EP0329428A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Photoconductive imaging apparatus
Assignee: The General Electric Company PLC
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Filing: 1989-02-15
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Granted: —
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Expires: 2009-02-15
Abstract
Abstract An optically-addressed spatial light modulator comprises an input section having an amorphous silicon photoconductive layer (4), and an interface section comprising a dielectric mirror (6). These layers (4,6) are connected by way of a contiguous intervening polyimide layer (5) which protects the amorphous silicon from damage during manufacture.
Inventors
- 👤 Michael Anthony Powell
- 👤 Steven George Latham
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-05 17:01
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/135
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
27 words
Photoconductive imaging apparatus comprising, as superimposed flat layers bonded together: an amorphous silicon photoconductive layer; a dielectric mirror layer; and an intervening polymeric layer between those layers.
Claim 2
Dependent Claim
27 words
Photoconductive imaging apparatus comprising, as superimposed flat layers bonded together: an amorphous silicon photoconductive layer; a dielectric mirror layer; and an intervening polymeric layer between those layers.
Claim 3
Dependent Claim
14 words
Apparatus according to claim 1, wherein the intervening polymeric layer is of a polyimide.
Claim 4
Dependent Claim
19 words
Apparatus according to claim 1 or 2, wherein the thickness of the intervening polymeric layer is less than 1000nm.
Claim 5
Dependent Claim
20 words
Apparatus according to claim 1 or 2, wherein the thickness of the intervening polymeric layer is less than 500 nm.
Claim 6
Dependent Claim
18 words
Apparatus according to claim 3, wherein the thickness of the intervening polymeric layer is between 100 and 300nm.
Claim 7
Dependent Claim
23 words
Apparatus according to any preceding claims wherein the amorphous silicon photoconductive layer is bonded at its other face to an indium-tin oxide layer.
Claim 8
Dependent Claim
20 words
Apparatus according to any preceding claim, wherein the dielectric mirror layer comprises alternating layers of magnesium fluoride and zinc sulphide.
Claim 9
Dependent Claim
32 words
An optically-addressed spatial light modulator comprising photoconductive imaging apparatus according to any preceding claim, the photoconductive layer constituting part of its input section and the dielectric mirror layer constituting its interface section.
Claim 10
Dependent Claim
18 words
An optically addressed spatial light modulator according to claim 8, wherein the amorphous silicon is undoped amorphous silicon.
Claim 11
Independent Claim
31 words
A method of manufacturing of photoconductive apparatus forming a layer of amorphous silicon, forming a polymeric layer on said amorphous silicon layer, and forming a dielectric mirror on said polymeric layer.
Claim 12
Independent Claim
31 words
A method of manufacturing of photoconductive apparatus forming a layer of amorphous silicon, forming a polymeric layer on said amorphous silicon layer, and forming a dielectric mirror on said polymeric layer.
Claim 13
Dependent Claim
14 words
A method according to claim 10, wherein the polymeric layer is a polyimide layer.
References Cited (Backward Citations)
No citation records indexed.
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