Apparatus and method for enhanced chemical processing in high pressure and atmospheric plasmas produced by high frequency electro-magnetic waves

Claim 1

An apparatus which creates a plasma for enhanced chemical processing of gaseous fluid at a wide range of pressures comprising:- (a) an electro-magnetic resonator cavity having conductive walls; (b) an electro-magnetic radiation source which produces electro-magnetic radiation having a predetermined frequency and power level for breaking down said gaseous fluid and creating a plasma within said electro-magnetic resonator cavity; (c) an electro-magnetic guiding wave structure connecting said electro-magnetic radiation source to said electro-magnetic cavity for transmitting said electro-magnetic radiation from said electro-­magnetic radiation source to said electro-magnetic cavity; (d) an intake port in said conductive wall of said electro-­magnetic resonator cavity for introducing said gaseous fluid into said electro-magnetic resonator cavity; (e) an exhaust port in said conductive wall of said electro-­magnetic resonator cavity for discharging processed gaseous fluid from said electro-magnetic resonator cavity; and (f) plasma confinement means which includes a source of gaseous fluid flowing from a direction of said electro-magnetic radiation guiding wave structure into said electro-magnetic resonator cavity for confining and stabilizing said plasma within said electro-­magnetic resonator cavity.

Claim 2

An apparatus which creates a plasma for enhanced chemical processing of gaseous fluid at a wide range of pressures comprising:- (a) an electro-magnetic resonator cavity having conductive walls; (b) an electro-magnetic radiation source which produces electro-magnetic radiation having a predetermined frequency and power level for breaking down said gaseous fluid and creating a plasma within said electro-magnetic resonator cavity; (c) an electro-magnetic guiding wave structure connecting said electro-magnetic radiation source to said electro-magnetic cavity for transmitting said electro-magnetic radiation from said electro-­magnetic radiation source to said electro-magnetic cavity; (d) an intake port in said conductive wall of said electro-­magnetic resonator cavity for introducing said gaseous fluid into said electro-magnetic resonator cavity; (e) an exhaust port in said conductive wall of said electro-­magnetic resonator cavity for discharging processed gaseous fluid from said electro-magnetic resonator cavity; and (f) plasma confinement means which includes a source of gaseous fluid flowing from a direction of said electro-magnetic radiation guiding wave structure into said electro-magnetic resonator cavity for confining and stabilizing said plasma within said electro-­magnetic resonator cavity.

Claim 5

The apparatus recited in any one of claims 1 to 3, wherein said intake port includes an intake aperture for introducing said gaseous fluid into said electro-magnetic resonator cavity without allowing the leakage of said electro-magnetic radiation from said electro-magnetic resonator cavity; and said exhaust port includes an exhaust aperture for discharging the processed gaseous fluid from said electro-magnetic resonator cavity without allowing the leakage of said electro-magnetic radiation from said electro-magnetic resonator cavity.

Claim 6

An apparatus which creates a plasma for enhanced chemical processing of gaseous fluid at a wide range of pressures, comprising: (a) an electro-magnetic resonator cavity having conductive walls, which includes (i) an outer cavity portion having conductive walls coupled to an electro-magnetic guiding wave structure; and (ii) an inner gap portion connected to and contiguous with said conductive walls of said outer cavity portion, said inner gap portion having a first and a second conductive wall forming a capacitive region for generating an electric field within said inner gap portion sufficient for plasma breakdown of said gaseous fluid, said inner gap portion and said outer cavity portion having a common central axis and being aligned approximately perpendicular to said first and second conductive walls of said gap portion and to said common central axis; (b) an electro-magnetic radiation source which produces electro-magnetic radiation having a predetermined frequency and power level for breaking down said gaseous fluid and creating a plasma within said electro-magnetic resonator cavity; (c) an electro-magnetic guiding wave structure connecting said electro-magnetic radiation source to said electro-magnetic cavity for transmitting said electro-magnetic radiation from said electro-­magnetic radiation source to said electro-magnetic cavity; (d) an intake port in said conductive wall of said electro-­magnetic resonator cavity for introducing said gaseous fluid into said electro-magnetic resonator cavity; (e) an exhaust port in said conductive wall of said electro-­magnetic resonator cavity for discharging processed gaseous fluid from said electro-magnetic resonator cavity; and (f) plasma confinement means which includes a source of gaseous fluid flowing from a direction of said electro-magnetic guiding wave structure, into said electro-magnetic resonator cavity, directed at said inner gap portion for confining and stabilizing said plasma within said electro- magnetic resonator cavity.

