EP0251567A1
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EP
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Dry process apparatus
Assignee: Oki Electric Industry Co Ltd
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Filing: 1987-06-17
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Granted: —
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Expires: 2007-06-17
Abstract
Abstract In a dry process apparatus comprising a reactor (10), first and a second electrodes (18,38) mounted inside the reactor (10), the first electrode (18) being provided to mount a material (20) to be processed thereon, and a high-frequency power supply (24) electrically connected to the first or the second electrode to creat an alternating electric field, a permanent magnet (30) in the form of a ring with an N-pole and an S0pole is provided to generate a magnetic field that interacts with the alternating electric field to induce a magnetron discharge in the space above the material (20) to be processed.
Inventors
- 👤 Haruhisa Kinoshita
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-03 15:10
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402; H01J37/3405; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
78 words
Dry process apparatus having a reactor (10) in which an alternating electric field can be generated by a pair of electrodes (18.38) for processing material (20) mounted on one of the electrodes, for example for etching, sputtering or depositing a thin film. characterised in that a permanent magnet ring (30) with an N-pole and an S-pole serves to generate a magnetic field interacting with the alternating electrical field to induce magnetron discharge to aid processing of the material.
Claim 2
Dependent Claim
78 words
Dry process apparatus having a reactor (10) in which an alternating electric field can be generated by a pair of electrodes (18.38) for processing material (20) mounted on one of the electrodes, for example for etching, sputtering or depositing a thin film. characterised in that a permanent magnet ring (30) with an N-pole and an S-pole serves to generate a magnetic field interacting with the alternating electrical field to induce magnetron discharge to aid processing of the material.
Claim 3
Dependent Claim
26 words
Apparatus according to claim 1 characterised in that the poles are arranged so as to generate substantially parallel field lines extending across the central ring gap.
Claim 4
Dependent Claim
37 words
Apparatus according to claim 2 characterised in that the ring (30) is continuous, optionally circular, elliptical or angular and the respective poles (32,34) are formed on transversely spaced ends of the ring, preferably on diamentrically opposed ends.
Claim 5
Dependent Claim
55 words
Apparatus as claimed in any of the preceding claims characterised in that the magnet (30) is disposed to produce the magnetic field substantially parallel to the surface of a first electrode for locating above the material (20) to be processed, preferably by being disposed to extend in a plane parallel to the first electrode surface.
Claim 6
Dependent Claim
43 words
Apparatus as claimed in any of the preceding claims characterised in that the magnet (30) is mounted inside or outside the reactor (10) and in a stationary manner or rotatable in a plane parallel to surface of the material (20) to be processed.
Claim 7
Dependent Claim
67 words
Apparatus as claimed in any of the preceding claims characterised in that the magnet (30) is mounted below; embedded in, either at the top or bottom; mounted on; or mounted spaced from the electrode (18) on which the material (20) is to be supported, in which later case the magnet (30) may be mounted on the other electrode or in the space between the pair of electrodes.
Claim 8
Dependent Claim
52 words
Apparatus as claimed in any of the preceding claims in which a pair of magnet rings (30,40) serves the generate the magnetic field with the respective N-poles and S-poles being aligned, with preferably the magnet (30) being on the electrode mounting the material (20) and the magnet (40) on the other electrode.
Claim 9
Dependent Claim
110 words
Apparatus according to any of the preceding claims in which one magnet ring (30) or both magnet rings (30,40) are associated with an auxiliary magnetic member for modifying the magnet field, which auxiliary magnetic member may be of permanent magnet material, integral with or distinct from the material of the ring 30, or of ferromagnetic material of substantially no coercive power and may be in the form of a ring extending along permanent magnet (30), radially inward or outward or axially above or below and either contiguous with the ring (30) or spaced therefrom and may have an N-pole adjacent the S-pole of the magnet ring (30) and vice versa.
Claim 10
Dependent Claim
33 words
Apparatus according to any of the preceding claims characterised in that the permanent magnet (30) is electrically connected to the high frequency power supply: or is electrically grounded; or at a floating potential.
Claim 11
Dependent Claim
31 words
Apparatus according to any of the preceding claims characterised in that the electrode, not connected to a high frequency power supply, is electrically connected to a dc or rf power supply.
Claim 12
Independent Claim
43 words
A method of use of the apparatus according to any of the preceding claims in which the material to be processed is placed in axial alignment with the central ring gap either inside or axially spaced from the plane of the ring (30).
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