EP0283256A2
Expired / Lapsed
EP
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Scanning optical microscope
Assignee: Tektronix Inc
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Filing: 1988-03-16
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Granted: —
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Expires: 2008-03-16
Abstract
Abstract A scanning optical microscope is disclosed in which the laser that illuminates the specimen is also used as a component of the optical detector system. This dual use of the laser permits substantial simplification of the microscope optics and the associated scanning mechanism. For example, the beam splitters and other bulk optic components required in prior art devices are replaced by a single optical fiber linking the laser and the specimen. A micro-lens is formed on the terminal end of the fiber to focus the laser light onto the specimen. The optical fiber is mounted over the specimen and its terminal end portion is caused to swing back and forth in reciprocal motion above it, this motion being induced by electromagnetic or electrostatic interaction between the fiber and associated electromagnets or deflection plates. The periodic drive signals that induce this oscillatory fiber motion are synchronized to the fiber's natural mechanical resonant frequency by an optical position detector.
Inventors
- 👤 John H. Mitch
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-27 16:25
CPC Classifications
G; G02; G02B; G02B21/00; G02B21/0004; G02B21/002; G02B21/0024; G02B21/0032
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
126 words
A scanning optical microscope for imaging an object comprising: an optical source; an optical detector; an optical fiber for coupling optical energy from the optical source to the object and for coupling optical energy reflected from the object to the optical detector, said optical fiber having a terminal end for positioning adjacent the object; and scanning means for moving the optical fiber relative to the object, said scanning means including anchor means for holding a portion of the optical fiber stationary at a fixed point so as to define a free end portion of the optical fiber extending from the fixed point to the terminal end, the scanning means further including oscillation means for imparting oscillatory motion to the free end portion of the optical fiber.
Claim 2
Dependent Claim
126 words
A scanning optical microscope for imaging an object comprising: an optical source; an optical detector; an optical fiber for coupling optical energy from the optical source to the object and for coupling optical energy reflected from the object to the optical detector, said optical fiber having a terminal end for positioning adjacent the object; and scanning means for moving the optical fiber relative to the object, said scanning means including anchor means for holding a portion of the optical fiber stationary at a fixed point so as to define a free end portion of the optical fiber extending from the fixed point to the terminal end, the scanning means further including oscillation means for imparting oscillatory motion to the free end portion of the optical fiber.
Claim 3
Dependent Claim
65 words
The scanning optical microscope of claim 1 in which the oscillation means includes: magnetically attractable material attached to the free end portion of the optical fiber; at least one electromagnet adjacent the free end portion of the optical fiber; and excitation means for periodically exciting the electromagnet with electrical energy so as to impart oscillatory motion to the free end portion of the optical fiber.
Claim 4
Dependent Claim
47 words
The scanning optical microscope of claim 2 in which the free end portion of the optical fiber has a natural mechanical period of oscillation and in which the excitation means includes synchronizing means for synchronizing the periodic excitation of the electromagnet with said natural period of oscillation.
Claim 5
Dependent Claim
39 words
The scanning optical microscope of claim 3 in which the synchronizing means comprises position detector means for providing a synchronizing signal to the excitation means when the free end portion of the optical fiber is at a certain point.
Claim 6
Dependent Claim
50 words
The scanning optical microscope of claim 2 in which the means for periodically exciting the electromagnet comprises signal generator means for producing a periodic time varying waveform that excites the electromagnet so as to cause the terminal end of the optical fiber means to move at a more uniform rate.
Claim 7
Dependent Claim
67 words
The scanning optical microscope of claim 1 wherein the oscillation means includes: means for imparting an electrical charge to the free end portion of the optical fiber; at least one electrostatic deflection plate adjacent the free end portion of the optical fiber; and means for periodically exciting the electrostatic deflection plate with electrical energy, thereby imparting oscillatory motion to the free end portion of the optical fiber.
Claim 8
Dependent Claim
73 words
A scanning optical microscope for imaging an object comprising: an optical source; an optical detector; an optical fiber for coupling optical energy from the optical source to the object and for coupling optical energy reflected from the object to the optical detector, said optical fiber having a terminal end and a micro-lens formed on said terminal end; and scanning means for moving the terminal end of the optical fiber relative to the object.