Claim 7

An apparatus which creates a plasma for enhanced chemical processing of gaseous fluid at a wide range of pressures, comprising: (a) an electro-magnetic resonator cavity having conductive walls, which includes (i) an outer cavity portion having conductive walls coupled to an electro-magnetic guiding wave structure; and (ii) an inner gap portion connected to and contiguous with said conductive walls of said outer cavity portion, said inner gap portion having a first and a second conductive wall forming a capacitive region for generating an electric field within said inner gap portion sufficient for plasma breakdown of said gaseous fluid, said inner gap portion and said outer cavity portion having a common central axis and being aligned approximately perpendicular to said first and second conductive walls of said gap portion and to said common central axis; (b) an electro-magnetic radiation source which produces electro-magnetic radiation having a predetermined frequency and power level for breaking down said gaseous fluid and creating a plasma within said electro-magnetic resonator cavity; (c) an electro-magnetic guiding wave structure connecting said electro-magnetic radiation source to said electro-magnetic cavity for transmitting said electro-magnetic radiation from said electro-­magnetic radiation source to said electro-magnetic cavity; (d) an intake port in said conductive wall of said electro-­magnetic resonator cavity for introducing said gaseous fluid into said electro-magnetic resonator cavity; (e) an exhaust port in said conductive wall of said electro-­magnetic resonator cavity for discharging processed gaseous fluid from said electro-magnetic resonator cavity; and (f) plasma confinement means which includes a source of gaseous fluid flowing from a direction of said electro-magnetic guiding wave structure, into said electro-magnetic resonator cavity, directed at said inner gap portion for confining and stabilizing said plasma within said electro- magnetic resonator cavity.

Claim 9

An apparatus for creating a plasma for enhanced chemical processing of gaseous fluid at a wide range of pressures, comprising: (a) a reentrant electro-magnetic cavity including an outer coaxial portion and an inner gap portion; (b) an electro-magnetic radiation source which produces electro-magnetic radiation having a predetermined frequency and power level for breaking down said gaseous fluid and creating a plasma within said electro-magnetic resonator cavity; (c) an electro-magnetic guiding wave structure connecting said electro-magnetic radiation source to said electro-magnetic cavity for transmitting said electro-magnetic radiation from said electro-­magnetic radiation source to said electro-magnetic cavity; (d) an intake port in said conductive wall of said electro-­magnetic resonator cavity for introducing said gaseous fluid into said electro-magnetic resonator cavity; (e) an exhaust port in said conductive wall of said electro-­magnetic resonator cavity for discharging processed gaseous fluid from said electro-magnetic resonator cavity; and (f) plasma confinement means which includes a source of gaseous fluid flowing from a direction of said electro-magnetic radiation guiding wave structure, into said electro-magnetic resonator cavity, directed at said inner gap portion for confining and stabilizing said plasma within said electro- magnetic resonator cavity.

Claim 10

An apparatus for creating a plasma for enhanced chemical processing of gaseous fluid at a wide range of pressures, comprising: (a) a reentrant electro-magnetic cavity including an outer coaxial portion and an inner gap portion; (b) an electro-magnetic radiation source which produces electro-magnetic radiation having a predetermined frequency and power level for breaking down said gaseous fluid and creating a plasma within said electro-magnetic resonator cavity; (c) an electro-magnetic guiding wave structure connecting said electro-magnetic radiation source to said electro-magnetic cavity for transmitting said electro-magnetic radiation from said electro-­magnetic radiation source to said electro-magnetic cavity; (d) an intake port in said conductive wall of said electro-­magnetic resonator cavity for introducing said gaseous fluid into said electro-magnetic resonator cavity; (e) an exhaust port in said conductive wall of said electro-­magnetic resonator cavity for discharging processed gaseous fluid from said electro-magnetic resonator cavity; and (f) plasma confinement means which includes a source of gaseous fluid flowing from a direction of said electro-magnetic radiation guiding wave structure, into said electro-magnetic resonator cavity, directed at said inner gap portion for confining and stabilizing said plasma within said electro- magnetic resonator cavity.

