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EP0262601A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Thermistor and method for producing the same

Assignee: Sumitomo Electric Industries Ltd
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Filing: 1987-09-25
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Granted: —
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Expires: 2007-09-25
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Abstract

Abstract A thermistor comprising a substrate and a heat sensitive element consisting of a semiconductive thin film diamond, which can measure high temperatures up to 800°C or higher.

Inventors

  • 👤 Naoji C/O Itami Works Of Sumitomo Fujimori
  • 👤 Takahiro C/O Itami Works Of Sumitomo Imai

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-26 03:16
CPC Classifications
H; H01; H01C; H01C17/00; H01C17/06; H01C7/00; H01C7/04; H01C7/041

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 16 words
A thermistor comprising a substrate and a heat sensitive element consisting of a thin film diamond.
Claim 2
Dependent Claim 16 words
A thermistor comprising a substrate and a heat sensitive element consisting of a thin film diamond.
Claim 3
Dependent Claim 28 words
The thermistor according to claim 1, wherein the thin film diamond is formed by a vapor phase synthetic method and has a thickness of 0.05 to 100 µm.
Claim 4
Dependent Claim 20 words
The thermistor according to claim 1, wherein the thin film diamond is a semiconductive thin film diamond con­taining a dopant.
Claim 5
Dependent Claim 32 words
The thermistor according to claim 3, wherein the dopant is at least one element selected from the group con­sisting of boron, aluminum, phosphorus, arsenic, antimony, silicon, lithium, sulfur, selenium, chlorine and nitrogen.
Claim 6
Dependent Claim 13 words
The thermistor according to claim 1, wherein the substrate is single crystal diamond.
Claim 7
Independent Claim 56 words
A method for producing a thermistor which comp­rises forming a diamond thin film which optionally contains an impurity element as a dopant on a substrate by a vapor phase synthetic method, forming at least one ohmic electrode on the surface of the diamond thin film and attaching a lead wire to at least one ohmic electrode.
Claim 8
Independent Claim 56 words
A method for producing a thermistor which comp­rises forming a diamond thin film which optionally contains an impurity element as a dopant on a substrate by a vapor phase synthetic method, forming at least one ohmic electrode on the surface of the diamond thin film and attaching a lead wire to at least one ohmic electrode.
Claim 9
Dependent Claim 20 words
The method according to claim 6, which further comprising trimming the diamond thin film to adjust resis­tance of the thermistor.
Claim 10
Dependent Claim 13 words
The method according to claim 6, wherein the substrate comprises single crystal diamond.

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