Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
60 words
A device for detecting magnetism which comprises, a substrate, an interposed insulating layer containing impurities therein, formed on said substrate, a ferromagnetic magnetoresistive element formed on said interposed layer, and characterized in that at least a portion of said interposed layer on which said ferromagnetic magnetoresistive element is formed has a concentration of impurities of less than a predetermined value.
Claim 2
Independent Claim
60 words
A device for detecting magnetism which comprises, a substrate, an interposed insulating layer containing impurities therein, formed on said substrate, a ferromagnetic magnetoresistive element formed on said interposed layer, and characterized in that at least a portion of said interposed layer on which said ferromagnetic magnetoresistive element is formed has a concentration of impurities of less than a predetermined value.
Claim 3
Dependent Claim
33 words
A device for detecting magnetism according to claim 1, wherein when said impurities are P, said predetermined concentration of impurities of said insulating interposed layer is a phosphorus concentration of 5 P₂O₅ mol%.
Claim 4
Dependent Claim
34 words
A device for detecting magnetism according to claim 1, wherein when said impurities are As, said predetermined concentration of impurities of said insulating interposed layer is an arsenic concentration of 1 x 10⁻¹⁷ cm⁻³.
Claim 5
Dependent Claim
25 words
A device for detecting magnetism according to claim 1, wherein a surface of said interposed layer has a surface roughness of less than 120 Å.
Claim 6
Dependent Claim
59 words
A device for detecting magnetism according to claim 1, wherein a conductive wiring consisting of a thin film electrically connected to said ferromagnetic magnetoresistive element is formed on said interposed layer and an angle between a contacting surface of said conductive wiring and said ferromagnetic magnetoresistive element and a surface of said interposed layer is less than 78 degrees.
Claim 7
Independent Claim
33 words
A device for detecting magnetism according to any one of claims 1, 4 and 5, wherein said impurities contained in said interposed layer consist of a substance selected from P, B, and As.
Claim 8
Independent Claim
33 words
A device for detecting magnetism according to any one of claims 1 to 5, wherein said interposed insulating layer is a film made of a substance selected from silicon dioxide and silicon nitride.
Claim 9
Independent Claim
30 words
A device for detecting magnetism according to any one of claims 1 to 5, wherein said ferromagnetic magnetoresistive element is a this film containing Ni as a main substance therein.
Claim 10
Dependent Claim
28 words
A device for detecting magnetism according to claim 8, wherein said thin film of said ferromagnetic magnetoresistive element consists of a metallic alloy selected from Ni-Fe and Ni-Co.
Claim 11
Dependent Claim
95 words
A device for detecting magnetism according to any one of claim 1 to 5, wherein at least a processing circuit consisted of an integrated circuit (IC) for processing signals output from said ferromagnetic magnetoresistive element is included on the same substrate on which said ferromagnetic magnetoresistive element is formed and further characterising in that said interposed layer is extended to at least the place located over said processing circuit to serve as an insulating film and is containing therein the same impurities as contained in a diffusion region forming a collector region in said circuit.