EP0306069A2
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EP
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A method of forming an oxide layer on a substrate
Assignee: Koninklijke Philips NV
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Filing: 1988-08-02
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Granted: —
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Expires: 2008-08-02
Abstract
Abstract A method of forming an oxide layer on a substrate includes supplying an oxygen-containing gas to a chamber containing a substrate, providing defect oxide material within the chamber and irradiating the substrate with an electromagnetic radiation source, for example using an ultra-violet laser or an ultra-violet lamp, to cause photolytic dissociation of the oxygen-containing gas to provide oxygen atoms in the vicinity of the defect oxide material within the chamber so that oxygen atoms are incorporated in the defect oxide material to provide a layer of defect oxide material with desired oxygen content on the substrate. The defect oxide material with the desired oxygen content may be a high temperature superconducting mixed oxide such as oxides of copper and one or more of the elements of the group consisting of the lanthanides and yttrium.
Inventors
- 👤 Subramanian Ramesh
- 👤 Peter James Dobson
- 👤 James Edward Curran
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 01:09
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/087; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/408; C23C16/44; C23C16/48; C23C8/00; C23C8/06; C23C8/08; C23C8/10; C23C8/16; H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0408
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
88 words
A method of forming an oxide layer on a substrate, which method comprises supplying an oxygen-containing gas to a chamber containing a substrate, providing defect oxide material within the chamber and irradiating the substrate with an electromagnetic radiation source to cause photolytic dissociation of the oxygen-containing gas to provide oxygen atoms in the vicinity of defect oxide material within the chamber so that oxygen atoms are incorporated in the defect oxide material to provide a layer of defect oxide material with a desired oxygen content on the substrate.
Claim 2
Independent Claim
88 words
A method of forming an oxide layer on a substrate, which method comprises supplying an oxygen-containing gas to a chamber containing a substrate, providing defect oxide material within the chamber and irradiating the substrate with an electromagnetic radiation source to cause photolytic dissociation of the oxygen-containing gas to provide oxygen atoms in the vicinity of defect oxide material within the chamber so that oxygen atoms are incorporated in the defect oxide material to provide a layer of defect oxide material with a desired oxygen content on the substrate.
Claim 3
Dependent Claim
17 words
A method according to Claim 1, which comprises using an ultra-violet source as the electromagnetic radiation source.
Claim 4
Dependent Claim
22 words
A method according to Claim 1 or 2, which comprises providing the defect structure oxide material as a layer on the substrate.
Claim 5
Dependent Claim
50 words
A method according to Claim 1 or 2, which comprises providing the defect oxide material by causing defect oxide material to be deposited onto the substrate whilst irradiating the chamber to cause photolytic dissociation of the oxygen-containing gas to provide oxygen atoms to be incorporated in the material being deposited.
Claim 6
Dependent Claim
16 words
A method according to Claim 4 which comprises sputtering the defect oxide material onto the substrate.
Claim 7
Dependent Claim
23 words
A method according to Claim 4, which comprises using spray pyrolysis or plasma spraying to deposit the defect oxide material onto the substrate.
Claim 8
Dependent Claim
47 words
A method according to Claim 1 or 2, which comprises using detecting means to provide a signal indicating the oxidation state of defect oxide material on the substrate, and supplying the signal to control means for controlling the electromagnetic radiation source and/or the supply of oxygen-containing gas.
Claim 9
Dependent Claim
41 words
A method according to Claim 7, wherein the detecting means comprises a further electromagnetic radiation source directed at the substrate and means for detecting electromagnetic radiation from the further electromagnetic radiation source reflected from the defect oxide material on the substrate.
Claim 10
Dependent Claim
51 words
A method according to claim 1 or 2 which comprises using detecting means to provide a signal indicating the resistivity and/or the magnetic susceptibility of the defect oxide material on the substrate and supplying the signal to control means for controlling the electromagnetic radiation source and/or the supply of oxygen-containing gas.
Claim 11
Dependent Claim
17 words
A method according to claim 1 or 2, wherein the defect oxide material comprises a mixed oxide.
Claim 12
Dependent Claim
31 words
A method according to Claim 10, wherein the defect oxide material is selected so that the layer of defect oxide material with the desired oxygen content has high temperature superconducting properties.
Claim 13
Dependent Claim
31 words
A method according to Claim 11, wherein the defect oxide material comprises oxides of copper and one or more of the elements of the group consisting of the lanthanides and yttrium.
Claim 14
Dependent Claim
73 words
A method according to Claim 12, wherein the mixed oxide is of the general formula L a A b B c O 7-x , where L is selected from the group consisting of yttrium and the lanthanides A is selected from the group consisting of strontium, barium and calcium B is copper, x lies in the range 0 < x < 1 and a, b, c, indicate relative proportion of L, A, B.
Claim 15
Dependent Claim
49 words
A method according to Claim 13, wherein the mixed oxide YBa₂Cu₃O 7-x and the method comprises irradiating the substrate to cause dissociation of the oxygen-containing gas to provide on the substrate a layer of the mixed oxide for which x is less than or equal to 0.1 or 0.2.
Claim 16
Dependent Claim
33 words
A method according to Claim 1, wherein the oxide layer is heated to a moderate temperature, and the radiant source comprises an ultra-violet lamp focussed to a line image at the oxide layer.
Claim 17
Dependent Claim
16 words
A method according to Claim 15, wherein the line image is scanned across the oxide layer.
Claim 18
Dependent Claim
15 words
A method according to Claim 15, wherein the temperature is of the order of 400C.
References Cited (Backward Citations)
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