Claim 12

The apparatus recited in any one of claims 5 to 8, wherein said outer cavity or coaxial portion includes a cylindrical conductive outer wall having a circular cross-section approximately perpendicular to said common central axis, said cylindrical conductive outer wall being axially aligned with said common central axis, or said outer cavity or coaxial portion includes a conductive outer wall having a polygonal cross-section about perpendicular to said common central axis. said conductive outer wall being axially aligned with said common central axis.

Claim 13

The apparatus recited in any one of claims 5 to 9, wherein said intake port and said exhaust port are positioned across said inner gap portion thereby directing the entire flow of said gaseous fluids through the electric field generated in said inner gap portion.

Claim 14

The apparatus recited in any one of claims 1 to 10, wherein said plasma confinement means includes an inner conduit connected to said electro-magnetic resonant cavity.

Claim 18

The apparatus recited in any one of claims 1 to 14, further comprising tuning means for adjusting the resonant frequency of said electro-magnetic resonator cavity to match the frequency of the electro-magnetic radiation source by altering a dimension of said electro-magnetic resonator cavity.

Claim 22

The apparatus recited in any one of claims 1 to 18, wherein said guiding wave structure includes impedance matching means at the interface of the guiding wave structure and the electro-­magnetic resonator cavity for matching the impedance of the guiding wave structure to the impedance of the electro-magnetic resonator cavity.

Claim 23

A method for enhanced chemical processing of gaseous fluid, comprising the steps of: (a) introducing a gaseous source of radicals into an electro-magnetic resonator cavity having conductive walls; (b) transmitting electro-magnetic radiation from an electro-magnetic radiation source through a guiding wave structure coupled to said electro-magnetic resonator cavity, said electro-magnetic radiation having a predetermined frequency and power level to create an electric field for breaking down said gaseous source of radicals into free radicals and creating a plasma within said electro-magnetic resonator cavity; (c) discharging said free radicals from said electro-­magnetic resonator cavity through an exhaust means; and (d) combining said free radicals with said gaseous fluid to react with and chemically process said gaseous fluid.

Claim 24

A method for enhanced chemical processing of gaseous fluid, comprising the steps of: (a) introducing a gaseous source of radicals into an electro-magnetic resonator cavity having conductive walls; (b) transmitting electro-magnetic radiation from an electro-magnetic radiation source through a guiding wave structure coupled to said electro-magnetic resonator cavity, said electro-magnetic radiation having a predetermined frequency and power level to create an electric field for breaking down said gaseous source of radicals into free radicals and creating a plasma within said electro-magnetic resonator cavity; (c) discharging said free radicals from said electro-­magnetic resonator cavity through an exhaust means; and (d) combining said free radicals with said gaseous fluid to react with and chemically process said gaseous fluid.

Claim 26

A method for enhanced chemical processing of gaseous fluid, comprising the steps of: (a) introducing a gaseous source of radicals into an reentrant electro-magnetic resonator cavity having a small gap portion; (b) transmitting electro-magnetic radiation from an electro-magnetic radiation source through a guiding wave structure coupled to said reentrant electro-magnetic resonator cavity, said electro-magnetic radiation having a predetermined frequency and power level to create an electric field for breaking down said gaseous source of radicals into free radicals and creating a plasma within said electro-magnetic resonator cavity; (c) discharging said free radicals from said reentrant electro-magnetic resonator cavity through an exhaust means; and (d) combining said free radicals with said gaseous fluid to react with and chemically process said gaseous fluid.

Claim 27

A method for enhanced chemical processing of gaseous fluid, comprising the steps of: (a) introducing a gaseous source of radicals into an reentrant electro-magnetic resonator cavity having a small gap portion; (b) transmitting electro-magnetic radiation from an electro-magnetic radiation source through a guiding wave structure coupled to said reentrant electro-magnetic resonator cavity, said electro-magnetic radiation having a predetermined frequency and power level to create an electric field for breaking down said gaseous source of radicals into free radicals and creating a plasma within said electro-magnetic resonator cavity; (c) discharging said free radicals from said reentrant electro-magnetic resonator cavity through an exhaust means; and (d) combining said free radicals with said gaseous fluid to react with and chemically process said gaseous fluid.

