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EP0331289A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Semiconductor device with impedance matching means

Assignee: Hitachi Ltd
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Filing: 1989-02-01
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Granted: —
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Expires: 2009-02-01
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Abstract

Abstract The operation rate achievable in a high speed LSI is increasing year by year, but has the problem of causing reflection or loss of signal due to mismatching of impedance in the device. It is proposed to achieve impendance matching with the inpackage transmission line in order to prevent mismatching of impendance. In a semiconductor device, a signal wire (5) extends in a direction perpendicular to the main surface of a semiconductor chip (1). A plurality of constant voltage wires (6, 7) are provided around the signal wire to give the effect of a coaxial cable. Hence, by adjusting the relationship between the signal wire (5) and the constant voltage wires (6, 7), the impedance may be adjusted. The central region of a metal cap (8) encapsulating the package is formed thicker than the peripheral part thereof. A low-pass filter may also be connected to the transmission line and a bonding wire is also added to this filter.

Inventors

  • 👤 Chiyoshi Kamada

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-04 05:12
CPC Classifications
H; H10; H10W; H10W44/00; H10W44/20; H10W42/00; H10W42/20; H10W42/261; H10W42/276; H10W44/203; H10W44/209; H10W70/00; H10W70/60; H10W70/67; H10W70/68; H10W70/682; H10W72/00; H10W72/50; H10W72/541; H10W72/5449; H10W72/547; H10W72/5475; H10W72/551; H10W72/552; H10W72/5522; H10W72/5524; H10W72/59; H10W72/851; H10W72/874; H10W72/884; H10W72/90; H10W72/931; H10W72/932; H10W90/00; H10W90/701; H10W90/731; H10W90/734; H10W90/751; H10W90/754

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 116 words
A semiconductor device comprising: a semiconductor chip on the main surface of which are circuitry and external terminals, a substrate having a metal film at a region to which the semiconductor chip is secured, a plurality of wires for electrically connecting the external terminals and a plurality of conductors, a plurality of first wiring conductors within the substrate and extending in a direction generally perpendicular to the main surface of the semiconductor chip with one end thereof being connected to the conductor, second wiring conductors within the substrate, the second wiring conductors being spaced apart around respective ones of the first wiring conductors, and a metal cap encapsulating the semiconductor chip, wires, metal film and conductors.
Claim 2
Dependent Claim 116 words
A semiconductor device comprising: a semiconductor chip on the main surface of which are circuitry and external terminals, a substrate having a metal film at a region to which the semiconductor chip is secured, a plurality of wires for electrically connecting the external terminals and a plurality of conductors, a plurality of first wiring conductors within the substrate and extending in a direction generally perpendicular to the main surface of the semiconductor chip with one end thereof being connected to the conductor, second wiring conductors within the substrate, the second wiring conductors being spaced apart around respective ones of the first wiring conductors, and a metal cap encapsulating the semiconductor chip, wires, metal film and conductors.
Claim 3
Dependent Claim 22 words
A semiconductor device according to claim 1, wherein the central region of the metal cap is thicker than the peripheral part thereof.
Claim 4
Dependent Claim 26 words
A semiconductor device according to claim 1 or claim 2, wherein the metal film is a tungsten (W) film plated with nickel (Ni) and gold (Au).
Claim 5
Dependent Claim 21 words
A semiconductor device according to any one of the preceding claims, wherein the plurality of conductors are of tungsten (W) film.
Claim 6
Dependent Claim 23 words
A semiconductor device according to any one of the preceding claims, wherein the first and second wiring conductors are mainly of tungsten (W).
Claim 7
Dependent Claim 27 words
A semiconductor device according to any one of the preceding claims, wherein at least one of the second wiring conductors is at the outside of the substrate.
Claim 8
Dependent Claim 20 words
A semiconductor device according to any one of the preceding claims, wherein the first wiring conductors are column type conductors.
Claim 9
Dependent Claim 28 words
A semiconductor device according to any one of the preceding claims, wherein the first and second wiring conductors and a part of the metal film are substantially parallel.
Claim 10
Dependent Claim 28 words
A semiconductor device according to any one of the preceding claims, wherein there is a Chebyshev type filter connected to at least one of the first wiring conductors.
Claim 11
Dependent Claim 18 words
A semiconductor device according to claim 9, wherein there is a wire connected to the Chebychev type filter.
Claim 12
Dependent Claim 19 words
A semiconductor device according to claim 9 or claim 10, wherein the Chebychev type filter is of tungsten film.

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