EP0249198A2
Expired / Lapsed
EP
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Plasma treating apparatus
Assignee: Kuraray Co Ltd
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Filing: 1987-06-10
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Granted: —
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Expires: 2007-06-10
Abstract
Abstract A plasma treating apparatus for a sheet-like structure ; which comprises a generally drum-shaped first discharge ei- ectrode assembly (2) rigidly mounted on a rotary shaft (17) for rotation together therewith so as to extend through a vacuum vessel, which sheet-like structure is adapted to follow the outer periphery of the first discharge electrode assembly, and a second discharge electrode assembly (3) disposed within the vacuum chamber so as to confront the first discharge electrode assembly (2). The vacuum vessel (1) is electrically insulated from an electric circuit (6) which is connected with both of the first (2) and second (3) discharge electrode assemblies, through the intervention of insulating members (14, 15) for electrically insulating the both from each other. These insulating members (14,15) are interposed between a cylindrical body of the drum of the first discharge electrode assembly (2) and the rotary shaft (17).
Inventors
- 👤 Motoyasu Koyama
- 👤 Hidetoshi Teraoka
- 👤 Takao Akagi
- 👤 Shinji Yamaguchi
- 👤 Itsuki Sakamoto
- 👤 Akira Namba
- 👤 Isao Okagaki
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-27 04:46
CPC Classifications
B; B29; B29C; B29C59/00; B29C59/10; H; H05; H05H; H05H1/00; H05H1/24; H05H1/46; B29C59/14
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
131 words
A plasma treating apparatus for a sheet-like structure which comprises a generally drum-shaped first discharge electrode assembly (2) rigidly mounted on a rotary shaf t (17) for rotation together therewith, said rotary shaft extending through a vacuum vessel (1) , said sheet-like structure being adapted to follow the outer periphery of the first discharge electrode assembly (2); a second discharge electrode assembly (3) disposed within the vacuum vessel so as to confront the first discharge electrode assembly, said vacuum vessel being electrically insulated from an electric circuit (6) which is connected with both of the first and second discharge electrode assemblies; and insulating members (14,15)for electrically insulating the both from each other being interposed between a cylindrical body of the drum of the first discharge electrode assembly and the rotary shaft.
Claim 2
Dependent Claim
131 words
A plasma treating apparatus for a sheet-like structure which comprises a generally drum-shaped first discharge electrode assembly (2) rigidly mounted on a rotary shaf t (17) for rotation together therewith, said rotary shaft extending through a vacuum vessel (1) , said sheet-like structure being adapted to follow the outer periphery of the first discharge electrode assembly (2); a second discharge electrode assembly (3) disposed within the vacuum vessel so as to confront the first discharge electrode assembly, said vacuum vessel being electrically insulated from an electric circuit (6) which is connected with both of the first and second discharge electrode assemblies; and insulating members (14,15)for electrically insulating the both from each other being interposed between a cylindrical body of the drum of the first discharge electrode assembly and the rotary shaft.
Claim 3
Independent Claim
25 words
The apparatus as claimed in Cla-im 1, wherein a conductor (27) connected with the first discharge electrode assembly (2) is inserted through the rotary shaft.
Claim 4
Dependent Claim
66 words
The apparatus as claimed in Claim 2, wherein the first discharge electrode assembly (2) is provided with a first coolant passage means (2a) through which a cooling medium flows, said first t coolant t passage means (2a) being fluid-connected in series with a second coolant passage means '120, 20a) for the flow of a cooling medium for cooling the conductor (27) inserted through the rotary shaft.
Claim 5
Dependent Claim
51 words
The apparatus as claimed in Claim 1, wherein the first discharge electrode assembly (2) is provided with a first coolant passage means (2a), said first coolant passage means being fluid-connected through a connecting tubing (21), made of insulating material, with a second coolant passage means (20a) defined inside the rotary shaft.
Claim 6
Dependent Claim
49 words
The apparatus as claimed in Claim 1, wherein the first discharge electrode assembly (2) has an interior of the drum which is communicated with a source (7) of gaseous medium containing a plasma treatment gas, and is maintained at a pressure higher than the pressure inside the vacuum vessel.
Claim 7
Dependent Claim
23 words
The apparatus as claimed in Claim 1, wherein the first discharge electrode assembly has an interior of the drum communicated to the atmosphere.
Claim 8
Dependent Claim
21 words
The apparatus as claimed in Claim 1, wherein the first discharge electrode assembly has an interior of the drum completely sealed.
Claim 9
Dependent Claim
24 words
The apparatus as claimed in Claim 1, wherein the first discharge electrode assembly has opposite ends (2b) covered by respective insulating members (14, 15).
Claim 10
Dependent Claim
78 words
The apparatus as claimed in Claim 1, wherein the second discharge electrode assembly (2) comprises a plurality of generally rod-shaped discharge electrodes (3 1 ... 3 n ) which are supported at opposite ends by respective retaining members (22A, 22B) while extending parallel to each other so as to occupy a portion of the imaginary circle following the outer periphery of the drum-shaped first discharge electrode assembly (2) and also so as to represent a generally cage-shaped structure.
Claim 11
Dependent Claim
72 words
The apparatus as claimed in Claim 9, wherein each of the rod-shaped discharge electrodes (3 1 ... 3 n ) has a first coolant passage (3P 1 ... 3P n ) defined therein for the flow of a cooling medium, and said retaining members (22A, 22B) form respective cooling passages for connecting inlet and outlet sides of the respective coolant passages of the rod-shaped discharge electrodes in parallel relation to each other.
Claim 12
Dependent Claim
69 words
The apparatus as claimed in Claim 9, wherein each of the rod-shaped discharge electrodes (3 1 ... 3 n ) has a first coolant passage. (3P 1 ... 3P n ) defined therein for the flow of a cooling medium, and said retaining members (22A, 22B) form respective cooling passages (22PA 4 22PB) for connecting the respective coolant passages of the rod-shaped discharge electrodes in series with each other.
Claim 13
Dependent Claim
38 words
The apparatus as claimed in Claim 10, wherein supply and discharge ports (57A, 57B) of each of the respective first coolant passages (22A, 22B) of the rod-shaped discharge electrodes are formed in the respective retaining members (22A, 22B).
Claim 14
Dependent Claim
32 words
The apparatus as claimed in Claim 11, wherein supply and discharge ports of each of the respective first coolant passages of the rod-shaped discharge electrodes are formed in the respective retaining members.
Claim 15
Dependent Claim
44 words
The apparatus as claimed in Claim 12, wherein said supply and discharge ports (57A, 57B) are fluid-connected through respective connecting tubings (58), each made of insulating material, with supply and discharge pipings (44, 45, 59) disposed so as to extend through the vacuum vessel.
Claim 16
Dependent Claim
41 words
The apparatus as claimed in Claim 13, wherein said supply and discharge ports (57A, 57B) are fluid-connected through respective connecting tubings.(58), each made of insulating material, with supply and discharge pipings (59) disposed so as to extend through the vacuum vessel.
References Cited (Backward Citations)
No citation records indexed.
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