EP0299778A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Microelectrochemical sensor and sensor array
Assignee: SRI International Inc
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Filing: 1988-07-15
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Granted: —
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Expires: 2008-07-15
Abstract
Abstract The invention relates to a microelectrochemical electrode structure (10) comprising a monolithic substrate (12) having a front surface (14) and a back surface (16) facing generally away from one another, a first well (18) extending into the substrate from the front surface towards the back surface and ending in a first well bottom (20), and a first passage (22) extending into the substrate from the back surface to the first well bottom. A first electrode (24) is located wholly within the first well. A first conductor (26) in the first passage serves for electrically communicating the first electrode (24) to adjacent the back surface (16). A plurality of such electrode structures can be provided on a single substrate. The use of semiconductor processing technology allows the entire sensor to be extremely small. If desired, an integrated circuit (48) can be provided on the back surface of the substrate for amplifying or otherwise processing signals from the first electrode. Analysis can be carried out for vapors or dissolved species (ionic or non-ionic).
Inventors
- 👤 Mark J Madou
- 👤 Takaaki Otagawa
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-31 05:01
CPC Classifications
G; G01; G01N; G01N27/00; G01N27/26; G01N27/403
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
92 words
A microelectrochemical electrode structure, comprising: a monolithic substrate having a front surface and a back surface facing generally away from one another, a first well extending into said substrate from said front surface towards said back surface and ending in a first well bottom, and a first passage extending into said substrate from said back surface to said first well bottom; a first electrode wholly between said front and back surfaces of said substrate; and a first conductor in said first passage electrically communicating said first electrode to adjacent said back surface.
Claim 2
Dependent Claim
92 words
A microelectrochemical electrode structure, comprising: a monolithic substrate having a front surface and a back surface facing generally away from one another, a first well extending into said substrate from said front surface towards said back surface and ending in a first well bottom, and a first passage extending into said substrate from said back surface to said first well bottom; a first electrode wholly between said front and back surfaces of said substrate; and a first conductor in said first passage electrically communicating said first electrode to adjacent said back surface.
Claim 3
Dependent Claim
77 words
An electrode structure as set forth in claim 1, further including: an electrolytic medium in said first well; a barrier having an outfacing surface and an infacing surface covering said first well with said infacing surface in flow contact with said electrolytic medium, said barrier providing entry into said electrolytic medium of a selected moiety in response to contact of a selected species with said outfacing surface and being at least substantially impermeable to said electrolytic medium.
Claim 4
Dependent Claim
46 words
An electrode structure as set forth in claim 2, wherein said first well extends sufficiently towards said back surface and said first electrode is sufficiently deeply positioned in said first well whereby electrochemical reaction of said moiety at said first electrode provides a substantially Nernstian slope.
Claim 5
Dependent Claim
18 words
An electrode structure as set forth in claim 2, wherein said electrolytic medium comprises a solid conductive polymer.
Claim 6
Dependent Claim
19 words
An electrode structure as set forth in claim 2, where said barrier comprises a gas pervious liquid impervious membrane.
Claim 7
Dependent Claim
30 words
A plurality of electrode structures as set forth in claim 5, wherein a sub-plurality of said plurality of electrode structure is sensitive to a single one of said selected species.
Claim 8
Dependent Claim
41 words
An electrode structure as set forth in claim 2, wherein said first well is a sensor well, said first well bottom is a sensor well bottom, said first passage is a sensor passage and said first electrode is a sensing electrode.
Claim 9
Dependent Claim
78 words
An electrode structure as set forth in claim 3, wherein: said said substrate has a reference well extending into said substrate from said first surface towards said back surface and ending in a reference well bottom and a reference passage extending from said back surface to said reference well bottom; and a reference electrode in said reference and further including: a reference conductor in said reference well; passage electrically communicating said reference electrode to adjacent said back surface.
Claim 10
Dependent Claim
77 words
An electrode structure as set forth in claim 8, wherein: said substrate has a counter well extending into said substrate from said surface towards said back surface and ending in a counter well bottom and a counter passage extending from said back surface to said counter well bottom; and said counter electrode is in said counter well; and further including: a counter conductor in said counter passage electrically communicting said counter electrode to adjacent said back surface.
Claim 11
Dependent Claim
21 words
An electrode structure as set forth in claim 9, wherein said barrier further covers said reference well and said counter well.
Claim 12
Dependent Claim
34 words
An electrode structure as set forth in claim 7, further including: a reference electrode in electrical communication with said electrolytic medium and electrically isolated from said sensing electrode other than via said electrolytic medium.
Claim 13
Dependent Claim
32 words
An electrode structure as set forth in claim 11, further including: electronic circuitry in said substrate adjacent said back surface adapted for processing signals from said sensing electrode and said reference electrode.
