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EP0255965A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Refrigerant fluid trap for vacuum evaporators for the deposit of thin metal films
Assignee: STMicroelectronics SRL
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Filing: 1987-06-26
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Granted: —
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Expires: 2007-06-26
Abstract
Abstract The trap comprises a structure (1, 11, 12, 13) for passage of refrigerant fluid forming an interior space (5, 17) for trapping condensable vapors. In said interior space (5, 17) there is housed a titanium evaporation source (7, 19).
Inventors
- 👤 Orazio Viscuso
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-03 13:36
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; C23C14/564; B; B01; B01D; B01D8/00; Y; Y10; Y10S; Y10S417/00; Y10S417/901
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
46 words
Refrigerant fluid trap for vacuum evaporators for the deposit of thin metal films characterized in that it comprises a structure (1, 11, 12, 13) for passage of refrigerant fluid shaped in such a manner as to form an interior space (5, 17) for trapping condensable vapors.
Claim 2
Dependent Claim
46 words
Refrigerant fluid trap for vacuum evaporators for the deposit of thin metal films characterized in that it comprises a structure (1, 11, 12, 13) for passage of refrigerant fluid shaped in such a manner as to form an interior space (5, 17) for trapping condensable vapors.
Claim 3
Dependent Claim
24 words
Trap in accordance with claim 1 characterized in that in said interior space (5, 17) there is housed a titanium evaporation source (7, 19).
Claim 4
Dependent Claim
36 words
Trap in accordance with claim 1 characterized in that in said interior space (5, 17) there is housed an evaporation source of an element having an affinity for oxygen such as nickel, chromium or other elements.
Claim 5
Dependent Claim
27 words
Trap in accordance with claim 1 characterized in that said structure (1) is made in U-form with an interior duct (2) for passage of the refrigerant fluid.
Claim 6
Dependent Claim
44 words
Trap in accordance with claim 1 characterized in that said structure (11, 12, 13) includes an interior screen (12) and an exterior screen (13) in the form of a circle-segment vault between which is housed a coiled tube (14) for passage of refrigerant fluid.
Claim 7
Dependent Claim
27 words
Trap in accordance with claim 5 characterized in that said structure (11, 12, 13) also includes a pair of side walls (11) enclosing said interior space (17).
References Cited (Backward Citations)
No citation records indexed.
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