EP0333326A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Position detecting method and apparatus
Assignee: Canon Inc
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Filing: 1989-02-16
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Granted: —
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Expires: 2009-02-16
Abstract
Abstract A method and device, usable in an exposure apparatus for transferring a pattern formed on one of first and second objects onto the other, for detecting the relative position of the first and second objects is disclosed. In one aspect, a position detecting device has a light source portion (10, 11) effective to project light upon a first physical optic element (3a) of the first object (1) held by the holder, wherein the projected light is converged or diverged by the first physical optic element and impinges upon a second physical optic element (4a) of the second object (2). Light detecting portion (8) detects the light converged or diverged by the second physical optic element, the light detecting portion being adapted to detect the light having been influenced by a convex-lens action by one of the first and second physical optic elements and having been influenced by a concave-lens function by the other. Position detecting portion detects the relative position of the first and second objects on the basis of the detection by the light detecting portion.
Inventors
- 👤 Kenji Saitoh
- 👤 Masakazu Matsugu
- 👤 Yukichi Niwa
- 👤 Noriyuki Nose
- 👤 Minoru Yoshii
- 👤 Shigeyuki Suda
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-31 16:52
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7049
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
199 words
A method usable in a proximity exposure apparatus for transferring a pattern provided on one of first and second objects onto the other, for detecting the relative position of the first and second objects, said method comprising: a first step for providing on the first object a first physical optic element having a lens function; a second step for providing on the second object a second physical optic element having a lens function; a third step for irradiating the first physical optic element with light, the light irradiating the first physical optic element being influenced by the first physical optic element to be converged or diverged and the converging or diverging light entering the second physical optic element; a fourth step for detecting light having been incident on the second physical optic element and having been influenced thereby to be converged or diverged, the detected light having been influenced by a convex-lens function by one of the first and second physical optic elements and having been influenced by a concave lens function by the other; and a fifth step for detecting the relative position of the first and second objects, on the basis of the detection of the light.
Claim 2
Independent Claim
199 words
A method usable in a proximity exposure apparatus for transferring a pattern provided on one of first and second objects onto the other, for detecting the relative position of the first and second objects, said method comprising: a first step for providing on the first object a first physical optic element having a lens function; a second step for providing on the second object a second physical optic element having a lens function; a third step for irradiating the first physical optic element with light, the light irradiating the first physical optic element being influenced by the first physical optic element to be converged or diverged and the converging or diverging light entering the second physical optic element; a fourth step for detecting light having been incident on the second physical optic element and having been influenced thereby to be converged or diverged, the detected light having been influenced by a convex-lens function by one of the first and second physical optic elements and having been influenced by a concave lens function by the other; and a fifth step for detecting the relative position of the first and second objects, on the basis of the detection of the light.
Claim 3
Dependent Claim
41 words
A method according to Claim 1, wherein the detected light is one having been influenced by a convex lens function by the first physical optic element and having been influenced by a concave lens function by the second physical optic element.
Claim 4
Dependent Claim
41 words
A method according to Claim 1, wherein the detected light is one having been influenced by a concave lens function by the first physical optic element and having been influenced by a concave lens function by the second physical optic element.
Claim 5
Dependent Claim
23 words
A method according to Claim 1, wherein at least one of the first and second physical optic element comprises a Fresnel zone plate.
Claim 6
Dependent Claim
22 words
A method according to Claim 1, wherein at least one of the first and second physical optic elements comprises a concave-surface mirror.
Claim 7
Independent Claim
214 words
A device, usable in a proximity exposure apparatus for transferring a pattern formed on one of first and second objects onto the other, for detecting the relative position of the first and second objects in cooperation with first and second physical optic elements provided on the first and second objects, respectively, wherein each physical optic element has a lens function, said device comprising: a holder for holding the first and second objects in proximity to each other; light source means effective to project light upon the first physical optic element of the first object held by said holder, wherein the projected light is converged or diverged by the first physical optic element and impinges upon the second physical optic element of the second object held by said holder; light detecting means for detecting the light converged or diverged as a result of the impingement upon the second physical optic element, said light detecting means being adapted to detect the light having been influenced by a convex-lens action by one of the first and second physical optic elements and having been influenced by a concave-lens function by the other; and position detecting means for detecting the relative position of the first and second objects on the basis of the detection by said light detecting means.
Claim 8
Independent Claim
214 words
A device, usable in a proximity exposure apparatus for transferring a pattern formed on one of first and second objects onto the other, for detecting the relative position of the first and second objects in cooperation with first and second physical optic elements provided on the first and second objects, respectively, wherein each physical optic element has a lens function, said device comprising: a holder for holding the first and second objects in proximity to each other; light source means effective to project light upon the first physical optic element of the first object held by said holder, wherein the projected light is converged or diverged by the first physical optic element and impinges upon the second physical optic element of the second object held by said holder; light detecting means for detecting the light converged or diverged as a result of the impingement upon the second physical optic element, said light detecting means being adapted to detect the light having been influenced by a convex-lens action by one of the first and second physical optic elements and having been influenced by a concave-lens function by the other; and position detecting means for detecting the relative position of the first and second objects on the basis of the detection by said light detecting means.
