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EP0283003A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Sintering method, fusion welding method, bump formation method and sensor

Assignee: Hitachi Ltd
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Filing: 1988-03-16
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Granted: —
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Expires: 2008-03-16
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Abstract

Abstract A sintering method and fusion welding method of the present invention are characterized in that energy is radiated to the black component of starting materials so as to convert it from the state of an energy absorber to the state of an energy reflector (the state where metallic luster is exhibited). The methods can be utilized effectively for forming the electrode of a sensor or the bump of an electronic component. When applied to the production of the sensor and the electrode, the methods can produce these products by a simple production process and with extremely high producibility.

Inventors

  • 👤 Ryoji Okada
  • 👤 Mitsuaki Haneda
  • 👤 Takeshi Araya
  • 👤 Susumu Hioki

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-23 17:26
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/071; H10W72/077; B; B22; B22F; B22F3/00; B22F3/10; B22F7/00; B22F7/02; B22F7/06; B23; B23K; B23K26/00; B23K26/009; B23K26/18; B23K26/20; B23K26/21; B23K26/24; B23K26/34; B23K26/342; B23K35/00; B23K35/22; B23K35/226; H10W99/00; B22F10/00; B22F10/20; B22F10/28; B22F12/00; B22F12/10; B22F12/13; B22F12/22; B22F12/222; B22F12/226; B22F3/105; B22F2003/1052; B23K2101/00; B23K2101/36; H10W70/00; H10W70/01; H10W70/05; H10W70/60; H10W70/62; H10W70/65; H10W70/654; H10W72/01; H10W72/012; H10W72/01261; H10W72/019; H10W72/01951; H10W72/01961; H10W72/20; H10W72/221; H10W72/222; H10W72/241; H10W72/244; H10W72/701; H10W72/90; H10W72/921; H10W72/922; H10W72/923; H10W72/951; H10W72/952; Y; Y02; Y02P; Y02P10/00; Y02P10/25

