surface, the state of the position of incidence of the second light resulting from a change in inclination of the object being the same as that of the first light and the position of incidence of the second light resulting from a change in the position of the object in said predetermined direction being different from at of the first light; and means for detecting the position of the object in said predetermined direction on the basis of the detection by said first and second detecting means, whereby the position of the object can be detected without being affected by a change in the inclination of the object.
Claim 16
Independent Claim
208 words
A device for detecting the position of an object in a predetermined direction, said device comprising: light source means for emitting light to the object; first detecting means having a first light receiving surface, for detecting the position of incidence of a first light upon said first light receiving surface, having been emitted from said light source means and having been deflected by the object to said light receiving surface, the position of incidence of the first light being changeable with a change in the position of the object in said predetermined direction and a change in inclination thereof; second detecting means having a second light receiving surface, for detecting the position of incidence of a second light upon said second light receiving surface having been emitted from said light source means and having been deflected by the object to said second light receiving surface, wherein any inclination of the object can be detected by detecting the position of incidence of the second light; and means for detecting the position of the object in said predetermined direction on the basis of the detection by said first and second detecting means, whereby the position of the object can be detected without being affected by any inclination of the object.
Claim 17
Independent Claim
208 words
A device for detecting the position of an object in a predetermined direction, said device comprising: light source means for emitting light to the object; first detecting means having a first light receiving surface, for detecting the position of incidence of a first light upon said first light receiving surface, having been emitted from said light source means and having been deflected by the object to said light receiving surface, the position of incidence of the first light being changeable with a change in the position of the object in said predetermined direction and a change in inclination thereof; second detecting means having a second light receiving surface, for detecting the position of incidence of a second light upon said second light receiving surface having been emitted from said light source means and having been deflected by the object to said second light receiving surface, wherein any inclination of the object can be detected by detecting the position of incidence of the second light; and means for detecting the position of the object in said predetermined direction on the basis of the detection by said first and second detecting means, whereby the position of the object can be detected without being affected by any inclination of the object.
Claim 18
Independent Claim
397 words
A device for measuring an interval between a first object and a second object, said device comprising: light source means for projecting a light to the first object; a light receiving optical system for receiving the light projected by said light source means and deflected by the first and second objects, said light receiving optical system having means for separating the received light; first light detecting means for receiving a first one of lights as separated by said separating means, said first light detecting means receiving the first light at a site at which the position of the first light incident thereat is changeable with a change in the interval between the first and second objects, and said first light detecting means being operable to detect the position of incidence of the received light; and second light detecting means for receiving a second one of the lights separated by said separating means, said second light detecting means receiving the second light at a site at which the position of the second light incident thereat is not changeable with a change in the interval between the first and second objects, and said second light detecting means being operable to detect the position of incidence of the received light; wherein the interval between the first and second object is measured on the basis of the detection by said first and second light detecting means. 15. A method of determining alignment between first and second objects, in which radiation is directed onto a first portion of the first object, said first portion being arranged to direct the radiation to a first portion of the second object, and the latter first portion being arranged to direct the radiation in a manner which varies with varying relative alignment and varying relative inclination of the first and second objects, the radiation directed by the latter first portion being detected, and in which radiation is directed onto a second portion of the first object, said second portion being arranged to direct the radiation to a second portion of the second object, and the latter second portion being arranged to direct the radiation in a manner which varies at least with varying relative inclination of the first and second objects, the radiation directed by the latter second portion being detected, and the two detections being used in determining alignment between the first and second objects.
Claim 19
Independent Claim
397 words
A device for measuring an interval between a first object and a second object, said device comprising: light source means for projecting a light to the first object; a light receiving optical system for receiving the light projected by said light source means and deflected by the first and second objects, said light receiving optical system having means for separating the received light; first light detecting means for receiving a first one of lights as separated by said separating means, said first light detecting means receiving the first light at a site at which the position of the first light incident thereat is changeable with a change in the interval between the first and second objects, and said first light detecting means being operable to detect the position of incidence of the received light; and second light detecting means for receiving a second one of the lights separated by said separating means, said second light detecting means receiving the second light at a site at which the position of the second light incident thereat is not changeable with a change in the interval between the first and second objects, and said second light detecting means being operable to detect the position of incidence of the received light; wherein the interval between the first and second object is measured on the basis of the detection by said first and second light detecting means. 15. A method of determining alignment between first and second objects, in which radiation is directed onto a first portion of the first object, said first portion being arranged to direct the radiation to a first portion of the second object, and the latter first portion being arranged to direct the radiation in a manner which varies with varying relative alignment and varying relative inclination of the first and second objects, the radiation directed by the latter first portion being detected, and in which radiation is directed onto a second portion of the first object, said second portion being arranged to direct the radiation to a second portion of the second object, and the latter second portion being arranged to direct the radiation in a manner which varies at least with varying relative inclination of the first and second objects, the radiation directed by the latter second portion being detected, and the two detections being used in determining alignment between the first and second objects.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
Maintenance schedule is calculated for granted US utility patents.