EP0331148A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Microscope apparatus
Assignee: Toshiba Corp
•
Filing: 1989-03-01
•
Granted: —
•
Expires: 2009-03-01
Abstract
Abstract A microscope apparatus includes a microscope body (10) having a mounting section (18). An observation unit (20) is removably fitted to the mounting section, and includes an objective lens unit (30) and a tip unit (32). The lens unit has an objective lens (36) opposed to an observation surface (28a) and forms an optical image of the surface viewable through the mircroscope body. The tip unit includes a support member (42) attached to the mounting section, and a glass plate (48) supported by the support member to be located between the objective lens and the observation surface. A fine conductive tip (38) is fixed to the glass plate and extends therefrom toward the observation surface, in the direction of an optical axis of the objective lens. A piezoelectric section (40) for shifting the glass plate is fixed to the support member.
Inventors
- 👤 Masakazu Hayashi
- 👤 Fumihiko Ishida
- 👤 Junzou Utida
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-27 08:39
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/18; G01Q60/22; B; B82; B82Y; B82Y20/00; B82Y35/00; G01Q10/00; G01Q10/04; G01Q30/00; G01Q30/02; G01Q30/025; G01Q60/02; G01Q60/10; G01Q60/16; G01Q70/00; G01Q70/02; G02; G02B; G02B21/00; G02B21/0004; G02B21/002; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/861; Y10S977/868; Y10S977/869
Claims Analysis
Total Claims: 43
Claim 1
Independent Claim
146 words
An apparatus for observing an observation surface of a sample by utilizing the tunnel effect, comprising: a fine conductive tip; shift means for shifting the tip and the sample relative to each other; means for applying a voltage between the sample and the tip so that a fine tunnel current flows between the sample and the tip; and means for measuring the fine tunnel current while the sample and the tip shift are shifted relative to each other; characterized by further comprising: a microscope body (10); objective optical means attached to the body and including an objective lens (36) facing the observation surface (28a), for forming an optical image of the observation surface viewable through the body; and support means for supporting the tip (38) substantially parallel to an optical axis of the objective lens, within a region between the objective lens and the observation surface.
Claim 2
Independent Claim
146 words
An apparatus for observing an observation surface of a sample by utilizing the tunnel effect, comprising: a fine conductive tip; shift means for shifting the tip and the sample relative to each other; means for applying a voltage between the sample and the tip so that a fine tunnel current flows between the sample and the tip; and means for measuring the fine tunnel current while the sample and the tip shift are shifted relative to each other; characterized by further comprising: a microscope body (10); objective optical means attached to the body and including an objective lens (36) facing the observation surface (28a), for forming an optical image of the observation surface viewable through the body; and support means for supporting the tip (38) substantially parallel to an optical axis of the objective lens, within a region between the objective lens and the observation surface.
Claim 3
Dependent Claim
57 words
An apparatus according to claim 1, characterized in that said support means includes a light transmitting member (48, 66) located between the sample (28) and the objective lens (36) so as to face the objective lens, and said tip (38) is fixed to the light transmitting member so as to extend therefrom toward the observation surface (28a).
Claim 4
Dependent Claim
23 words
An apparatus according to claim 2, characterized in that said tip (38) is eccentric with the optical axis of the objective lens (36).
Claim 5
Dependent Claim
23 words
An apparatus according to claim 2, characterized in that said tip (38) is eccentric to the optical axis of the objective lens (36).
Claim 6
Dependent Claim
32 words
An apparatus according to claim 2, characterized in that said light transmitting member (48, 66) includes a glass plate situated at right angles to the optical axis of the objective lens (36).
Claim 7
Dependent Claim
26 words
An apparatus according to claim 2, characterized in that said tip (38) has a proximal end portion fixedly inserted in the light transmitting member (48, 66).
Claim 8
Dependent Claim
49 words
An apparatus according to claim 2, characterized in that said support means includes a substantially cylindrical support member (42, 68) surrounding the objective lens (36), the support member having one end portion attached to the body (10) and the other end portion supporting the light transmitting member (48, 66).