Claims Analysis

Total Claims: 47
Claim 1
Independent Claim 60 words
In a method which sinters metallic powder or a mixture of said metallic powder and non-metallic powder by radiating energy thereto, a sintering method characterized in that black ultra-fine particles are used as at least part of said powder and are converted from the state of an energy absorber before sintering to the state of an energy reflector after sintering.
Claim 2
Dependent Claim 60 words
In a method which sinters metallic powder or a mixture of said metallic powder and non-metallic powder by radiating energy thereto, a sintering method characterized in that black ultra-fine particles are used as at least part of said powder and are converted from the state of an energy absorber before sintering to the state of an energy reflector after sintering.
Claim 3
Dependent Claim 27 words
A sintering method according to claim 1, wherein said black ultra-fine particles are ultra-fine particles of a material selected from the group consisting of metals and ceramics.
Claim 4
Dependent Claim 38 words
A sintering method according to claim 1, wherein the radiation quantity of said energy is selected in such a manner as to stop or check the progress of heating of said sintered portion with completion of said sintering.
Claim 5
Dependent Claim 24 words
A sintering method according to claim 1, wherein a radiation source of said energy is selected from a laser beam and an optical beam.
Claim 6
Dependent Claim 89 words
In a method which fuses and welds metallic materials with one another or a metallic material and other members by energy radiation, a fusion welding method characterized in that the surface of at least one of said metallic materials exhibits a black color, the surface of said metal is fused by said energy radiation so that the black portion on the surface of said metal is varnished by said fusion so as to exhibit metallic luster and said metal is converted from a light absorber to a light reflector.
Claim 7
Dependent Claim 89 words
In a method which fuses and welds metallic materials with one another or a metallic material and other members by energy radiation, a fusion welding method characterized in that the surface of at least one of said metallic materials exhibits a black color, the surface of said metal is fused by said energy radiation so that the black portion on the surface of said metal is varnished by said fusion so as to exhibit metallic luster and said metal is converted from a light absorber to a light reflector.
Claim 8
Dependent Claim 39 words
A fusion welding method according to claim 5, wherein the radiation quantity of said energy is selected in such a manner as to stop or check the progress of heating of said fused portion with completion of said fusing.
Claim 9
Dependent Claim 25 words
A fusion welding method according to claim 5, wherein a radiation source of said energy is selected from a laser beam and an optical beam.
Claim 10
Dependent Claim 83 words
In a method which sinters metallic powder or a mixture of said metallic powder and non-metallic powder by radiating energy thereto, a sintering method characterized in that at least the surface of said powder as the object of energy radiation exhibits a black color and is fused and then sintered by radiating energy thereto so that said radiation surface is converted from the state of an energy absorber before fusion and sintering to the state of an energy reflector after fusion and sintering.
Claim 11
Dependent Claim 83 words
In a method which sinters metallic powder or a mixture of said metallic powder and non-metallic powder by radiating energy thereto, a sintering method characterized in that at least the surface of said powder as the object of energy radiation exhibits a black color and is fused and then sintered by radiating energy thereto so that said radiation surface is converted from the state of an energy absorber before fusion and sintering to the state of an energy reflector after fusion and sintering.
Claim 12
Dependent Claim 81 words
In a method which fuses and welds metallic materials with one another or said metallic material and other members by radiating energy thereto, a fusion welding method characterized in that black metallic ultra-fine powder or a material containing said black metallic ultra-fine powder is disposed at a fused portion and is fused by radiating energy thereto so that said fused portion is converted from the state of an energy absorber before fusion to the state of an energy reflector after fusion.
Claim 13
Dependent Claim 81 words
In a method which fuses and welds metallic materials with one another or said metallic material and other members by radiating energy thereto, a fusion welding method characterized in that black metallic ultra-fine powder or a material containing said black metallic ultra-fine powder is disposed at a fused portion and is fused by radiating energy thereto so that said fused portion is converted from the state of an energy absorber before fusion to the state of an energy reflector after fusion.
Claim 14
Dependent Claim 69 words
In a method which sinters metallic powder or a mixture of said metallic powder and non-metallic powder by radiating energy thereto, a sintering method characterized in that black metallic ultra-fine particles are used as said metallic powder and the progress of sintering of the sintered portion due to energy radiation is grasped by a sensor as an energy absorption factor or an energy reflection factor or both of them.
Claim 15
Dependent Claim 69 words
In a method which sinters metallic powder or a mixture of said metallic powder and non-metallic powder by radiating energy thereto, a sintering method characterized in that black metallic ultra-fine particles are used as said metallic powder and the progress of sintering of the sintered portion due to energy radiation is grasped by a sensor as an energy absorption factor or an energy reflection factor or both of them.
Claim 16
Dependent Claim 37 words
A sintering method according to claim 10, wherein energy radiation is stopped at the point of time where said radiation portion changes from an energy absorber to an energy reflector, by the sensing operation of said sensor.
