EP0333392A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Electro-optical device
Assignee: Seiko Instruments Inc
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Filing: 1989-03-10
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Granted: —
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Expires: 2009-03-10
Abstract
Abstract An electro-optical device comprising a plurality of pixels (12) provided with switching elements (14), each switching element (14) using amorphous silicon as its base material characterised in that the said amorphous silicon base material of each switching element (14) contains no hydrogen or has a hydrogen content of not more than 1% by weight.
Inventors
- 👤 Yoshimi Kuroda
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-30 02:28
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/136; G02F1/1362; G02F1/1365; H; H01; H01C; H01C7/00; H01C7/10; H01C7/105
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
54 words
An electro-optical device comprising a plurality of pixels (11-21) provided with switching elements (14), each switching element (14) using amorphous silicon as its base material characterised in that the said amorphous silicon base material of each switching element (14) contains no hydrogen or has a hydrogen content of not more than 1% by weight.
Claim 2
Dependent Claim
54 words
An electro-optical device comprising a plurality of pixels (11-21) provided with switching elements (14), each switching element (14) using amorphous silicon as its base material characterised in that the said amorphous silicon base material of each switching element (14) contains no hydrogen or has a hydrogen content of not more than 1% by weight.
Claim 3
Dependent Claim
22 words
An electro-optical device as claimed in claim 1 characterised in that the switching elements (14) are non-linear resistance elements or TFT elements.
Claim 4
Dependent Claim
71 words
An electro-optical device as claimed in claim 1 or 2 characterised in that the device comprises first and second substrates (19,11) which face each other, electrodes (12,13,17) of the said pixels and the said switching elements (14) being carried on inner surfaces of the respective substrates (19,11); an electro-optical layer (16) between the first and second substrates (19,11); and at least one polarizing member (20,21) through which the device is viewed.
Claim 5
Dependent Claim
22 words
An electro-optical device as claimed in claim 3 characterised in that the electro-optical layer (16) comprises a layer of liquid crystal material.
Claim 6
Dependent Claim
55 words
An electro-optical device as claimed in claim 3 or 4 characterised in that each of the substrates (19,11) has a plurality of row electrodes (13) and a plurality of column electrodes (17) on the inner surface thereof, the second substrate (11) also having pixel electrodes (12) and non-linear resistance elements (14) on its inner surface.
Claim 7
Dependent Claim
35 words
An electro-optical device as claimed in any preceding claim characterised in that the said amorphous silicon base material consists substantially of SiN x or SiC y or SiO z or of Si, N and O.
Claim 8
Dependent Claim
21 words
An electro-optical device as claimed in claim 6 characterised in that the base material is Si-rich compared with the stoichiometric ratio.
Claim 9
Dependent Claim
24 words
An electro-optical device as claimed in any preceding claim characterised in that the amorphous silicon has been deposited on a substrate (11) by sputtering.
Claim 10
Dependent Claim
26 words
An electro-optical device as claimed in claim 8 characterised in that the sputtering is effected by reactive sputtering using a target of silicon and a gas.
Claim 11
Dependent Claim
18 words
An electro-optical device as claimed in claim 9 characterised in that the gas contains N, O or C.
Claim 12
Dependent Claim
26 words
An electro-optical device as claimed in claim 9 or 10 characterised in that the target is made of single crystal silicon, polycrystal silicon or silicon oxide.
Claim 13
Dependent Claim
42 words
An electro-optical device as claimed in claim 5 or in any claim appendant thereto characterised in that the row and column electrodes (13,17), the pixel electrodes (12) and the non-linear resistance elements (14) are deposited on the second substrate (11) by sputtering.
Claim 14
Independent Claim
71 words
A method of producing an electro-optical device comprising forming a plurality of pixels (11-21) provided with swtching elements (14) on a substrate (11), each switching element (14) using amorphous silicon as its base material characterised in that the amorphous silicon base material of each switching element (14) contains no hydrogen or has a hydrogen content of not more than 1% by weight, the base material being sputtered onto the substrate (11).
