EP0284190B1
Expired / Lapsed
EP
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Enhanced cvd method for deposition of carbon
Assignee: Semiconductor Energy Laboratory Co Ltd
•
Filing: 1988-02-18
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Granted: 1992-11-25
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Expires: 2008-02-18
Abstract
No abstract record available.
Inventors
- 👤 Shunpei Yamazaki
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 06:44
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C16/00; C23C16/22; C23C16/26; C23C16/27; C23C16/274; C23C16/06; C23C16/278; C23C16/44; C23C16/50; C23C16/511; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B25/105; C30B29/00; C30B29/02; C30B29/04; Y; Y10; Y10S; Y10S427/00; Y10S427/103; Y10S427/104; Y10S427/106
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
97 words
A chemical vapor deposition (CVD) method for the deposition of a diamond, diamond-like or amorphous carbon film, said method comprising the introduction of a reactive gas comprising a gaseous carbon compound with admixture of nitrogen into a CVD reaction chamber and the application of electromagnetic energy to excite said carbon compound whereby carbon may be deposited by a chemical vapor deposition reaction, the method being characterized in that the admixed nitrogen is introduced as nitrogen gas and/or a gaseous nitrogen compound in an amount such that the deposited carbon contains 0.01 to 1.0 weight % of nitrogen.
Claim 2
Dependent Claim
15 words
A method as claimed in claim 1 wherein the electromagnetic excitation energy includes microwave energy.
Claim 3
Dependent Claim
17 words
A method as claimed in claim 2 wherein the frequency of said microwave energy is 2.45 GHz.
Claim 4
Dependent Claim
51 words
A method as claimed in claim 2 or 3 wherein the reaction chamber is subjected to a magnetic field and the excitation of the reactive gas containing a gaseous carbon compound and nitrogen or a gaseous nitrogen compound by the microwave energy is effected under the influence of said magnetic field.
Claim 5
Dependent Claim
26 words
A method as claimed in claim 4 wherein said deposition is carried out under the influence of a magnetic field of at least 1 kilo Gauss.
Claim 6
Dependent Claim
20 words
A method as claimed in claim 4 or 5 wherein the reactive gas is excited in a mixed cyclotron resonance.
Claim 7
Dependent Claim
29 words
A method as claimed in claim 6 wherein the pressure in said reaction chamber is chosen to be between 13.3N/m² and 4 x 10⁴N/m² (0.1 Torr and 300 Torr).
Claim 8
Independent Claim
15 words
A method as claimed in any preceding claim wherein the gaseous nitrogen compound is ammonia.
Claim 9
Independent Claim
22 words
A method as claimed in any preceding claim wherein said reactive gas includes at least one hydrocarbon constituting said gaseous carbon compound.
Claim 10
Dependent Claim
16 words
A method as claimed in claim 9 wherein the said hydrocarbon comprises C₂H₂, C₂H₄ or C₂H₆.
Claim 11
Independent Claim
18 words
A method as claimed in any preceding claim wherein the reactive gas further includes a gaseous boron compound.
Claim 12
Independent Claim
22 words
A method as claimed in any preceding claim wherein said carbon layer is deposited as a crystalline layer or a microcrystalline layer.
Claim 13
Independent Claim
21 words
A method as claimed in any of claims 1 to 11 wherein said carbon layer is deposited as an amorphous layer.
Claim 14
Independent Claim
31 words
A method as claimed in any preceding claim wherein said carbon layer is repeatedly deposited alternately with the deposition of a BN layer in order to form a super lattice structure.
References Cited (Backward Citations)
No citation records indexed.
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