Claim 17
Dependent Claim 114 words
In a method which fuses and welds metallic materials with one another or a metallic material and other members by radiating energy thereto, a fusion welding method characterized in that the surface of at least one of said metallic materials exhibits a black color and is fused by radiating energy thereto so that the black portion on the surface of said metal is varnished by fusion but exhibits metallic luster, and is converted from a light absorber to a light reflector, and the progress of fusion welding of said portion due to said energy radiation is grasped by a sensor as an energy absorption factor or an energy reflection factor or both of them.
Claim 18
Dependent Claim 114 words
In a method which fuses and welds metallic materials with one another or a metallic material and other members by radiating energy thereto, a fusion welding method characterized in that the surface of at least one of said metallic materials exhibits a black color and is fused by radiating energy thereto so that the black portion on the surface of said metal is varnished by fusion but exhibits metallic luster, and is converted from a light absorber to a light reflector, and the progress of fusion welding of said portion due to said energy radiation is grasped by a sensor as an energy absorption factor or an energy reflection factor or both of them.
Claim 19
Dependent Claim 83 words
In a method which sinters metallic powder or a mixture of said metallic powder and non-metallic powder by radiating energy thereto, a sintering method characterized in that at least the surface of said powder as the object of energy radiation exhibits a black color and is fused and then sintered by radiating energy thereto so that said radiated surface is converted from the state of an energy absorber before fusion and sintering to the state of an energy reflector after fusion and sintering.
Claim 20
Dependent Claim 83 words
In a method which sinters metallic powder or a mixture of said metallic powder and non-metallic powder by radiating energy thereto, a sintering method characterized in that at least the surface of said powder as the object of energy radiation exhibits a black color and is fused and then sintered by radiating energy thereto so that said radiated surface is converted from the state of an energy absorber before fusion and sintering to the state of an energy reflector after fusion and sintering.
Claim 21
Dependent Claim 113 words
In a method which fuses and weld metallic materials with one another or a metallic material and other members by radiating energy thereto, a fusion welding method characterized in that black metallic ultra-fine powder or a material containing said black metallic ultra-fine powder is disposed at the fused portion and is fused by radiating energy thereto so that said fused portion is converted from the state of an energy absorber before fusion to the state of an energy reflector after fusion, and the progress of sintering of said fused portion due to energy radiation is grasped by a sensor as an energy absorption factor or an energy reflection factor or both of them.
Claim 22
Dependent Claim 113 words
In a method which fuses and weld metallic materials with one another or a metallic material and other members by radiating energy thereto, a fusion welding method characterized in that black metallic ultra-fine powder or a material containing said black metallic ultra-fine powder is disposed at the fused portion and is fused by radiating energy thereto so that said fused portion is converted from the state of an energy absorber before fusion to the state of an energy reflector after fusion, and the progress of sintering of said fused portion due to energy radiation is grasped by a sensor as an energy absorption factor or an energy reflection factor or both of them.
Claim 23
Dependent Claim 49 words
A sintering method characterized in that a layer containing black metallic ultra-fine particles is formed at a predetermined position on the surface of a substrate and said black metallic ultra-fine particles or said black ultra-fine metallic particles and other contents in a paste are sintered by radiating energy thereto.
Claim 24
Dependent Claim 49 words
A sintering method characterized in that a layer containing black metallic ultra-fine particles is formed at a predetermined position on the surface of a substrate and said black metallic ultra-fine particles or said black ultra-fine metallic particles and other contents in a paste are sintered by radiating energy thereto.
Claim 25
Dependent Claim 20 words
A sintering method according to claim 15, wherein said layer containing said ultra-fine particles is coated in the paste form.
Claim 26
Dependent Claim 48 words
A sintering method according to claim 15, wherein a film of a material having a high reflection factor to said radiation energy is formed in advance on the surface of said substrate before the formation of said layer containing said ultra-fine particles on the surface of said substrate.
Claim 27
Dependent Claim 51 words
A sintering method according to claim 15, wherein a film for improving wettability between the sintered body obtained by said energy radiation and said substrate is formed in advance on the surface of said substrate before the formation of said layer containing said ultra-fine particles on the surface of said substrate.
Claim 28
Dependent Claim 18 words
A sintering method according to claim 16, wherein said paste is printed and coated in a predeter­mined pattern.
Claim 29
Dependent Claim 27 words
A sintering method according to claim 15, wherein after said layer containing said ultra-fine particles is sintered by radiating energy thereto, other unsintered portions are wiped off.
Claim 30
Dependent Claim 38 words
A sintering method according to claim 15, wherein the radiation quantity of said energy is selected in such a manner as to stop or check the progress of heating of said sintered portion with completion of said sintering.
Claim 31
Dependent Claim 24 words
A sintering method according to claim 15, wherein a radiation source of said energy is selected from a laser beam and an optical beam.
Claim 32
Dependent Claim 77 words