Claim 15
Independent Claim
71 words
A method of producing an electro-optical device comprising forming a plurality of pixels (11-21) provided with swtching elements (14) on a substrate (11), each switching element (14) using amorphous silicon as its base material characterised in that the amorphous silicon base material of each switching element (14) contains no hydrogen or has a hydrogen content of not more than 1% by weight, the base material being sputtered onto the substrate (11).
Claim 16
Dependent Claim
90 words
An electro-optical device comprising: a first substrate (19) having an electrode (17) on the inner surface thereof; a second substrate (11) having a plurality of line electrodes (13) , pixel electrodes (12) and a plurality of switching elements (14) on the inner surface of the second substrate (11), said switching element (14) using amorphous Si as a base material, wherein said base material has a hydrogen component of O or less than 1%; an electro-optical material layer (16) between said first and second substrates (19,11); and a polarizing member (20,21).
Claim 17
Dependent Claim
90 words
An electro-optical device comprising: a first substrate (19) having an electrode (17) on the inner surface thereof; a second substrate (11) having a plurality of line electrodes (13) , pixel electrodes (12) and a plurality of switching elements (14) on the inner surface of the second substrate (11), said switching element (14) using amorphous Si as a base material, wherein said base material has a hydrogen component of O or less than 1%; an electro-optical material layer (16) between said first and second substrates (19,11); and a polarizing member (20,21).
Claim 18
Dependent Claim
132 words
An electro-optical device comprising: a first substrate having one of a plurality of row electrodes and a plurality of column electrodes on the inner surface thereof; a second substrate having the other of said row electrodes and column electrodes, pixel electrodes and non-linear resistance elements on its inner surface, each of said non-linear resistance elements including a first conductor connected to a line of the other of said row electrodes and column electrodes, a second conductor connected to one of said pixel electrodes and a non-linear resistance layer formed between said first and second conductors, said non-linear resistance layer being made of an amorphous Si base material which has a hydrogen component of O or less than 1%; an electro-optical material layer between said first and second substrates; and a polarizing member.
Claim 19
Dependent Claim
132 words
An electro-optical device comprising: a first substrate having one of a plurality of row electrodes and a plurality of column electrodes on the inner surface thereof; a second substrate having the other of said row electrodes and column electrodes, pixel electrodes and non-linear resistance elements on its inner surface, each of said non-linear resistance elements including a first conductor connected to a line of the other of said row electrodes and column electrodes, a second conductor connected to one of said pixel electrodes and a non-linear resistance layer formed between said first and second conductors, said non-linear resistance layer being made of an amorphous Si base material which has a hydrogen component of O or less than 1%; an electro-optical material layer between said first and second substrates; and a polarizing member.
Claim 20
Dependent Claim
24 words
A method of producing an electro-optical device as claimed in claim 14, wherein the amorphous Si as a base material is deposited by sputtering.
Claim 21
Independent Claim
136 words
A method of producing an electro-optical device having a first substrate providing one of a plurality of row electrodes and a plurality of column electrodes on the inner surface thereof; a second substrate providing the other of said row electrodes and column electrodes, pixel electrodes and non-linear resistance elements on its inner surface, each of said non-linear resistance elements including a first conductor connected to a line of the other of said row electrodes and column electrodes, a second conductor connected to one of said pixel electrodes and a non-linear resistance layer formed between said first and second conductors, said non-linear resistance layer being made of an amorphous material of Si base material and another ingredient, the amorphous material is deposited by reactive sputtering using a target of silicon and a gas containing said another ingredient.
Claim 22
Independent Claim
136 words
A method of producing an electro-optical device having a first substrate providing one of a plurality of row electrodes and a plurality of column electrodes on the inner surface thereof; a second substrate providing the other of said row electrodes and column electrodes, pixel electrodes and non-linear resistance elements on its inner surface, each of said non-linear resistance elements including a first conductor connected to a line of the other of said row electrodes and column electrodes, a second conductor connected to one of said pixel electrodes and a non-linear resistance layer formed between said first and second conductors, said non-linear resistance layer being made of an amorphous material of Si base material and another ingredient, the amorphous material is deposited by reactive sputtering using a target of silicon and a gas containing said another ingredient.
References Cited (Backward Citations)
No citation records indexed.
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