EP0309948A2
Expired / Lapsed
EP
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Lenslet array and method for providing apertures on lenslet arrays
Assignee: Honeywell Inc
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Filing: 1988-09-24
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Granted: —
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Expires: 2008-09-24
Abstract
Abstract A method for forming an aperture pattern of light blocking material (22) between the lenslets (12, 14, 16) of a lenslet array (10) so as to prevent unwanted radiation from reaching the radiation detectors (A, B) in the area beneath the lenslets by exposing a photoresist material which has been formed over the array to ultraviolet light for a predetermined time sufficient to expose the photoresist material to sufficient radiation in the area between the lenslets, but not over the lenslets because the flux density there is less than between the lenslets and thereafter forming light blocking material between the lenslets.
Inventors
- 👤 Rastko C. Maglic
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 14:28
CPC Classifications
G; G03; G03B; G03B17/00; G03B17/56; G02; G02B; G02B3/00; G02B3/0006; G02B3/0012
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
124 words
A method of selectively placing photoresist material on a lenslet array (10) having a first area comprising a plurality of curved lenslets (12, 14, 16; 42, 44, 46; 60) and a second area comprising flat areas (62, 64) between the lenslets characterized by the steps of: A) applying a photoresist material over the first and second areas; B) exposing the photoresist on both the first and second areas to ultraviolet light (66), the flux density thereof being greater on the second area than on the first area, for a predetermined period of time sufficient to harden the photoresist on one of the first and second areas but not the other; and, C) removing the photoresist from said other of the first and second areas.
Claim 2
Independent Claim
124 words
A method of selectively placing photoresist material on a lenslet array (10) having a first area comprising a plurality of curved lenslets (12, 14, 16; 42, 44, 46; 60) and a second area comprising flat areas (62, 64) between the lenslets characterized by the steps of: A) applying a photoresist material over the first and second areas; B) exposing the photoresist on both the first and second areas to ultraviolet light (66), the flux density thereof being greater on the second area than on the first area, for a predetermined period of time sufficient to harden the photoresist on one of the first and second areas but not the other; and, C) removing the photoresist from said other of the first and second areas.
Claim 3
Dependent Claim
41 words
The method of claim 1, characterized in that wherein the photoresist of step (A) is a positive photoresist, and the photoresist hardens on the first area in step (B) and the photoresist is removed from the second area in step (C).
Claim 4
Dependent Claim
39 words
The method of claim 1, characterized in that the photoresist of step (A) is a negative photoresist, the photoresist hardens on the second area in step (B) and the photoresist is removed from the first area in step (C).
Claim 5
Independent Claim
133 words
A method of forming an aperture on a lenslet array which includes a first area comprising curved lenslets (12, 14, 16; 42, 44, 46; 60) and a second area comprising flat surfaces (62, 64) between the lenslets, characterized by the steps of: A) applying a light blocking material (72, 74, 76) over the first and second areas; B) applying a photoresist over the light blocking material; C) exposing the photoresist on both the first and second areas to ultraviolet light (66), the flux density thereof being greater on the second area than on the first area, for a predetermined period of time sufficient to harden the photoresist on one of the first and second areas but not the other; and D) removing the photoresist and the light blocking material from the first area.
Claim 6
Independent Claim
133 words
A method of forming an aperture on a lenslet array which includes a first area comprising curved lenslets (12, 14, 16; 42, 44, 46; 60) and a second area comprising flat surfaces (62, 64) between the lenslets, characterized by the steps of: A) applying a light blocking material (72, 74, 76) over the first and second areas; B) applying a photoresist over the light blocking material; C) exposing the photoresist on both the first and second areas to ultraviolet light (66), the flux density thereof being greater on the second area than on the first area, for a predetermined period of time sufficient to harden the photoresist on one of the first and second areas but not the other; and D) removing the photoresist and the light blocking material from the first area.
Claim 7
Dependent Claim
21 words
The method of claim 4, characterized in that the light blocking material of step (A) comprises a light reflecting material (74).
Claim 8
Dependent Claim
36 words
The method of claim 4 or 5, characterized in that the light blocking material of step (A) comprises at least one layer of light absorbing material (72, 76), and a layer of light reflecting material (74).
Claim 9
Independent Claim
148 words
A method of forming an aperture on a lenslet array which includes a first area comprising a plurality of lenslets (12, 14, 16; 42, 44, 46; 60) and a second area comprising flat surfaces (62, 64) betweeen the lenslets, characterized by the steps of: A) applying a photo resist material (70) over the first and second areas; B) exposing the photoresist on both the first and second areas to ultraviolet light (66), the flux density there of being greater on the first area than on the second area, for a predetermined period of time sufficient to harden the photoresist on one the first area but not on the second area; C) removing the photoresist (70) from the second area; D) applying a light blocking material (72, 74, 76) over the first and second areas; and E) removing the light blocking material and the photoresist from the first area.
Claim 10
Independent Claim
148 words
A method of forming an aperture on a lenslet array which includes a first area comprising a plurality of lenslets (12, 14, 16; 42, 44, 46; 60) and a second area comprising flat surfaces (62, 64) betweeen the lenslets, characterized by the steps of: A) applying a photo resist material (70) over the first and second areas; B) exposing the photoresist on both the first and second areas to ultraviolet light (66), the flux density there of being greater on the first area than on the second area, for a predetermined period of time sufficient to harden the photoresist on one the first area but not on the second area; C) removing the photoresist (70) from the second area; D) applying a light blocking material (72, 74, 76) over the first and second areas; and E) removing the light blocking material and the photoresist from the first area.