Claim 9
Dependent Claim
33 words
An apparatus according to claim 7, characterized in that said support member (68) includes means for adjusting the position of the tip (38) relative to the optical axis of the objective lens (36).
Claim 10
Dependent Claim
55 words
An apparatus according to claim 8, characterized in that said adjusting means includes a plurality of adjusting screws (70) used to fix the light transmitting member (66) to the support member (68), each of said screws being threaded into the support member, in a direction perpendicular to the optical axis of the objective lens (36).
Claim 11
Dependent Claim
35 words
An apparatus according to claim 7, characterized in that said support member (42, 68) is removably attached to the body (10), for movement in the direction of the optical axis of the objective lens (36).
Claim 12
Dependent Claim
60 words
An apparatus according to claim 10, characterized in that said body (10) includes a mounting section (18), on which the optical means (35) is mounted, and a first screw portion (18a) formed on the mounting section, and said support member (42) includes a second screw portion (44) formed on said one end portion thereof and engaging the first screw portion.
Claim 13
Dependent Claim
36 words
An apparatus according to claim 7, characterized in that said shift means includes a piezoelectric section (40) attached to the support member (42) and shiftable in a predetermined direction, integral with the light transmitting member (48).
Claim 14
Dependent Claim
66 words
An apparatus according to claim 12, characterized in that said piezoelectric section (40) is shiftable in the direction of the optical axis of the objective lens (36), a first direction perpendicular to the optical axis, and a second direction perpendicular to the optical axis and the first direction, and said shift means includes second voltage applying means for applying a predetermined voltage to the piezoelectric section.
Claim 15
Dependent Claim
77 words
An apparatus according to claim 12, characterized in that said piezoelectric section (40) is shiftable in the direction of the optical axis of the objective lens (36), and said shift means includes second voltage applying means for applying a predetermined voltage to the piezoelectric section and a drive mechanism (62) for shifting the sample (28) in a first direction perpendicular to the optical axis and a second direction perpendicular to the optical axis and the first direction.
Claim 16
Dependent Claim
55 words
An apparatus according to claim 12, characterized in that said support member (42) includes a first portion (42a) attached to the body (10) and a second portion (42a) supporting the light transmitting member (48), and said piezoelectric section (40) is fixed between the first and second portions so as to surround the optical means (35).
Claim 17
Dependent Claim
52 words
An apparatus according to claim 11, characterized in that said body (10) includes a body tube (12) having the mounting section (18), and a substantially cylindrical lens holder (34) containing the optical means (35) therein and removably mounted on the mounting section, the lens holder being passed through the support member (42).
Claim 18
Dependent Claim
59 words
An apparatus according to claim 7, characterized in that said body (10) includes a body tube (12) having a mounting section (18), and a substantially cylindrical lens holder (34) containing the optical means (35) therein and removably mounted on the mounting section, and said one end portion of the support member (68) is removably attached to the lens holder.
Claim 19
Dependent Claim
36 words
An apparatus according to claim 17, characterized in that said shift means includes a piezoelectric section (40) attached to the lens holder (34) and shiftable in a predetermined direction, integral with the light transmitting member (66).
Claim 20
Dependent Claim
34 words
An apparatus according to claim 1, characterized in that said tip (38) is fixed to the objective lens (36) and extends therefrom toward the sample (28), and said objective lens constitutes the support means.
Claim 21
Dependent Claim
23 words
An apparatus according to claim 19, characterized in that said tip (38) is coaxial with the optical axis of the objective lens (38).
Claim 22
Dependent Claim
60 words
An apparatus according to claim 19, characterized in that said objective lens (38) has a surface which opposes to the sample (28) and on which an electrically conductive film (64) is formed, and said tip (38) is fixed to the objective lens through the conductive film, and is connected to the voltage applying means by means of the conductive film.
Claim 23
Dependent Claim
47 words
An apparatus according to claim 19, characterized in that said objective lens (36) has a through hole (36a) extending in the direction of the optical axis thereof, and said tip (38) has a proximal end portion passed through the through hole and fixed to the objective lens.
Claim 24
Dependent Claim
54 words
An apparatus according to claim 19, characterized in that said optical means (35) includes a lens holder (34) holding the objective lens (36) and mounted on the body (10), and said shift means includes a piezoelectric section (40) fixed to the lens holder and shiftable in a predetermined direction, integral with the objective lens.
