Patent US961152A successfully refreshed from Google Patents.
EP0332356A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Supply of carbon dioxide
Assignee: Osaka Oxygen Industries Ltd
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Filing: 1989-03-03
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Granted: —
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Expires: 2009-03-03
Abstract
Abstract Liquid carbon dioxide is vaporised (in 2) and a stream of the resulting CO2 gas is filtered (in 3) to remove particles therefrom. The filtered stream is reliquefied (in 4) and the thus formed liquid stream is then used, for example, to clean a 'wafer' of semi-conducting material.
Inventors
- 👤 Moriya Kozo
- 👤 Tadashi Ohkatsu
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-31 06:50
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/10; B; B08; B08B; B08B7/00; B08B7/0064; B08B7/0092; F; F17; F17C; F17C7/00; F17C7/02; H10P70/15; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; H10P72/0411; H10P72/0414; F17C2205/00; F17C2205/03; F17C2205/0302; F17C2205/0341; F17C2221/00; F17C2221/01; F17C2221/013; F17C2223/00; F17C2223/01; F17C2223/0146; F17C2223/0153; F17C2223/0161; F17C2223/03; F17C2223/033; F17C2223/04; F17C2223/042; F17C2223/046; F17C2223/047; F17C2225/00; F17C2225/01; F17C2225/0146; F17C2225/0153; F17C2225/04; F17C2225/042; F17C2225/043; F17C2225/044; F17C2227/00; F17C2227/03; F17C2227/0302; F17C2227/0304; F17C2227/0337; F17C2227/0341; F17C2227/0367; F17C2227/0388; F17C2227/039; F17C2265/00; F17C2265/01; F17C2265/012
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
55 words
A method of supplying liquefied CO₂ comprising the steps of: (a) vaporising liquefied CO₂; (b) passing a stream of the resulting CO₂ gas through a filter to remove particles therefrom; (c) reliquefying the said stream of CO₂ gas by cooling; and (d) passing the reliquefied stream to a location where it is to be used.
Claim 2
Independent Claim
55 words
A method of supplying liquefied CO₂ comprising the steps of: (a) vaporising liquefied CO₂; (b) passing a stream of the resulting CO₂ gas through a filter to remove particles therefrom; (c) reliquefying the said stream of CO₂ gas by cooling; and (d) passing the reliquefied stream to a location where it is to be used.
Claim 3
Dependent Claim
16 words
A method according to claim 1, in which the reliquefied stream issued to clean a substrate.
Claim 4
Dependent Claim
43 words
A method according to claim 2, wherein the stream of reliquefied CO₂ is passed out of a nozzle in the form of a jet so as to blow CO₂ gas and/or liquefied CO₂ containing dry ice snow over the surface of the substrate.
Claim 5
Dependent Claim
15 words
A method according to claim 3, wherein the substrate is held in a nitrogen atmosphere.
Claim 6
Dependent Claim
14 words
A method according to claim 3 or claim 4, wherein the substrate is heated.
Claim 7
Independent Claim
36 words
A method of supplying liquefied CO₂, inlcuding filtering a stream of gaseous carbon dioxide to remove particles therefrom, liquefying the filtered stream, and passing the resulting liquefied stream to a location where is to be used.
Claim 8
Independent Claim
36 words
A method of supplying liquefied CO₂, inlcuding filtering a stream of gaseous carbon dioxide to remove particles therefrom, liquefying the filtered stream, and passing the resulting liquefied stream to a location where is to be used.
Claim 9
Dependent Claim
20 words
A method according to claim 6, in which the liquefied stream is used to clean a surface of a substrate.
References Cited (Backward Citations)
No citation records indexed.
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