EP0331282A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Membrane-based IC test probe with precisely positioned contacts
Assignee: HP Inc
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Filing: 1989-01-25
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Granted: —
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Expires: 2009-01-25
Abstract
Abstract A membrane-based test probe for testing integrated circuit dies includes a membrane bearing die contacts and leads, a carrier for the membrane, and a translation stage. The translation stage is used to protrude an inner region of the membrane so that it can contact a die without interference due to outer regions of the membrane contacting other dies on the wafer. To limit relative displacement of the contacts during protrusion of the membrane by the translation stage, the translation stage is glued to the membrane at an annular region enclosing the inner region on which the contacts lie. In addition, a rectangular pattern formed within a central region enclosed by the inner region further constrains relative contact movement. Precompensation, involving positioning the contacts more closely together than ultimately desired prior to protrusion so that upon protrusion they assume the desired positions, supplements the foregoing techniques for superior control over contact positioning.
Inventors
- 👤 Jack D. Foster
- 👤 Michael Greenstein
- 👤 Richard Huff
- 👤 Brian C. Leslie
- 👤 Farid Matta
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-02 23:46
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R1/0735
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
121 words
A device comprising: a membrane including an enclosed region, an annular region, an outer region and a peripheral region in radially outward succession; electrical elements formed on said membrane, said electrical elements including contacts located within said enclosed regions and leads extending from respective ones of said contacts radially outward through said annular region; a frame bonded to said membrane at said peripheral region; a translation stage bonded at said annular region of said membrane and enclosing said enclosed region; said holding means for holding said translation stage in a predetermined position relative to said frame means in a direction perpendicular to said enclosed region so that said enclosed region is deformed to a substantially lesser extent than said outer region.
Claim 2
Independent Claim
121 words
A device comprising: a membrane including an enclosed region, an annular region, an outer region and a peripheral region in radially outward succession; electrical elements formed on said membrane, said electrical elements including contacts located within said enclosed regions and leads extending from respective ones of said contacts radially outward through said annular region; a frame bonded to said membrane at said peripheral region; a translation stage bonded at said annular region of said membrane and enclosing said enclosed region; said holding means for holding said translation stage in a predetermined position relative to said frame means in a direction perpendicular to said enclosed region so that said enclosed region is deformed to a substantially lesser extent than said outer region.
Claim 3
Dependent Claim
50 words
The device of Claim 1 further comprising a central pattern formed on a central subregion of said enclosed region, said membrane having greater elasticity then said central pattern so that when said translation stage is moved relative to said frame, said contacts do not move significantly relative to each other.
Claim 4
Dependent Claim
17 words
The device of Claim 2 wherein said central pattern includes a pair of capacitively coupled electrical elements.
Claim 5
Dependent Claim
22 words
The device of Claim 1 further comprising a lens means situated within said translation stage and in contact with said central region.
Claim 6
Dependent Claim
14 words
The device of Claim 4 further comprising a window disposed on said lens means.
Claim 7
Independent Claim
142 words
A method comprising: obtaining a membrane having a central region, an inner region, an annular region, an outer region and a peripheral region in radially outward succession, said regions being mutually exclusive except for common boundaries; disposing said membrane in a planar configuration including all of said regions; forming on said membrane contacts and leads so that said leads are electrically coupled to and extending radially outward from respective of said contacts, said contacts being formed on said inner region; attaching a frame to said peripheral region of said membrane; bonding a translation stage to said annular region of said membrane; and moving said translation stage orthogonally with respect to said central region and relative to said frame so the extent of deformation of said membrane in said outer region substantially exceeds the extent of deformation in said central and inner regions.
Claim 8
Independent Claim
142 words
A method comprising: obtaining a membrane having a central region, an inner region, an annular region, an outer region and a peripheral region in radially outward succession, said regions being mutually exclusive except for common boundaries; disposing said membrane in a planar configuration including all of said regions; forming on said membrane contacts and leads so that said leads are electrically coupled to and extending radially outward from respective of said contacts, said contacts being formed on said inner region; attaching a frame to said peripheral region of said membrane; bonding a translation stage to said annular region of said membrane; and moving said translation stage orthogonally with respect to said central region and relative to said frame so the extent of deformation of said membrane in said outer region substantially exceeds the extent of deformation in said central and inner regions.
Claim 9
Dependent Claim
29 words
The method of Claim 6 further comprising a step of inserting a lens means in said translation stage and pressing said lens means against said central and inner regions.
Claim 10
Dependent Claim
42 words
The method of Claim 7 wherein said forming step further includes forming a pattern within said central region using a material of lesser elasticity than said membrane so that said pattern constrains the relative movement of said contacts during said moving step.
Claim 11
Dependent Claim
34 words
The method of Claim 8 further comprising a compensating step of determining the positions required for positioning said contacts during said forming step so that said contacts attain predetermined positions after said moving step.
Claim 12
Dependent Claim
16 words
The method of Claim 8 wherein said pattern is formed of two capacitively coupled electrical elements.
References Cited (Backward Citations)
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