Claim 25
Dependent Claim
66 words
An apparatus according to claim 23, characterized in that said piezoelectric section (40) is shiftable in the direction of the optical axis of the objective lens (36), a first direction perpendicular to the optical axis, and a second direction perpendicular to the optical axis and the first direction, and said shift means includes second voltage applying means for applying a predetermined voltage to the piezoelectric section.
Claim 26
Dependent Claim
19 words
An apparatus according to claim 23, characterized in that said lens holder (34) is removably mounted on the body.
Claim 27
Independent Claim
197 words
An apparatus for observing an observation surface of a sample by utilizing the tunnel effect, comprising: a tip unit including a fine conductive tip, and shift means for shifting the tip in a predetermined direction; and means for applying a voltage between the sample and the tip so that a fine tunnel current flows between the sample and the tip; characterized in that: said apparatus further includes an objective lens unit (30) removably mounted on a mounting section (18) of an optical microscope (10), which is designed to be fitted with objective optical means, the lens unit having an optical system (35) which includes an objective lens (36) opposed to the observation surface (28a) and is designed to form an optical image of the observation surface viewable through the optical microscope; and said tip unit (32) is removably mounted on the mounting section (18) and surrounds the objective lens unit, the tip unit including a light transmitting member (48) located between the objective lens and the observation surface, and siad tip (38) being fixed to the light transmitting member and extending therefrom toward the observation surface, in the direction of an optical axis of the objective lens.
Claim 28
Independent Claim
197 words
An apparatus for observing an observation surface of a sample by utilizing the tunnel effect, comprising: a tip unit including a fine conductive tip, and shift means for shifting the tip in a predetermined direction; and means for applying a voltage between the sample and the tip so that a fine tunnel current flows between the sample and the tip; characterized in that: said apparatus further includes an objective lens unit (30) removably mounted on a mounting section (18) of an optical microscope (10), which is designed to be fitted with objective optical means, the lens unit having an optical system (35) which includes an objective lens (36) opposed to the observation surface (28a) and is designed to form an optical image of the observation surface viewable through the optical microscope; and said tip unit (32) is removably mounted on the mounting section (18) and surrounds the objective lens unit, the tip unit including a light transmitting member (48) located between the objective lens and the observation surface, and siad tip (38) being fixed to the light transmitting member and extending therefrom toward the observation surface, in the direction of an optical axis of the objective lens.
Claim 29
Dependent Claim
85 words
An apparatus according to claim 26, characterized in that said objective lens unit (30) includes a substantially cylindrical lens holder (34) containing the optical system (35) therein and having one end portion removably mounted on the mounting section (18), and said tip unit (32) includes a substantially cylindrical support member (42) arranged substantially coaxial with the lens holder, outside the holder, the support member having one end portion removably attached to the mounting section, and the other end portion supporting the light transmitting member (48).
Claim 30
Dependent Claim
34 words
An apparatus according to claim 27, characterized in that said support member (42) is mounted on the mounting section (18), for movement in the direction of the optical axis of the objective lens (36).
Claim 31
Dependent Claim
36 words
An apparatus according to claim 27, characterized in that said shift means includes a piezoelectric section (40) attached to the support member (42) and shiftable in a predetermined direction, integral with the light transmitting member (48).
Claim 32
Dependent Claim
66 words
An apparatus according to claim 29, characterized in that said piezoelectric section (40) is shiftable in the direction of the optical axis of the objective lens (36), a first direction perpendicular to the optical axis, and a second direction perpendicular to the optical axis and the first direction, and said shift means includes second voltage applying means for applying a predetermined voltage to the piezoelectric section.
Claim 33
Dependent Claim
55 words
An apparatus according to claim 29, characterized in that said support member (42) includes a first portion (42a) attached to the mounting section (18), and a second portion supporting the light transmitting member (48), and said piezoelectric section (40) is fixed between the first and second portions so as to surround the optical system (35).
Claim 34
Dependent Claim
23 words
An apparatus according to claim 26, characterized in that said tip (38) is coaxial with the optical axis of the objective lens (36).
