EP0285132A2
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EP
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Method for producing thin film of oxide superconductor
Assignee: Sumitomo Electric Industries Ltd
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Filing: 1988-03-30
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Granted: —
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Expires: 2008-03-30
Abstract
Abstract A thin film of an oxide superconductor having a homogeneous composition and less oxygen defects is produced by independently vaporizing at least one material selected from the group consisting of the elements of Ia, IIa and IIIa groups of the periodic table and their compounds and at least one material selected from the group consisting of the elements of Ib, IIb and IIIb groups of the periodic table and their compounds in the presence of molecular oxygen or oxygen ions and depositing the vaporized materials together with oxygen on a substrate to form a thin film of the oxide superconductor.
Inventors
- 👤 Jun C/O Osaka Works Shioya
- 👤 Yoichi C/O Osaka Works Yamaguchi
- 👤 Akira C/O Osaka Works Mizoguchi
- 👤 Noriyuki C/O Osaka Works Yoshida
- 👤 Kenichi C/O Osaka Works Takahashi
- 👤 Kenji C/O Osaka Works Miyazaki
- 👤 Satoshi C/O Osaka Works Takano
- 👤 Noriki C/O Osaka Works Hayashi
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-30 01:16
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B35/00; C04B35/01; C04B35/45; C04B35/4504; C04B41/45; C04B41/50; C04B41/5072; C04B41/5074; C04B41/52; C04B41/80; C04B41/81; C04B41/85; C04B41/89; H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0324; H10N60/0381; H10N60/0548; H10N60/0801; Y; Y10; Y10S; Y10S505/00; Y10S505/70; Y10S505/704; Y10S505/725; Y10S505/73; Y10S505/732
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
94 words
A method for producing a thin film of an oxide superconductor comprising independently vaporizing at least one material selected from the group consisting of the elements of Ia, IIa and IIIa groups of the periodic table and their compounds and at least one material selected from the group consisting of the elements of Ib, IIb and IIIb groups of the periodic table and their compounds in the presence of molecular oxygen or oxygen ions and depositing the vaporized materials together with oxygen on a substrate to form a thin film of the oxide superconductor.
Claim 2
Independent Claim
94 words
A method for producing a thin film of an oxide superconductor comprising independently vaporizing at least one material selected from the group consisting of the elements of Ia, IIa and IIIa groups of the periodic table and their compounds and at least one material selected from the group consisting of the elements of Ib, IIb and IIIb groups of the periodic table and their compounds in the presence of molecular oxygen or oxygen ions and depositing the vaporized materials together with oxygen on a substrate to form a thin film of the oxide superconductor.
Claim 3
Dependent Claim
20 words
The method according to claim 1, wherein the materials are deposited on the substrate in the presence of oxygen ions.
Claim 4
Dependent Claim
20 words
The method according to claim 1, wherein the materials are deposited on the substrate in the presence of molecular oxygen.
Claim 5
Dependent Claim
12 words
The method according to claim 1, wherein the vaporized material is ionized.
Claim 6
Dependent Claim
15 words
The method according to claim 1, wherein the compound of the element is an oxide.
Claim 7
Dependent Claim
29 words
The method according to claim 5, wherein the oxide of the element of IIIa group is at least one selected from the group consisting of La₂O₃, Y₂O₃ and Sc₂O₃.
Claim 8
Dependent Claim
37 words
The method according to claim 1, wherein the the compound of the element is a carbonate, and the carbo nate of IIa group is at least one selected from the group consisting of Ba₂CO₃, SrCO₃ and CaCO₃.
Claim 9
Dependent Claim
28 words
The method according to claim 5, wherein the oxide of the element of Ib group is at least one selected from the group consisting of CuO and AgO.
Claim 10
Dependent Claim
123 words
The method according to claim 1, wherein the oxide superconductor has a composition of the formula: M¹ x M² 1-x M³O₃ (I) or M¹ y M² 2-y M³O₃ (II) wherein M¹ and M² are elements independently selected from the elements of the Ia, IIa and IIIa groups of the periodic table and M³ is an element selected from the elements of the Ib, IIb and IIIb groups of the periodic table. 10. The method according to claim 9, wherein, in the formula (I) or (II), M¹ and M² are elements independently selected from the elements of IIa and IIIa groups of the periodic table and M³ is an element selected from the elements of the Ib group of the periodic table, preferably copper.
Claim 11
Dependent Claim
49 words
The method according to claim 1, wherein the element of IIa group is one selected from the group consisting of Ba, Sr and Ca, the element of IIIa group is one selected from the group consisting of Sc, Y and La, and the element of Ib group is Cu.
Claim 12
Dependent Claim
17 words
The method according to claim 1, wherein the substrate is made of a flexible elongate ceramic body.
Claim 13
Dependent Claim
15 words
The method according to claim 11, wherein the flexible elongate ceramic body is a tape.
Claim 14
Dependent Claim
16 words
The method according to claim 11, wherein the flexible elongate ceramic body is a round wire.
References Cited (Backward Citations)
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