Claim 11
Dependent Claim
16 words
The method of claim 7, characterized in that the photoresist material (70) is a positive photoresist.
Claim 12
Dependent Claim
20 words
The method of claim 7 or 8, characterized in that step (E) includes the step of ultrasonic cleaning the array.
Claim 13
Independent Claim
24 words
The method of one of the claims 7 to 9, charac terized in that the light blocking material is a layer (74) of metal.
Claim 14
Independent Claim
164 words
A method of forming an aperture on an array which has a first area comprising a plurality of lenslets (12, 14, 16; 42, 44, 46; 60) and a second area made up of flat surfaces (62, 64) between the lenslets, characterized by the steps of: A) applying a layer of photoresist (70, 72 to 76) and a layer of light blocking material over the first and second areas; B) exposing the photo resist on both the first and second areas to ultraviolet light (66) for a predetermined period of time, the flux density of the light being greater on the second area than on the frist area because of the curvature of the lenslets with the result that the exposure to light for the predetermined period of time causes a hardening of the photoresist on one of the first and second areas but not on the other; C) removing the photoresist (70) and the light blocking material (72 - 76) from the first area.
Claim 15
Independent Claim
164 words
A method of forming an aperture on an array which has a first area comprising a plurality of lenslets (12, 14, 16; 42, 44, 46; 60) and a second area made up of flat surfaces (62, 64) between the lenslets, characterized by the steps of: A) applying a layer of photoresist (70, 72 to 76) and a layer of light blocking material over the first and second areas; B) exposing the photo resist on both the first and second areas to ultraviolet light (66) for a predetermined period of time, the flux density of the light being greater on the second area than on the frist area because of the curvature of the lenslets with the result that the exposure to light for the predetermined period of time causes a hardening of the photoresist on one of the first and second areas but not on the other; C) removing the photoresist (70) and the light blocking material (72 - 76) from the first area.
Claim 16
Independent Claim
33 words
The method of one of the preceding claims, characterized in that the light blocking material comprises two layers (72, 76) of light absorbing material with a layer (74) of light reflecting material therebetween.
Claim 17
Independent Claim
19 words
The method of one of the preceding claims, characterized in that the light reflecting material (74) is a metal.
Claim 18
Dependent Claim
14 words
The method of claim 13, characterized in that the light reflecting material is nickel.
Claim 19
Dependent Claim
20 words
The method of claim 12, 13 or 14, characterized in that the light absorbing material is an oxide of metal.
Claim 20
Dependent Claim
19 words
The method of claim 13 or 14, characterized in that step (C) includes etching the metal with an acid.
Claim 21
Dependent Claim
20 words
The method of claim 13 or 14, characterized in that step (C) includes removing the metal by ultra sonic cleaning.
Claim 22
Dependent Claim
20 words
The method of claim 13, characterized by depositing a metal layer by electroless deposition to form the light blocking material.
Claim 23
Dependent Claim
82 words
An apertured lenslet array (10) characterized by : a) a plurality of curved lenslets (12, 14, 16; 42, 44, 46; 60) formed in a base material so that there are flat areas (62, 64) therebetween; b) a layer of light reflecting material (74) only on the flat areas (62, 64) to block light from entering the base material between the lenslet; and c) a layer of light absorbing material (72, 76) on the light reflecting material to absorb light between the lenslets.
Claim 24
Dependent Claim
82 words
An apertured lenslet array (10) characterized by : a) a plurality of curved lenslets (12, 14, 16; 42, 44, 46; 60) formed in a base material so that there are flat areas (62, 64) therebetween; b) a layer of light reflecting material (74) only on the flat areas (62, 64) to block light from entering the base material between the lenslet; and c) a layer of light absorbing material (72, 76) on the light reflecting material to absorb light between the lenslets.
Claim 25
Dependent Claim
108 words
An apertured lenslet array (10), characterized by : a) plurality of curved lenslets (12, 14, 16; 42, 44, 46; 60) formed in a base material so that there are flat areas (62, 64) therebetween; b) a layer of light absorbing material (72) on the flat areas (62, 64) to absorb any light reflected inside the base material; c) a layer of light reflecting material (74) on the light absorbing material (72) to block light from entering the base material through the flat areas; and d) a layer of light absorbing material (76) on the light reflecting material (74) to absorb any light reflected from outside the base material.
Claim 26
Dependent Claim
108 words
An apertured lenslet array (10), characterized by : a) plurality of curved lenslets (12, 14, 16; 42, 44, 46; 60) formed in a base material so that there are flat areas (62, 64) therebetween; b) a layer of light absorbing material (72) on the flat areas (62, 64) to absorb any light reflected inside the base material; c) a layer of light reflecting material (74) on the light absorbing material (72) to block light from entering the base material through the flat areas; and d) a layer of light absorbing material (76) on the light reflecting material (74) to absorb any light reflected from outside the base material.
Claim 27
Dependent Claim
30 words
The apparatus of claim 19 or 20, characterized in that the light absorbing material (72, 76) is metal oxide and the light reflecting material (74) is metal, preferably is nickel.
References Cited (Backward Citations)
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