EP0268301A2
Expired / Lapsed
EP
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Method and apparatus for writing a line on a patterned substrate
Assignee: NEC Corp
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Filing: 1987-11-19
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Granted: —
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Expires: 2007-11-19
Abstract
Abstract Method and apparatus for writing a line on a patterned substrate in which a direct writing of a CVD line is performed on at least two of patterned films on a substrate in accordance with the thermal decomposition of a CVD raw material gas which is resulted from the radiation of a laser beam. The laser beam is controlled in its power dependent on the difference between thermal conductivities of the at least two of patterned films to avoid a disconnection of the CVD line, the occurence of thinner portion thereof and so on.
Inventors
- 👤 Fumihiko C/O Nec Corporation Uesugi
- 👤 Yukio C/O Nec Corporation Morishige
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-29 18:24
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/067; H10W20/068; H10P; H10P14/00; H10P14/40; H10P14/412; H10P34/00; H10P34/40; H10P34/42; H10W20/056; H10W20/057
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
103 words
A method for writing a line on a patterned substrate comprising steps of, applying a laser beam to a substrate positioned in an atmosphere of a CVD raw material gas, said substrate having a plurality of patterned films thereon, and scanning said substrate with said laser beam to form a line of a thin film on at least two of said plurality of patterned films in a predetermined scanning direction, wherein a condition under which said laser beam is applied to said substrate is controlled dependent on the difference between thermal conductivities of said at least two of said plurality of patterned films.
Claim 2
Independent Claim
103 words
A method for writing a line on a patterned substrate comprising steps of, applying a laser beam to a substrate positioned in an atmosphere of a CVD raw material gas, said substrate having a plurality of patterned films thereon, and scanning said substrate with said laser beam to form a line of a thin film on at least two of said plurality of patterned films in a predetermined scanning direction, wherein a condition under which said laser beam is applied to said substrate is controlled dependent on the difference between thermal conductivities of said at least two of said plurality of patterned films.
Claim 3
Dependent Claim
62 words
A method for writing a line on a patterned substrate according to claim 1, wherein said laser beam is at least one selected from a laser beam radiated from a continuous wave laser oscillator, a laser beam into which said laser beam radiated from said continuous wave laser oscillator is pulse-modulated, and a pulse laser beam radiated from a pulse laser oscillator.
Claim 4
Dependent Claim
65 words
A method for writing a line on a patterned substrate according to claim 1, wherein said condition is changed by selecting at least one of a pulse modulation of said laser beam, an intensity modulation thereof, the change of a scanning speed of said laser beam, the change of a repetition frequency of said laser beam,and the change of pulse width of said laser beam.
Claim 5
Dependent Claim
33 words
A method for writing a line on a patterned substrate according to claim 1, wherein said condition is changed by converting an original shape of said laser beam into a predetermined shape thereof.
Claim 6
Independent Claim
183 words
An apparatus for writing a line on a patterned substrate comprising, a laser beam source for radiating a laser beam, a CVD cell in which a substrate is positioned and having a window through which said laser beam is passed, said substrate having a plurality of patterned films thereon, an optical means for introducing said laser beam to said CVD cell, a gas supply means for supplying a CVD raw material gas into said CVD cell, means for setting a condition under which said laser beam is applied to said substrate so that a line is written on at least two of said plurality of patterned films due to the thermal decomposition of said CVD raw material, and a stage means on which said CVD cell is provided to be moved in the scanning direction so that said substrate in said CVD cell is scanned through said window by said laser beam, wherein said means for setting a condition is controlled to change said condition dependent upon the difference between thermal conductivities of said at least two of said plurality of patterned films.
Claim 7
Independent Claim
183 words
An apparatus for writing a line on a patterned substrate comprising, a laser beam source for radiating a laser beam, a CVD cell in which a substrate is positioned and having a window through which said laser beam is passed, said substrate having a plurality of patterned films thereon, an optical means for introducing said laser beam to said CVD cell, a gas supply means for supplying a CVD raw material gas into said CVD cell, means for setting a condition under which said laser beam is applied to said substrate so that a line is written on at least two of said plurality of patterned films due to the thermal decomposition of said CVD raw material, and a stage means on which said CVD cell is provided to be moved in the scanning direction so that said substrate in said CVD cell is scanned through said window by said laser beam, wherein said means for setting a condition is controlled to change said condition dependent upon the difference between thermal conductivities of said at least two of said plurality of patterned films.
Claim 8
Dependent Claim
58 words
An apparatus for writing a line on a patterned substrate according to claim 5, wherein said laser beam source includes a continuous wave laser oscillator, and said means for setting a condition includes at least one of a pulse modulator, an intensity modulator, and a beam shape converter respectively provided on a light path of said laser beam.
Claim 9
Dependent Claim
54 words
An apparatus for writing a line on a patterned substrate according to claim 5, wherein said laser beam source includes a pulse laser oscillator, and said means for setting a condition includes at least one of an intensity modulator, and a beam shape converter respectively provided on a light path of said laser beam.
Claim 10
Dependent Claim
30 words
An apparatus for writing a line on a patterned substrate according to claim 5, wherein said stage means is provided on a rotary stage whereby said stage means is rotated.
Claim 11
Dependent Claim
31 words
An apparatus for writng a line on a patterned substrate according to claim 5, wherein said laser beam source includes both a continuous wave laser oscillator and a pulse laser oscillator.
Claim 12
Independent Claim
47 words
An apparatus for writing a line on a patterned substrate according to claims 6 and 7, wherein said beam shape converter is provided above a rotary stage whereby said beam shape converter is rotated, said rotary stage being able to be separated from said beam shape converter.
References Cited (Backward Citations)
No citation records indexed.
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