Claim 9
Dependent Claim
73 words
A scanning optical microscope for imaging an object comprising: an optical source; an optical detector; an optical fiber for coupling optical energy from the optical source to the object and for coupling optical energy reflected from the object to the optical detector, said optical fiber having a terminal end and a micro-lens formed on said terminal end; and scanning means for moving the terminal end of the optical fiber relative to the object.
Claim 10
Dependent Claim
16 words
The scanning optical microscope of claim 7 in which the micro-lens is substantially conical in shape.
Claim 11
Dependent Claim
70 words
An optical microscope for imaging an object comprising: a laser; optical means for coupling light from the laser to the object and for coupling light reflected from the object back into the laser, the light reflected back into the laser causing an operational characteristic of the laser to vary; and monitor means for monitoring said operational characteristic, said monitor means further including data processing means for sampling said operational characteristic.
Claim 12
Dependent Claim
70 words
An optical microscope for imaging an object comprising: a laser; optical means for coupling light from the laser to the object and for coupling light reflected from the object back into the laser, the light reflected back into the laser causing an operational characteristic of the laser to vary; and monitor means for monitoring said operational characteristic, said monitor means further including data processing means for sampling said operational characteristic.
Claim 13
Dependent Claim
30 words
The optical microscope of claim 9 in which the monitor means includes optical detector means for receiving light radiated by the laser and for producing an electrical output signal therefrom.
Claim 14
Dependent Claim
22 words
The optical microscope of claim 9 in which the monitor means includes means for monitoring the operating current drawn by the laser.
Claim 15
Dependent Claim
20 words
The optical microscope of claim 9 in which the monitor means includes means for monitoring the voltage across the laser.
Claim 16
Dependent Claim
47 words
The optical microscope of claim 9 in which the laser is operated at a constant power by an automatic gain control circuit and in which the monitor means monitors the automatic gain control circuit so as to detect variations in the electrical operating parameters of the laser.
Claim 17
Dependent Claim
15 words
The optical microscope of claim 9 in which the optical means comprises an optical fiber.
Claim 18
Dependent Claim
35 words
The optical microscope of claim 14 in which the optical fiber has a first end coupled to the laser and a second end adjacent the object and in which the second end includes a micro-lens.
Claim 19
Dependent Claim
130 words
A scanning optical microscope suited for determining the topography of a surface comprising: optical source means for providing optical energy at first and second wavelengths; optical detector means for detecting optical energy at first and second wavelengths and producing first and second outputs corresponding thereto; optical fiber means for coupling optical energy from the optical source means to the surface and for coupling optical energy reflected from the surface to the optical detector means, said optical fiber means having a terminal end for positioning adjacent the surface; scanning means for moving the terminal end of the optical fiber means relative to the surface; and data processing means for resolving topographical ambiguities in the detected surface by reference to differences between the first and second outputs from the optical detector means.
Claim 20
Dependent Claim
130 words
A scanning optical microscope suited for determining the topography of a surface comprising: optical source means for providing optical energy at first and second wavelengths; optical detector means for detecting optical energy at first and second wavelengths and producing first and second outputs corresponding thereto; optical fiber means for coupling optical energy from the optical source means to the surface and for coupling optical energy reflected from the surface to the optical detector means, said optical fiber means having a terminal end for positioning adjacent the surface; scanning means for moving the terminal end of the optical fiber means relative to the surface; and data processing means for resolving topographical ambiguities in the detected surface by reference to differences between the first and second outputs from the optical detector means.
Claim 21
Dependent Claim
35 words
The scanning optical microscope of claim 16 in which the optical source means comprises at least one laser and in which the optical detector means comprises means for monitoring an operational characteristic of the laser.
Claim 22
Dependent Claim
20 words
The scanning optical microscope of claim 16 in which the terminal end of the optical fiber means includes a micro-lens.
References Cited (Backward Citations)
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