Claim 29

A method for enhanced chemical processing of gaseous fluid, comprising the steps of: (a) introducing said gaseous fluid into an intake means of a reentrant electro-magnetic resonator cavity having conductive walls; (b) transmitting electro-magnetic radiation from an electro-magnetic radiation source through a guiding wave structure coupled to said electro-magnetic resonator cavity, said electro-­magnetic radiation having a predetermined frequency and power level to create an electric field for breaking down said gaseous fluid and creating a plasma within said electro-magnetic resonator cavity; (c) directing a flow of gaseous fluid from the direction of said guiding wave structure at said plasma inside said electromagnetic resonator cavity for containing and stabilizing said plasma within said electro-magnetic resonator cavity; and (d) discharging said processed gaseous fluid from said electro-magnetic resonator cavity through an exhaust means.

Claim 30

A method for enhanced chemical processing of gaseous fluid, comprising the steps of: (a) introducing said gaseous fluid into an intake means of a reentrant electro-magnetic resonator cavity having conductive walls; (b) transmitting electro-magnetic radiation from an electro-magnetic radiation source through a guiding wave structure coupled to said electro-magnetic resonator cavity, said electro-­magnetic radiation having a predetermined frequency and power level to create an electric field for breaking down said gaseous fluid and creating a plasma within said electro-magnetic resonator cavity; (c) directing a flow of gaseous fluid from the direction of said guiding wave structure at said plasma inside said electromagnetic resonator cavity for containing and stabilizing said plasma within said electro-magnetic resonator cavity; and (d) discharging said processed gaseous fluid from said electro-magnetic resonator cavity through an exhaust means.

Claim 32

A method for enhanced chemical processing of gaseous fluid, comprising the steps of: (a) introducing said gaseous fluid into an intake means of a reentrant electro-magnetic resonator cavity having a small gap portion; (b) transmitting electro-magnetic radiation from an electro-magnetic radiation source through a guiding wave structure coupled to said reentrant electro-magnetic resonator cavity, said electro-magnetic radiation having a predetermined frequency and power level to create an electric field for breaking down said gaseous fluid and creating a plasma within said electro-magnetic resonator cavity; (c) directing a flow of gaseous fluid from the direction of said guiding wave structure at said small gap portion inside said reentrant electro-magnetic resonator cavity for containing and stabilizing said plasma within said reentrant electro-magnetic resonator cavity; and (d) discharging said processed gaseous fluid from said reentrant electro-magnetic resonator cavity through an exhaust means.

Claim 33

A method for enhanced chemical processing of gaseous fluid, comprising the steps of: (a) introducing said gaseous fluid into an intake means of a reentrant electro-magnetic resonator cavity having a small gap portion; (b) transmitting electro-magnetic radiation from an electro-magnetic radiation source through a guiding wave structure coupled to said reentrant electro-magnetic resonator cavity, said electro-magnetic radiation having a predetermined frequency and power level to create an electric field for breaking down said gaseous fluid and creating a plasma within said electro-magnetic resonator cavity; (c) directing a flow of gaseous fluid from the direction of said guiding wave structure at said small gap portion inside said reentrant electro-magnetic resonator cavity for containing and stabilizing said plasma within said reentrant electro-magnetic resonator cavity; and (d) discharging said processed gaseous fluid from said reentrant electro-magnetic resonator cavity through an exhaust means.

Claim 35

The method recited in any one of claims 20 to 23, wherein said flow of gaseous fluid is introduced through an intake means in said guiding wave structure.

Claim 38

The method recited in any one of claims 20 to 30, wherein said gaseous source of free radicals is selected from the group consisting of water, methane, acetylene and ammonia.

Claim 39

The method recited in any one of claims 20 to 31, wherein said gaseous fluid is selected from the group consisting of: NO x , chlorinated hydrocarbons, and SO₂.