Claim 35
Dependent Claim
159 words
A tip unit for observing an observation surface of a sample by utilizing the tunnel effect, comprising: a fine conductive tip; and means for shifting the tip in a predetermined direction; characterized in that: said tip unit (32) is designed to be used in conbination with an optical microscope (10) having a mounting section (18) on which an objective lens unit (30) is mounted, the lens unit having an objective lens (36) opposed to the observation surface (28a); said ptobe unit further includes a support member (42) removable mounted on the mounting section (18) and surrounding the objective lens unit, and a light transmitting member (48) mounted on the support member and located between the objective lens and the observation surface; said tip (38) is fixed to the light transmitting member and extends therefrom toward the observation surface, in the direction of an optical axis of the objective lens; and said shift means is fixed to the support member.
Claim 36
Dependent Claim
159 words
A tip unit for observing an observation surface of a sample by utilizing the tunnel effect, comprising: a fine conductive tip; and means for shifting the tip in a predetermined direction; characterized in that: said tip unit (32) is designed to be used in conbination with an optical microscope (10) having a mounting section (18) on which an objective lens unit (30) is mounted, the lens unit having an objective lens (36) opposed to the observation surface (28a); said ptobe unit further includes a support member (42) removable mounted on the mounting section (18) and surrounding the objective lens unit, and a light transmitting member (48) mounted on the support member and located between the objective lens and the observation surface; said tip (38) is fixed to the light transmitting member and extends therefrom toward the observation surface, in the direction of an optical axis of the objective lens; and said shift means is fixed to the support member.
Claim 37
Independent Claim
139 words
An apparatus for observing an observation surface of a sample by utilizing the tunnel effect, comprising: a fine conductive tip; and means for shifting the tip in a predetermined direction; characterized in that: said apparatus further includes a support member (34) removably mounted on a mounting section (18) of an optical microscope (10), which is designed to be fitted with objective optical means; and an objective optical system (35) held by the support member, for forming an optical image of the objection surface (28a) viewable through the optical microscope, the optical system including an objective lens (36) opposed to the observation surface; said tip (38) is fixed to the objective lens and extends therefrom toward the observation surface, in the direction of an optical axis of the objective lens; and said shift means is fixed to the support member.
Claim 38
Independent Claim
139 words
An apparatus for observing an observation surface of a sample by utilizing the tunnel effect, comprising: a fine conductive tip; and means for shifting the tip in a predetermined direction; characterized in that: said apparatus further includes a support member (34) removably mounted on a mounting section (18) of an optical microscope (10), which is designed to be fitted with objective optical means; and an objective optical system (35) held by the support member, for forming an optical image of the objection surface (28a) viewable through the optical microscope, the optical system including an objective lens (36) opposed to the observation surface; said tip (38) is fixed to the objective lens and extends therefrom toward the observation surface, in the direction of an optical axis of the objective lens; and said shift means is fixed to the support member.
Claim 39
Dependent Claim
23 words
An apparatus according to claim 34, characterized in that said tip (38) is coaxial with the optical axis of the objective lens (36).
Claim 40
Dependent Claim
46 words
An apparatus according to claim 34, characterized in that said objective lens (36) has a surface which opposes to the sample (28) and on which an electrically conductive film (64) is formed, and said tip (38) is fixed to the objective lens through the conductive film.
Claim 41
Dependent Claim
46 words
An apparatus according to claim 34, characterized in that said objective lens (36) has a through hole extending in the direction of the optical axis thereof, and said tip (38) has a proximal end portion passed through the through hole and fixed to the objective lens.
Claim 42
Dependent Claim
28 words
An apparatus according to claim 34, characterized in that said shift means includes a piezoelectric section (40) shiftable in a predetermined direction, integral with the objective lens (36).
Claim 43
Dependent Claim
48 words
An apparatus according to claim 38, characterized in that said piezoelectric section (40) is shiftable in the direction of the optical axis of the objective lens (36), a first direction perpendicular to the optical axis, and a second direction perpendicular to the optical axis and the first direction.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
Maintenance schedule is calculated for granted US utility patents.