EP0299753A2
Expired / Lapsed
EP
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Controlled flow vaporizer
Assignee: General Vacuum Equipment Ltd
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Filing: 1988-07-13
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Granted: —
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Expires: 2008-07-13
Abstract
Abstract A vaporizing apparatus 71 delivers precisely controlled, substantially continuous and monitored vapor flows for uses such as in plasma enhanced vapor deposition. The vaporizing apparatus comprises a fluid passageway 212 along which are a pumping means 220, a vaporizing means 226 and a flowing means 260 all in fluid communication with the passageway. The vaporizing means 226 vaporizes liquid pumped from the pumping means 220 and includes a heat sink layer 228, a heated layer 234, and a portion 212a of the passageway sandwiched therebetween. The vaporizing apparatus 71 can sustain a floe of organosilicon vapor at a flow rate of about 1 to about 100 SCCM for as long as desired.
Inventors
- 👤 John T. Felts
- 👤 Robert R. Hoffman
- 👤 James J. Hofman
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-03 13:26
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/448; C23C16/4485
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
120 words
A vaporizing apparatus 71 useful for delivering a controlled flow of vapor characterised by : a fluid passageway 212 defining an inlet 214 and an outlet 216; means 220 for pumping metered quantities of a liquid having a boiling point above ambient temperature from the inlet 214 towards the outlet 216; means 226 for vaporizing the liquid, the vaporizing means 226 being in fluid communication with the passageway 212 downstream of the pumping means 220, the vaporizing means 226 including a heat sink layer 228, a heated layer 234, and a portion 212a of the passageway 212 sandwiched therebetween; and means 260 for flowing the vaporized liquid towards the outlet 216 while maintaining the flow at a predetermined flow rate.
Claim 2
Dependent Claim
120 words
A vaporizing apparatus 71 useful for delivering a controlled flow of vapor characterised by : a fluid passageway 212 defining an inlet 214 and an outlet 216; means 220 for pumping metered quantities of a liquid having a boiling point above ambient temperature from the inlet 214 towards the outlet 216; means 226 for vaporizing the liquid, the vaporizing means 226 being in fluid communication with the passageway 212 downstream of the pumping means 220, the vaporizing means 226 including a heat sink layer 228, a heated layer 234, and a portion 212a of the passageway 212 sandwiched therebetween; and means 260 for flowing the vaporized liquid towards the outlet 216 while maintaining the flow at a predetermined flow rate.
Claim 3
Dependent Claim
35 words
The vaporizing apparatus as in claim 1 characterised by : means 270 for isolating the vaporized liquid from the outlet 216 upstream of the flowing means 260 and in fluid communication with the passageway 212.
Claim 4
Dependent Claim
32 words
The vaporizing apparatus as in claim 1 or 2 characterised by : means 274 for controlling a pressure drop in the passageway 212 of vaporized liquid upstream of the flowing means 260.
Claim 5
Dependent Claim
38 words
The vaporizing apparatus as in claim 1, 2 or 3 characterised in that the passageway portion 212a of the vaporizing means 226 is in heat conductive communication with the heated layer 234 and with the heat sink 228.
Claim 6
Dependent Claim
50 words
The vaporizing apparatus as claimed in any one of the claims 1 to 4 characterised in that the heated layer 234 of the vaporizing means 226 includes at least one temperature controller 240 adapted to maintain the heated layer 234 at a temperature above the boiling point of the liquid.
Claim 7
Dependent Claim
39 words
The vaporizing apparatus as claimed in any one of claims 1 to 5 characterised in that the vaporizing means 226 include a thermal barrier 246 adjacent to the heated layer 234 and outward with respect the passageway portion 212a.
Claim 8
Dependent Claim
38 words
The vaporizing apparatus as claimed in any one of claims 1 to 6 characterised in that the heat sink layer 228 is tubular, defines an outer surface, and the passageway portion 212a is carried upon the outer surface.
Claim 9
Dependent Claim
57 words
The vaporizing apparatus as claimed in any one of claims 1 to 7 characterised in that the flowing means 260 includes a flow meter 264 and a control valve 262, the flow meter 264 and control valve 262 being in fluid communication with the passageway 212, the control valve 262 being upstream of the flow meter 264.
Claim 10
Dependent Claim
34 words
The vaporizing apparatus as in claim 8 characterised in that the flow meter 264 is adapted to open and close the control valve 262 to prevent condensation of flowing vapor within the flow meter.
Claim 11
Dependent Claim
60 words
A vaporizer useful with a liquid having a boiling point above ambient temperature characterised by : a heat sink 228 defining an outer surface; a fluid flow path 212a carried by and in conductive heat communication with the outer surface; and means 234 for heating the fluid flow path 212a to a predetermined temperature and for maintaining the predetermined temperature.
Claim 12
Dependent Claim
60 words
A vaporizer useful with a liquid having a boiling point above ambient temperature characterised by : a heat sink 228 defining an outer surface; a fluid flow path 212a carried by and in conductive heat communication with the outer surface; and means 234 for heating the fluid flow path 212a to a predetermined temperature and for maintaining the predetermined temperature.
Claim 13
Dependent Claim
29 words
The vaporizer as in claim 10 characterised in that the heating and maintaining means include an electrically heated layer 234 enveloping a portion 212a of the fluid flow path.
Claim 14
Dependent Claim
26 words
The vaporizer as in claim 11 characterised in that the fluid flow path 212a is sandwiched between the heat sink 228 and the heated layer 234.
Claim 15
Dependent Claim
23 words
The vaporizer as claimed in any one of claims 10 to 12, characterised in that the heat sink 228 has a cylindrical configuration.
Claim 16
Dependent Claim
62 words
The vaporizer as claimed in any one of claims 10 to 13, characterised in that the heating and maintaining means 234 includes a temperature controller 240 and at least one thermocouple 242, the termocouple 242 adapted to send a signal to the temperature controller 240 responsive to temperature, the thermocouple 242 being attached to the outer surface of the heat sink 228.
Claim 17
Dependent Claim
21 words
The vaporizer as in claim 14, characterised by means 246 for insulating at least a portion of the heated layer 234.
References Cited (Backward Citations)
No citation records indexed.
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