Claim 9
Dependent Claim
43 words
A device according to Claim 6, wherein said light detecting means detects a light having been influenced by a convex lens function by the first physical optic element and having been influenced by a concave lens function by the second physical optic element.
Claim 10
Dependent Claim
43 words
A device according to Claim 6, wherein said light detecting means detects a light having been influenced by a concave lens function by the first physical optic element and having been influenced by a concave lens function by the second physical optic element.
Claim 11
Dependent Claim
100 words
A device according to Claim 6, wherein displacement of light upon said light-receiving surface has a magnification with respect to the amount of relative movement of the first and second objects, which magnification satisfies a relationship: = b₂/(d-b₁) + 1 where b₁ is the distance to the first object from a point of convergence or an origin of divergence of light emanating from the first physical optic element, b₂ is the distance from the second object to the light-receiving surface of said light detecting means, and d is the interval between the first and second objects held by said holder.
Claim 12
Dependent Claim
16 words
A device according to Claim 6, wherein each physical optic element comprises a Fresnel zone plate.
Claim 13
Independent Claim
177 words
A method of detecting a relative position of first and second objects, said method comprising: a first step for providing in a portion of the first object a first physical optic element having a lens function; a second step for providing in a portion of the second object a second physical optic element having a lens function; a third step for placing the first and second objects so that they are opposed to each other with a predetermined optical system interposed therebetween; a fourth step for projecting a light upon the first physical optic element, wherein the projected light is converged or diverged by the first physical optic element and the predetermined optical system and is projected upon the second physical optic element; a fifth step for detecting a portion of the light incident on the second physical optical element which portion is converged or diverged by the second physical optic element; and a sixth step for detecting the relative position of the first and second objects on the basis of the detection at the fifth step.
Claim 14
Independent Claim
177 words
A method of detecting a relative position of first and second objects, said method comprising: a first step for providing in a portion of the first object a first physical optic element having a lens function; a second step for providing in a portion of the second object a second physical optic element having a lens function; a third step for placing the first and second objects so that they are opposed to each other with a predetermined optical system interposed therebetween; a fourth step for projecting a light upon the first physical optic element, wherein the projected light is converged or diverged by the first physical optic element and the predetermined optical system and is projected upon the second physical optic element; a fifth step for detecting a portion of the light incident on the second physical optical element which portion is converged or diverged by the second physical optic element; and a sixth step for detecting the relative position of the first and second objects on the basis of the detection at the fifth step.
Claim 15
Dependent Claim
65 words
A method according to Claim 11, wherein at the fifth step detection is made to the position of a point image which is formed by the second physical optic element at such position spaced from the second physical optic element by a distance larger than a distance to a point image to be formed by the first physical optic element and the predetermined optical system.
Claim 16
Dependent Claim
22 words
A method according to Claim 11, wherein at the first step a minute opening is provided as the first physical optic element.
Claim 17
Independent Claim
147 words
An apparatus for detecting a relative position of a first object, including a first physical optic element having a lens function, and a second object including a second physical optic element having a lens function, said apparatus comprising: an optical system disposed to be placed between the first and second objects; light source means for projecting a light upon the first physical optic element, wherein the light projected by said light source means is converged or diverged by the first physical optic element and is directed through said optical system to the second physical optic means; and detecting means for detecting a portion of the light incident on the second physical optic element, which portion is converged or diverged by the second physical optic means, wherein the relative position of the first and second objects is detected on the basis of the detection by said detecting means.
Claim 18
Independent Claim
147 words
An apparatus for detecting a relative position of a first object, including a first physical optic element having a lens function, and a second object including a second physical optic element having a lens function, said apparatus comprising: an optical system disposed to be placed between the first and second objects; light source means for projecting a light upon the first physical optic element, wherein the light projected by said light source means is converged or diverged by the first physical optic element and is directed through said optical system to the second physical optic means; and detecting means for detecting a portion of the light incident on the second physical optic element, which portion is converged or diverged by the second physical optic means, wherein the relative position of the first and second objects is detected on the basis of the detection by said detecting means.
Claim 19
Dependent Claim
59 words
An apparatus according to Claim 14, wherein said detecting means detects the position of a point image as formed by the second physical optic element at such position spaced from the second physical optic element by a distance larger than a distance to a point image to be formed by the first physical optic means and said optical system.
Claim 20
Independent Claim
102 words
A method of determining alignment of first and second objects, wherein radiation is projected onto a first optical element provided with the first object, the radiation is directed by the first optical element onto a second optical element provided with the second object, and the radiation is directed by the second optical element onto a detector so that the position of incidence of radiation on the detector varies with variations in alignment of the first and second objects, the optical elements being such that the variation in the position of incidence on the detector is magnified compared with the variation in alignment.
Claim 21
Independent Claim
102 words
A method of determining alignment of first and second objects, wherein radiation is projected onto a first optical element provided with the first object, the radiation is directed by the first optical element onto a second optical element provided with the second object, and the radiation is directed by the second optical element onto a detector so that the position of incidence of radiation on the detector varies with variations in alignment of the first and second objects, the optical elements being such that the variation in the position of incidence on the detector is magnified compared with the variation in alignment.
References Cited (Backward Citations)
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