Claim 14
Dependent Claim
61 words
An electrode structure as set forth in claim 11, wherein: said substrate has a reference passage extending from said back surface to said sensor well bottom; and said reference electrode is wholly between said front and back surfaces of said substrate; and further including: a second conductor in said reference passage electrically communicating said reference electrode to adjacent said back surface.
Claim 15
Dependent Claim
29 words
A plurality of said electrode structures on said substrate, said plurality including a plurality of sensing electrodes and a plurality of reference electrodes as set forth in claim 13.
Claim 16
Dependent Claim
43 words
An electrode structure as set forth in claim 13, in combination with: a separate member having electronic circuitry adapted for processing signals from said sensing electrode and said reference electrode and means for connecting said first and second conductors to said electronic circuitry.
Claim 17
Dependent Claim
38 words
An electrode structure as set forth in claim 11, further including: a counter electrode in electrical communication with said electrolytic medium and electrically isolated from said sensing electrode and said reference electrode other than via said electrolytic medium.
Claim 18
Dependent Claim
61 words
An electrode structure as set forth in claim 16 wherein: said substrate has a reference passage extending from said back surface to said sensor well bottom; and said reference electrode is wholly between said front and back surfaces of said substrate; and further including: a second conductor in said reference passage electrically communicating said reference electrode to adjacent said back surface.
Claim 19
Dependent Claim
61 words
An electrode structure as set forth in claim 17, wherein: said substrate has a counter passage extending from said back surface to said sensor well bottom; and said counter electrode is wholly between said front and back surfaces of said substrate; and further including: a third conductor in said counter passage electrically communicating said counter electrode to adjacent said back surface.
Claim 20
Dependent Claim
31 words
An electrode structure as set forth in claim 1, wherein said first electrode includes an electrode base and a conductive ion-selective member attached thereto and having an electroactive species incorporated therein.
Claim 21
Dependent Claim
47 words
An electrode structure as set forth in claim 19 , wherein said first well extends sufficiently towards said back surface and said first electrode is sufficiently deeply positioned in said first well whereby electrochemical reaction of said moiety at said first electrode provides a substantially Nernstian slope.
Claim 22
Dependent Claim
48 words
An electrode structure as set forth in claim 19. wherein said first well is a sensor well, said first well bottom is a sensor well bottom, said first passage is a sensor passage, said first electrode is a sensing electrode and said first conductor is a sensor conductor.
Claim 23
Dependent Claim
77 words
An electrode structure as set forth in claim 21, wherein: said substrate has a reference well extending into said substrate from said first surface towards said back surface and ending in a reference well bottom and a second passage extending from said back surface to said reference well bottom; and a reference electrode in said reference well; and further including: a reference conductor in said second passage electrically communicating said reference electrode to adjacent said back surface.
Claim 24
Dependent Claim
77 words
An electrode structure as set forth in claim 22. wherein: said substrate has a counter well extending into said substrate from said surface towards said back surface and ending in a counter well bottom and a third passage extending from said back surface to said counter well bottom; and said counter electrode is in said counter well; and further including: a counter conductor in said third passage electrically communicting said counter electrode to adjacent said back surface.
Claim 25
Dependent Claim
44 words
An electrode structure as set forth in claim 21, further including: an electrolytic medium in contact with said sensing electrode; and a reference electrode in electrical communication with said electrolytic medium and electrically isolated from said sensing electrode other than via said electrolytic medium.
Claim 26
Dependent Claim
20 words
25 . An electrode structure as set forth in claim 24, wherein said electrolytic medium comprises a solid conductor polymer.
Claim 27
Dependent Claim
55 words
An electrode structure as set forth in claim 24, wherein: said substrate has a second passage extending from said back surface to said sensor well bottom; and said reference electrode is in said sensor well; and further including: a reference conductor in said second passage electrically communicating said reference electrode to adjacent said back surface.
Claim 28
Dependent Claim
48 words
An electrode structure as set forth in claim 24, further including: an electrolytic medium in contact with said sensing electrode: and a counter electrode in electrical communication with said electrolytic medium and electrically isolated from said sensing electrode and said reference electrode other than via said electrolytic medium.
Claim 29
Dependent Claim
55 words
An electrode structure as set forth in claim 27 wherein: said substrate has a second passage extending from said back surface to said sensor well bottom; and said reference electrode is in said sensor well; and further including: a reference conductor in said second passage electrically communicating said reference electrode to adjacent said back surface.
Claim 30
Dependent Claim
55 words
An electrode structure as set forth in claim 20, wherein: said substrate has a third passage extending from said back surface to said sensor well bottom; and said counter electrode is in said sensor well; and further including: a counter conductor in said third passage electrically communicating said counter electrode to adjacent said back surface.
References Cited (Backward Citations)
No citation records indexed.
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