When a bump for connecting a lead wire to an IC chip is formed, a method of forming a bump comprising coating metallic powder on said IC which said powder contains black ultra-fine particles, and sintering said coated film by radiating a laser beam thereto so as to convert said ultra-fine particles from the state of a laser beam absorber before sintering to the state of a laser beam reflector after sintering and to form said bump.
Claim 33
Dependent Claim 77 words
When a bump for connecting a lead wire to an IC chip is formed, a method of forming a bump comprising coating metallic powder on said IC which said powder contains black ultra-fine particles, and sintering said coated film by radiating a laser beam thereto so as to convert said ultra-fine particles from the state of a laser beam absorber before sintering to the state of a laser beam reflector after sintering and to form said bump.
Claim 34
Dependent Claim 79 words
When a bump for connecting a lead wire to an IC chip is formed, a method of forming a bump comprising coating metallic powder on said lead wire which said metallic powder contains black ultra-fine particles, and sintering said coated film by radiating a laser beam thereto so as to convert said ultra-fine particles from the state of a laser beam absorber before sintering to the state of a laser beam reflector after sintering and to form said bump.
Claim 35
Dependent Claim 79 words
When a bump for connecting a lead wire to an IC chip is formed, a method of forming a bump comprising coating metallic powder on said lead wire which said metallic powder contains black ultra-fine particles, and sintering said coated film by radiating a laser beam thereto so as to convert said ultra-fine particles from the state of a laser beam absorber before sintering to the state of a laser beam reflector after sintering and to form said bump.
Claim 36
Dependent Claim 46 words
When a bump for connecting a lead wire to an IC chip is formed, a method of forming a bump comprising coating metallic powder on said IC to form a metallic ultra-fine particle film, and sintering said metallic ultra-fine particle film by radiating a laser beam.
Claim 37
Dependent Claim 46 words
When a bump for connecting a lead wire to an IC chip is formed, a method of forming a bump comprising coating metallic powder on said IC to form a metallic ultra-fine particle film, and sintering said metallic ultra-fine particle film by radiating a laser beam.
Claim 38
Dependent Claim 61 words
A method of forming a bump according to claim 25, wherein a film of a material having a high reflection factor to said laser beam and high wettability to the sintered body obtained by laser beam radiation, that is, said bump, is formed in advance on said IC surface before formation of said metallic ultra-fine particle film on said IC surface.
Claim 39
Dependent Claim 39 words
A method of forming a bump according to claim 25, wherein at least two kinds of metallic powder are coated separately to form a multi-layered metallic ultra-fine particle film when said metallic powder is coated on said IC surface.
Claim 40
Dependent Claim 54 words
A method of forming a bump according to claim 25, wherein metallic powder is further coated on the surface of said bump that has once been formed, so as to form a metallic ultra-fine particle film and said metallic ultra-fine particle film is sintered by radiating once again a laser beam to said bump.
Claim 41
Dependent Claim 48 words
When a bump for connecting a lead wire to an IC chip is formed, a method of forming a bump comprising coating metallic powder on said lead wire to form a metallic ultra-fine particle film and sintering said metallic ultra-fine particle film by radiating a laser beam thereto.
Claim 42
Dependent Claim 48 words
When a bump for connecting a lead wire to an IC chip is formed, a method of forming a bump comprising coating metallic powder on said lead wire to form a metallic ultra-fine particle film and sintering said metallic ultra-fine particle film by radiating a laser beam thereto.
Claim 43
Dependent Claim 69 words
A method of forming a bump according to claim 29, wherein a film of a material having a high reflection factor to said laser beam and high wettability to the sintered body obtained by the laser beam radia­tion, that is, said bump, is formed in advance on the surface of said lead wire before the formation of said metallic ultra-fine particle film on the surface of said lead wire.
Claim 44
Dependent Claim 48 words
A method of forming a bump according to claim 29, wherein at least two kinds of metallic powder are coated separately on the surface of said lead wire to form a multi-layered metallic ultra-fine particle film when coating said metallic powder on the surface of said lead wire.
Claim 45
Dependent Claim 54 words
A method of forming a bump according to claim 29, wherein metallic powder is further coated on the surface of said bump that has once been formed, so as to form a metallic ultra-fine particle film, and said metallic ultra-fine particle film is sintered by radiating once again the laser beam to said bump.
Claim 46
Dependent Claim 81 words
In a sensor equipped with a substrate made of an insulating material, an electrode and sensing member disposed on said substrate and a protective film deposited on said substrate so as to cover said electrode and said sensing member, the improvement wherein said electrode consists of a sintered body obtained by radiating energy to metallic powder con­taining black ultra-fine particles or a mixture of said metallic powder and non-metallic powder so as to convert said black component to an energy reflector.
Claim 47
Dependent Claim 81 words
In a sensor equipped with a substrate made of an insulating material, an electrode and sensing member disposed on said substrate and a protective film deposited on said substrate so as to cover said electrode and said sensing member, the improvement wherein said electrode consists of a sintered body obtained by radiating energy to metallic powder con­taining black ultra-fine particles or a mixture of said metallic powder and non-metallic powder so as to convert said black component to an energy reflector.

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