EP0250073A2
Expired / Lapsed
EP
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Method for producing nitride-base ceramics
Assignee: Tonen General Sekiyu KK
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Filing: 1987-04-28
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Granted: —
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Expires: 2007-04-28
Abstract
Abstract Fired nitride-base ceramics, such as silicon nitride or oxynitride, having a low carbon content and, therefore, low electrical and thermal conductivities, can be produced by heat treating a ceramic precursor comprising polysilazane, polysiloxazane or polycarbosilazane or a mixture thereof as the main ingredient, in a reducing atmosphere such as hydrogen, ammonia or a gas containing these components, followed by firing.
Inventors
- 👤 Hiroshi Kaya
- 👤 Kozaburo Tamura
- 👤 Takeshi Isoda
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-04 18:35
CPC Classifications
C; C04; C04B; C04B35/00; C04B35/515; C04B35/58; C04B35/584; C04B35/589
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
62 words
A method for producing a nitride-base ceramic, comprising the steps of: heat treating a ceramic precursor mainly composed of one selected from polysilazane, polysiloxazane, polycarbonsilazane and a mixture thereof, in a reducing atmosphere to reduce a carbon content of the ceramic precursor; and then firing the ceramic precursor to produce one of silicon nitride and silicon oxynitride with a low carbon content.
Claim 2
Independent Claim
62 words
A method for producing a nitride-base ceramic, comprising the steps of: heat treating a ceramic precursor mainly composed of one selected from polysilazane, polysiloxazane, polycarbonsilazane and a mixture thereof, in a reducing atmosphere to reduce a carbon content of the ceramic precursor; and then firing the ceramic precursor to produce one of silicon nitride and silicon oxynitride with a low carbon content.
Claim 3
Independent Claim
16 words
A method as claimed in claim I wherein said reducing atmosphere is an atmosphere containing hydrogen.
Claim 4
Dependent Claim
16 words
A method as claimed in claim 1 wherein said reducing atmosphere is an atmosphere containing ammonia.
Claim 5
Dependent Claim
23 words
A method as claimed in claim 1, wherein said reducing atmosphere is an atmosphere containing at least one of hydrogen, ammonia and hydrazine.
Claim 6
Independent Claim
25 words
A method as claimed in any one of the preceding claims wherein said heat treatment is carried out at temperature of from 400 to 1600°C.
References Cited (Backward Citations)
No citation records indexed.
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