Claim 40

The method recited in any one of claims 20 to 32, wherein (a) said gaseous source of radicals is ionized by said electric field in said cavity according to the formula: H₂O + e⁻→ H₂O⁺ + 2e⁻ (b) said ionized gaseous source of radicals is dissociated into a plasma containing the free radicals H and OH according to the formula: H₂O⁺ + e⁻→ OH + H (c) said free radicals combine with said gaseous fluid to react and chemically process said gaseous fluids according to the formula:

Claim 41

An apparatus which creates a plasma for enhanced chemical processing of gaseous fluid at a wide range of pressures comprising:- (a) an electro-magnetic resonator cavity having conductive walls; (b) an electro-magnetic guiding wave structure adapted to connect an electro-magnetic radiation source to said electro-magnetic cavity for transmitting electro-magnetic radiation from said electro-­magnetic radiation source to said electro-magnetic cavity, said electro-magnetic radiation source being capable of producing electro-­magnetic radiation having a predetermined frequency and power level for breaking down said gaseous fluid and creating a plasma within said electro-magnetic resonator cavity; (c) an intake port in said conductive wall of said electro-­magnetic resonator cavity for introducing said gaseous fluid into said electro-magnetic resonator cavity; (d) an exhaust port in said conductive wall of said electro-­magnetic resonator cavity for discharging processed gaseous fluid from said electro-magnetic resonator cavity; and (e) plasma confinement means which includes means adapted in operation to direct a gaseous fluid flowing from a direction of said electro-magnetic radiation guiding wave structure into said electro-magnetic resonator cavity for confining and stabilizing said plasma within said electro-magnetic resonator cavity.

Claim 42

An apparatus which creates a plasma for enhanced chemical processing of gaseous fluid at a wide range of pressures comprising:- (a) an electro-magnetic resonator cavity having conductive walls; (b) an electro-magnetic guiding wave structure adapted to connect an electro-magnetic radiation source to said electro-magnetic cavity for transmitting electro-magnetic radiation from said electro-­magnetic radiation source to said electro-magnetic cavity, said electro-magnetic radiation source being capable of producing electro-­magnetic radiation having a predetermined frequency and power level for breaking down said gaseous fluid and creating a plasma within said electro-magnetic resonator cavity; (c) an intake port in said conductive wall of said electro-­magnetic resonator cavity for introducing said gaseous fluid into said electro-magnetic resonator cavity; (d) an exhaust port in said conductive wall of said electro-­magnetic resonator cavity for discharging processed gaseous fluid from said electro-magnetic resonator cavity; and (e) plasma confinement means which includes means adapted in operation to direct a gaseous fluid flowing from a direction of said electro-magnetic radiation guiding wave structure into said electro-magnetic resonator cavity for confining and stabilizing said plasma within said electro-magnetic resonator cavity.

Claim 43

An apparatus which creates a plasma for enhanced chemical processing of gaseous fluid at a wide range of pressures, comprising: (a) an electro-magnetic resonator cavity having conductive walls, which includes (i) an outer cavity portion having conductive walls coupled to an electro-magnetic guiding wave structure; and (ii) an inner gap portion connected to and contiguous with said conductive walls of said outer cavity portion, said inner gap portion having a first and a second conductive wall forming a capacitive region for generating an electric field within said inner gap portion sufficient for plasma breakdown of said gaseous fluid, said inner gap portion and said outer cavity portion having a common central axis and being aligned approximately perpendicular to said first and second conductive walls of said gap portion and to said common central axis; (b) an electro-magnetic guiding wave structure adapted to connect an electro-magnetic radiation source to said electro-magnetic cavity for transmitting electro-magnetic radiation from said electro-­magnetic radiation source to said electro-magnetic cavity, said electro-magnetic radiation source being capable of producing electro-­magnetic radiation having a predetermined frequency and power level for breaking down said gaseous fluid and creating a plasma within said electro-magnetic resonator cavity; (c) an intake port in said conductive wall of said electro-­magnetic resonator cavity for introducing said gaseous fluid into said electro-magnetic resonator cavity; (d) an exhaust port in said conductive wall of said electro-­magnetic resonator cavity for discharging processed gaseous fluid from said electro-magnetic resonator cavity; and (e) plasma confinement means which includes means adapted in operation to direct a gaseous fluid from a direction of said electro-magnetic guiding wave structure, into said electro-magnetic resonator cavity. directed at said inner gap portion for confining and stabilizing said plasma within said electro- magnetic resonator cavity.

