EP0283219A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Apparatus for automatically scrubbing a surface
Assignee: HP Inc
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Filing: 1988-03-11
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Granted: —
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Expires: 2008-03-11
Abstract
Abstract The apparatus disclosed removes oxide from the contact pads of the wafer under test. The apparatus has a test probe membrane (1-13) attached to a traveling device (1-3). The traveling device (1-3) attaches to a base (1-5) through one or more constant length pivoting devices (1-7) and one or more variable length springs (1-9). When a wafer pushes against the test probe membrane (1-13), the traveling device (1-3) moves upwards. The constant length pivotal device (1-7) and the variable length springs (1-9) control the sideways motion of the traveling device (1-3). When the traveling device (1-3) lifts from its resting position, it moves sideways and thereby allows the test probe membrane (1-13) to scrub the contact pads of the wafer under test.
Inventors
- 👤 Richard E. Huff
- 👤 Miklos K. Perlaki
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-05 19:10
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R1/07342; G01R1/0735; G01R31/00; G01R31/28; G01R31/2851; G01R31/2886; G01R3/00
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
103 words
An apparatus comprising: a base means (1-5); a travelling means (1-3); a variable length spring means (1-9) attached to said travelling means (1-3) and said base means (1-5); a constant length pivot means (1-7) attached to said travelling means (1-3) and said base means (1-5); and wherein the movement of said travelling means (1-3) away from said base means (1-5) forces said constant length pivot means (1-7) to rotate about said base means (1-5), which forces said variable length spring means (1-9) to expand and thereby permits said travelling means (1-3) to move sideways as it moves away from said base means (1-5).
Claim 2
Independent Claim
103 words
An apparatus comprising: a base means (1-5); a travelling means (1-3); a variable length spring means (1-9) attached to said travelling means (1-3) and said base means (1-5); a constant length pivot means (1-7) attached to said travelling means (1-3) and said base means (1-5); and wherein the movement of said travelling means (1-3) away from said base means (1-5) forces said constant length pivot means (1-7) to rotate about said base means (1-5), which forces said variable length spring means (1-9) to expand and thereby permits said travelling means (1-3) to move sideways as it moves away from said base means (1-5).
Claim 3
Dependent Claim
49 words
An apparatus as claimed in claim 1, for scrubbing the contact pads of a semiconductor wafer, comprising: a test probe means (1-13) attached to said travelling means (1-3) mounted so that said test probe (1-13) scrubs said contact pads of said wafer when the travelling means (1-3) moves sideways.
Claim 4
Dependent Claim
32 words
An apparatus as in claim 1 or 2 wherein said variable length spring means (1-9) and said constant length pivot means (1-7) are attached to different halves of said travelling means (1-3).
Claim 5
Dependent Claim
30 words
An apparatus as in claim 1,2 or 3 wherein said constant length pivot means (1-7) is a leaf spring attached between said base means (1-5) and said travelling means (1-3).
Claim 6
Independent Claim
42 words
An apparatus as in any preceding claim wherein said constant length pivot means (1-7) comprises: a first pivot attached to said travelling means a second pivot attached to said base means; and a rod attached to first pivot and said second pivot.
Claim 7
Independent Claim
72 words
An apparatus as in any preceding claim wherein said variable length spring means (1-9) further comprises: a means for expanding (1-25) in said sideways direction a second constant length pivot means (1-31) attached to said means for expanding (1-25) in said sideways direction; and wherein said rotation of said constant length spring means (1-3) causes said means for expanding (1-25) to expand sideways which forces said travelling means (1-3) to move sideways.
Claim 8
Dependent Claim
43 words
An apparatus as in claim 6 wherein said means for expanding (1-25) is attached to said travelling means (1-3); and said second constant length pivot means (1-31) is a leaf spring attached to said means for expanding (1-25) and said base means (1-5).
Claim 9
Dependent Claim
27 words
An apparatus as in claim 6 or 7 wherein said means for expanding (1-24) in said sideways direction is in integral part of said travelling means (1-3).
Claim 10
Dependent Claim
43 words
An apparatus as in claim 6,7 or 8 wherein said means for expansion (1-25) comprises: an elongated hole (1-29) with the elongated axis perpendicular to the direction of said sideways motion; and two H-shaped holes (1-27) placed adjacent to said elongated hole (1-29).
Claim 11
Independent Claim
53 words
An apparatus as in any preceding claim wherein said variable length spring means (1-9) further comprises: a flexture pivot (4-37) fastened to said base means (4-41); and a confinement slot (4-35) located on said travelling means (4-39) that permits said flexture pivot (4-37) to move in and out of said confinement slot (4-37).
References Cited (Backward Citations)
No citation records indexed.
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