EP0264122A2
Expired / Lapsed
EP
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Method of producing a composite structure for a semiconductor device
Assignee: Hitachi Ltd
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Filing: 1987-10-14
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Granted: —
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Expires: 2007-10-14
Abstract
Abstract A method of fabricating a composite structure, in which an intermediate member (13; 29) is sandwiched between first and second members (11, 14; 22, 25), is disclosed. In this method, the intermediate member (13; 29) is disposed along the periphery of a spatial region formed between facing surfaces of the first and second members (11, 14; 22, 25) so that the spatial region is enclosed by the intermediate member (13; 29),the fluidity of the. intermediate member (13; 29) is enhanced under an atmosphere having a predetermined pressure, and then the pressure of the atmosphere is increased to make the intermediate member (13; 29) flow into the spatial region.
Inventors
- 👤 Kenichi Mizuishi
- 👤 Masahide Hitachi Koyasudai Tokuda
- 👤 Katuaki Chiba
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-07 14:34
CPC Classifications
H; H10; H10W; H10W40/00; H10W40/70; H10W40/77; H10W40/772; H10W72/00; H10W72/30; H10W72/071; H10W72/073; H10W72/07331; H10W72/07336; H10W72/20; H10W72/251; H10W72/252; H10W72/331; H10W72/351; H10W72/352; H10W72/851; H10W72/874; H10W72/877; H10W72/879
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
114 words
A method of fabricating a composite structure, said composite structure being formed in such a manner that an intermediate member (13; 29) is sandwiched between first and second members (11, 14; 22, 25), said method comprising the steps of: disposing the intermediate member (13; 29) along the periphery of a spatial region formed between facing surfaces of the first and second members (11, 14; 22, 25) so that said spatial region is enclosed by said intermediate members (13; 29); increasing the fluidity of said intermediate member (13; 29) under an atmosphere having a predetermined pressure; and increasing the pressure of said atmosphere to make said intermediate member (13; 29) flow into said spatial region.
Claim 2
Independent Claim
114 words
A method of fabricating a composite structure, said composite structure being formed in such a manner that an intermediate member (13; 29) is sandwiched between first and second members (11, 14; 22, 25), said method comprising the steps of: disposing the intermediate member (13; 29) along the periphery of a spatial region formed between facing surfaces of the first and second members (11, 14; 22, 25) so that said spatial region is enclosed by said intermediate members (13; 29); increasing the fluidity of said intermediate member (13; 29) under an atmosphere having a predetermined pressure; and increasing the pressure of said atmosphere to make said intermediate member (13; 29) flow into said spatial region.
Claim 3
Dependent Claim
41 words
A method of fabricating a composite structure as claimed in Claim 1, wherein the thickness of said intermediate member (29) is greater than the thickness of a spacer (30) which is previously provided between said first and second members (22, 25).
Claim 4
Dependent Claim
123 words
.3. A method of fabricating a composite structure, said composite structure being formed in such a manner that an intermediate member (13; 29) is sandwiched between first and second members (11, 14; 22, 25),said method comprising the steps of: disposing the intermediate member (13; 29) along the pheriphery of a spatial region formed between facing surfaces of the first and second members (11,14;22,25) so that said spatial region is enclosed by said intermediate member (13; 29); reducing the pressure of an atmosphere, said first, second and intermediate members being disposed in said atmosphere; increasing the fluidity of said intermediate member 13; 29) under said atmosphere having a reduced pressure, by heating said intermediate member (13; 29); and increasing the pressure of said atmosphere.
Claim 5
Dependent Claim
123 words
.3. A method of fabricating a composite structure, said composite structure being formed in such a manner that an intermediate member (13; 29) is sandwiched between first and second members (11, 14; 22, 25),said method comprising the steps of: disposing the intermediate member (13; 29) along the pheriphery of a spatial region formed between facing surfaces of the first and second members (11,14;22,25) so that said spatial region is enclosed by said intermediate member (13; 29); reducing the pressure of an atmosphere, said first, second and intermediate members being disposed in said atmosphere; increasing the fluidity of said intermediate member 13; 29) under said atmosphere having a reduced pressure, by heating said intermediate member (13; 29); and increasing the pressure of said atmosphere.
Claim 6
Dependent Claim
40 words
A method of fabricating a composite structure as claimed in Claim 3, wherein the pressure of said atmosphere is made lower than atmospheric pressure in the pressure reducing step, and is returned to atmospheric pressure in the pressure increasing step.
Claim 7
Dependent Claim
25 words
A method of fabricating a composite structure as claimed in Claim 3, wherein said intermediate member (13, 29) is a preform having a predetermined shape.
Claim 8
Dependent Claim
22 words
A method of fabricating a composite structure as claimed in Claim 3, wherein said intermediate member (13; 29) is made of solder.
Claim 9
Dependent Claim
23 words
A method of fabricating a composite structure as claimed in Claim 3, wherein said intermediate member (13; 29) is made of Pb-Sn solder.
Claim 10
Dependent Claim
39 words
A method of fabricating a composite structure as claimed in Claim 3, wherein metalized layers (12, 15) are formed on those surfaces of said first and second members (12,15) which are to be bonded to said intermediate member (13).
Claim 11
Dependent Claim
31 words
A method of fabricating a composite structure as claimed in Claim 4, wherein the pressure of said atmosphere is made lower than one-hundredth of atmospheric pressure in said pressure reducing step.
References Cited (Backward Citations)
No citation records indexed.
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