EP0286191A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Vacuum arc ion source
Assignee: SODERN SA
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Filing: 1988-04-06
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Granted: —
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Expires: 2008-04-06
Abstract
Abstract Device for eliminating splashes of microdroplets of matter which are emitted by a vacuum-arc ion source comprising a cathode (2) emitting a plasma (1), and a suitably polarised anode (3), and in which the microsplashes are removed by recovery means consisting of polarised or nonpolarised receptacles (7, 10), or by means (12a, 12b) of separating the microdroplets from the plasma, the combination of these means ensuring complete removal of the microsplashes. …<??>Application to ion implanters. …<IMAGE>…
Inventors
- 👤 Henri Société Civile S.P.I.D. Bernardet
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-07 19:54
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/022; H01J27/08
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
US4191888A
Cited
EP0094473A2
Cited
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