Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
69 words
Apparatus for effecting thermal transfer with a workpiece in vacuum, comprising: a thermally-conductive member including a heat transfer surface; a first resilient, thermally-conductive layer, affexed to said heat transfer surface for conforming to the shape of a surface of said workpiece; and a second thermally-conductive layer, thin relative to said first layer, affixed to said first layer and having a smooth surface for contacting said workpiece without adhering thereto.
Claim 2
Dependent Claim
69 words
Apparatus for effecting thermal transfer with a workpiece in vacuum, comprising: a thermally-conductive member including a heat transfer surface; a first resilient, thermally-conductive layer, affexed to said heat transfer surface for conforming to the shape of a surface of said workpiece; and a second thermally-conductive layer, thin relative to said first layer, affixed to said first layer and having a smooth surface for contacting said workpiece without adhering thereto.
Claim 3
Dependent Claim
23 words
Apparatus as claimed in claim 1 further including means for pressing said workpiece firmly into contact with smooth surface of said second layer.
Claim 4
Dependent Claim
31 words
Apparatus as claimed in claim 2 wherein said pressing means comprises centrifugal means for pressing said workpiece against said second layer without physical contact to the front surface of said workpiece.
Claim 5
Dependent Claim
23 words
Apparatus as claimed in any one of claims 1 to 3 wherein said first layer comprises silicone ruhber having thermally-conductive particles dispersed therein.
Claim 6
Dependent Claim
19 words
Apparatus as claimed in claim 4 wherein said first layer has a durometer value less than 20 Shore A.
Claim 7
Dependent Claim
21 words
Apparatus as claimed in claim 4 or claim 5 wherein said second layer is hard relative to said silicone rubber layer.
Claim 8
Dependent Claim
20 words
Apparatus as claimed in any one of claims 1 to 6 wherein said second layer comprises a quartz surface film.
Claim 9
Independent Claim
61 words
A method for effecting thermal transfer with workpiece in vacuum, comprising the steps of providing a thermally-conductive platen including a heat transfer surface affixing a soft, thermally-conductive polymer layer to the heat transfer surface forming on said ploymer layer a thin surface film for contacting said workpiece without adhering thereto and pressing the workpiece firmly into contact with the surface film.
Claim 10
Independent Claim
61 words
A method for effecting thermal transfer with workpiece in vacuum, comprising the steps of providing a thermally-conductive platen including a heat transfer surface affixing a soft, thermally-conductive polymer layer to the heat transfer surface forming on said ploymer layer a thin surface film for contacting said workpiece without adhering thereto and pressing the workpiece firmly into contact with the surface film.
Claim 11
Independent Claim
45 words
A method of treating a thermally-conductive polymer layer used for thermal transfer with a semiconductor wafer to prevent adherence of the wafer to the polymer layer, comprising forming a thin surface film on said polymer layer, said surface film being harder than said polymer layer.
Claim 12
Independent Claim
45 words
A method of treating a thermally-conductive polymer layer used for thermal transfer with a semiconductor wafer to prevent adherence of the wafer to the polymer layer, comprising forming a thin surface film on said polymer layer, said surface film being harder than said polymer layer.
Claim 13
Dependent Claim
21 words
A method as defined in claim 9 further including the step of fracturing the surface film into a plurality of plates.