EP0335752A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
System for manufacturing semiconductors under clean condition
Assignee: UMC Japan Co Ltd
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Filing: 1989-01-16
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Granted: —
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Expires: 2009-01-16
Abstract
Abstract In semiconductor production plants a highly clean state is required. In a plant building, through which air is forcibly circulated, a clean room (12) in a low or medium cleanliness state is formed using a filter (17). A plurality of processing units are provided in the clean room (12) and held in a high cleanliness state. A transport robot (23) transfers a workpiece or like object to and from each processing unit. The robot (23) is capable of being driven to positions corresponding to the processing units and hoods the workpiece or object in a highly clean state. Thus, there is no need of holding the entire building highly clean, and only a required part of the building may be held in a highly clean state, which is advantageous from the standpoint of cost.
Inventors
- 👤 Takumi Tamura
- 👤 Shosuke Shinoda
- 👤 Kyohiko Okashita
- 👤 Tetsuo Yamashita
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 19:30
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/34; H10P72/3408; B; B25; B25J; B25J21/00; B25J21/005; H10P72/3406; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/139; Y10S414/14; Y10T; Y10T29/00; Y10T29/53; Y10T29/53096
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
109 words
A system for manufacturing semiconductor under clean condition, comprising: a plurality of processing units disposed in a clean room (12) in a low or medium cleanliness state and held in a high cleanliness state; and a transport robot (23) capable of being driven to positions corresponding to said plurality of processing units and having a self-cleaning function of holding clean a transport box, in which a workpiece or an object (31) is accommodated; said transport (23) robot being controlled such as to effect transfer of said workpiece or object (31) between its arm (26) and a processing unit (29) when it reaches the position corresponding to said processing unit.
Claim 2
Independent Claim
109 words
A system for manufacturing semiconductor under clean condition, comprising: a plurality of processing units disposed in a clean room (12) in a low or medium cleanliness state and held in a high cleanliness state; and a transport robot (23) capable of being driven to positions corresponding to said plurality of processing units and having a self-cleaning function of holding clean a transport box, in which a workpiece or an object (31) is accommodated; said transport (23) robot being controlled such as to effect transfer of said workpiece or object (31) between its arm (26) and a processing unit (29) when it reaches the position corresponding to said processing unit.
Claim 3
Independent Claim
104 words
A system for manufacturing semiconductor under clean condition, comprising: a plurality of processing units disposed in a clean room (12) in a low or medium cleanliness state and held in a high cleanliness state; and a transport robot (23) capable of being driven to positions corresponding to said plurality of processing units with a workpiece or an object (31) accommodated in a sealed carrier (13A) in a highly clean state outside said clean room; said tranport robot (23) being when reaching a posi tion corresponding to a processing unit to transfer said workpiece or object (31) to said processing unit with its arm (26).
Claim 4
Independent Claim
104 words
A system for manufacturing semiconductor under clean condition, comprising: a plurality of processing units disposed in a clean room (12) in a low or medium cleanliness state and held in a high cleanliness state; and a transport robot (23) capable of being driven to positions corresponding to said plurality of processing units with a workpiece or an object (31) accommodated in a sealed carrier (13A) in a highly clean state outside said clean room; said tranport robot (23) being when reaching a posi tion corresponding to a processing unit to transfer said workpiece or object (31) to said processing unit with its arm (26).
Claim 5
Dependent Claim
54 words
The system according to claim 1, wherein said clean room (12) is partitioned with a first partitioning wall (11) with an arm penetration hole (27) capable of being penetrated by an arm (26) of said transport robot (23), thus forming a highly clean room, said processing units being disposed in said highly clean room.
Claim 6
Dependent Claim
33 words
The system according to claim 1, wherein each said processing unit held in a high cleanliness state has an arm penetration hole capable of being penetrated by an arm of said transport robot.
Claim 7
Dependent Claim
80 words
The system according to claim 3 wherein said clean room (19) is formed in a space of a building structure, through which air is forcibly circulated, portions of the ceiling of said clean room corresponding to said highly clean room and the room other than said highly clean room ar provided with respective filters (18,19) having different mesh sizes, and air exhaust holes (20,21) ar formed in portions of the floor of said clean room corresponding to said respective filters.
Claim 8
Dependent Claim
47 words
The system according to claim 4, wherein said clean room is formed in a space of a building structure, through which air is forcibly circulated, and the ceiling of said clean room and housing of each said processing unit are provided with respective filters having different meshes.
Claim 9
Dependent Claim
96 words
The system according to claim 3, wherein a second partitioning wall is provided on the inner side of said first partitioning wall with said arm penetration hole to form an air supply room between said first and second partitioning walls, said air supply room and said highly clean room are communicated with each other through a vent hole formed in a lower portion of said second partioning wall, and the ceiling of said air supply room is provided with a filter to cause forced circulation of air between said highly clean room and air supply room.
References Cited (Backward Citations)
No citation records indexed.
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