EP0331338B1
Expired / Lapsed
EP
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Subassemblies for optoelectronic hybrid integrated circuits
Assignee: AT&T Inc
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Filing: 1989-02-22
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Granted: 1994-09-14
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Expires: 2009-02-22
Abstract
No abstract record available.
Inventors
- 👤 Greg E. Blonder
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 01:14
CPC Classifications
H; H10; H10F; H10F55/00; G; G02; G02B; G02B6/00; G02B6/24; G02B6/26; G02B6/30; G02B6/42; G02B6/4201; G02B6/4204; H10W; H10W90/00
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
98 words
An optoelectronic integrated circuit subassembly comprising a single-crystal semiconductor base (10) having a major surface (12) with an insulative layer (12) thereon, optical waveguides (14,22,26) integrally formed on said surface, at least two optoelectronic chips (16,24,28) mounted on said base and optically coupled to said waveguides, said chips being physically separated from one another, characterized by a single-crystal semiconductor lid (70) on said base, said lid including at least two physically separate cavities (72,74) for receiving said chips, said cavities being separated by material (77) in said lid which electrically and optically isolates said chips from one another.
Claim 2
Dependent Claim
52 words
The subassembly of claim 1, wherein said lid is hermetically sealed to said base and at least one of said waveguides extends from under said lid to the exterior thereof and further including means (50,78,76) exterior to said lid for coupling said at least one waveguide (14) to an optical fiber (18).
Claim 3
Dependent Claim
47 words
The subassembly of claim 1, wherein said lid has a dimension measured parallel to said surface which is less than the corresponding dimension of said base and further including electrical contacts (73,75) on said base which extend from said chips under said lid to the exterior thereof.
Claim 4
Dependent Claim
22 words
The subassembly of claim 1, wherein parallel edges of said base or said lid include grooves adapted to receive guide rods (90).
Claim 5
Dependent Claim
83 words
The subassembly of claim 1 wherein said waveguides include a transmission waveguide (14) and a secondary waveguide forming a pair of optical couplers (22,26) thereto, said chips include a receiver photodetector (24) optically connected to one (22) of said couplers, a monitor photodetector (28) optically coupled to another (26) of said couplers and further including a laser diode (16) coupled to one end of said transmission waveguide, and further including fiber alignment means (50,78) disposed at the other end of said transmission waveguide.
Claim 6
Dependent Claim
84 words
The subassembly of claim 1, wherein one of said chips comprises a laser diode (16) optically coupled to one end of a transmission waveguide (14) and further including a coupler (20) for extracting a fraction of the light coupled from said laser diode into said transmission waveguide, and means (23) for redirecting the light in said coupler to a test point (25) where light emanates upwardly from said base, thereby to enable the alignment of the laser to the transmission waveguide to be monitored.
Claim 7
Dependent Claim
61 words
The subassembly of claim 1, wherein the major surface of the base comprises a groove axially aligned with one of said waveguides, and one of said chips comprises a semiconductor laser diode having a mesa (19) formed thereon and an active region, said mesa being disposed in said groove (21) so as to align said active region with said waveguide (14).
Claim 8
Dependent Claim
36 words
The subassembly of claim 7 wherein said laser has opposing major surfaces, said mesa is disposed on one of said major surfaces, and metalization having an aperture (23) therein is disposed on said opposing major surface.
Claim 9
Dependent Claim
83 words
The subassembly of claim 1, wherein at least one of said waveguides (80) extends from under said lid to the exterior thereof, and further including means (50,78) exterior to said lid for coupling said at least one waveguide to an optical fiber, said lid having a dimension measured parallel to said surface which is less than the corresponding dimension of said base and further including electrical contacts (73,75) on said base which extend from said chips under said lid to the exterior thereof.
Claim 10
Dependent Claim
66 words
The subassembly of claim 9, wherein said waveguides include a transmission waveguide (14) and a secondary waveguide forming a pair (22,26) of optical couplers thereto, and said chips include a receiver photodetector (24) optically connected to one of said couplers, a monitor photodetector (28) optically coupled to another of said couplers, and further including a laser diode (16) coupled to one end of said transmission waveguide.
Claim 11
Dependent Claim
63 words
The subassembly of claim 10 wherein said base has a major surface (12) in which a groove (21) is formed, one of said waveguides (14) is axially aligned with said groove, and said laser has a mesa (19) formed thereon and an active region, said mesa being disposed in said groove (21) so as to align said active region with said one waveguide.
Claim 12
Dependent Claim
36 words
The subassembly of claim 9 wherein said base has a pair of parallel edges and a V-groove formed in each of said edges, so that guide rods (90) for said subassembly are positionable in said grooves.
Claim 13
Dependent Claim
65 words
The subassembly of claim 9 wherein said base has a pair of parallel edges, and said coupling means includes a single-crystal silicon fixture mounted at one end of said base, said fixture having a pair of edges parallel to those of said base, said edges having oblique surfaces therein forming parallel V-grooves, so that guide rods (90) for said subassembly are positionable in said grooves.
References Cited (Backward Citations)
WO1987002474A1
Cited
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