Claim 44

An apparatus which creates a plasma for enhanced chemical processing of gaseous fluid at a wide range of pressures, comprising: (a) an electro-magnetic resonator cavity having conductive walls, which includes (i) an outer cavity portion having conductive walls coupled to an electro-magnetic guiding wave structure; and (ii) an inner gap portion connected to and contiguous with said conductive walls of said outer cavity portion, said inner gap portion having a first and a second conductive wall forming a capacitive region for generating an electric field within said inner gap portion sufficient for plasma breakdown of said gaseous fluid, said inner gap portion and said outer cavity portion having a common central axis and being aligned approximately perpendicular to said first and second conductive walls of said gap portion and to said common central axis; (b) an electro-magnetic guiding wave structure adapted to connect an electro-magnetic radiation source to said electro-magnetic cavity for transmitting electro-magnetic radiation from said electro-­magnetic radiation source to said electro-magnetic cavity, said electro-magnetic radiation source being capable of producing electro-­magnetic radiation having a predetermined frequency and power level for breaking down said gaseous fluid and creating a plasma within said electro-magnetic resonator cavity; (c) an intake port in said conductive wall of said electro-­magnetic resonator cavity for introducing said gaseous fluid into said electro-magnetic resonator cavity; (d) an exhaust port in said conductive wall of said electro-­magnetic resonator cavity for discharging processed gaseous fluid from said electro-magnetic resonator cavity; and (e) plasma confinement means which includes means adapted in operation to direct a gaseous fluid from a direction of said electro-magnetic guiding wave structure, into said electro-magnetic resonator cavity. directed at said inner gap portion for confining and stabilizing said plasma within said electro- magnetic resonator cavity.

Claim 45

An apparatus for creating a plasma for enhanced chemical processing of gaseous fluid at a wide range of pressures, comprising: (a) a reentrant electro-magnetic cavity including an outer coaxial portion and an inner gap portion; (b) an electro-magnetic guiding wave structure adapted to connect an electro-magnetic radiation source to said electro-magnetic cavity for transmitting electro-magnetic radiation from said electro-­magnetic radiation source to said electro-magnetic cavity said electro-magnetic radiation source being capable of producing electro-­magnetic radiation having a predetermined frequency and power level for breaking down said gaseous fluid and creating a plasma within said electro-magnetic resonator cavity; (c) an intake port in said conductive wall of said electro-­magnetic resonator cavity for introducing said gaseous fluid into said electro-magnetic resonator cavity; (d) an exhaust port in said conductive wall of said electro-­magnetic resonator cavity for discharging processed gaseous fluid from said electro-magnetic resonator cavity; and (e) plasma confinement means which includes means adapted in operation to direct gaseous fluid from a direction of said electro-­magnetic radiation guiding wave structure, into said electro-magnetic resonator cavity, directed at said inner gap portion for confining and stabilizing said plasma within said electro- magnetic resonator cavity.

Claim 46

An apparatus for creating a plasma for enhanced chemical processing of gaseous fluid at a wide range of pressures, comprising: (a) a reentrant electro-magnetic cavity including an outer coaxial portion and an inner gap portion; (b) an electro-magnetic guiding wave structure adapted to connect an electro-magnetic radiation source to said electro-magnetic cavity for transmitting electro-magnetic radiation from said electro-­magnetic radiation source to said electro-magnetic cavity said electro-magnetic radiation source being capable of producing electro-­magnetic radiation having a predetermined frequency and power level for breaking down said gaseous fluid and creating a plasma within said electro-magnetic resonator cavity; (c) an intake port in said conductive wall of said electro-­magnetic resonator cavity for introducing said gaseous fluid into said electro-magnetic resonator cavity; (d) an exhaust port in said conductive wall of said electro-­magnetic resonator cavity for discharging processed gaseous fluid from said electro-magnetic resonator cavity; and (e) plasma confinement means which includes means adapted in operation to direct gaseous fluid from a direction of said electro-­magnetic radiation guiding wave structure, into said electro-magnetic resonator cavity, directed at said inner gap portion for confining and stabilizing said plasma within said electro- magnetic resonator cavity.